March Instruments PX 1000 Plasma Etcher/Cleaner

Description

March Instruments PX 1000 Plasma Etcher/Cleaner

  • Batch systems for plasma cleaning or etching.
  • Currently configured with only one 17 in. x 14 in. shelf set.
  • Can accommodate multiple shelves.
  • RFX-600 13.56 MHz, 600W RF generator.
  • Two gas inputs.

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