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Lucas/Signatone Corp. Quad Pro Four-Point Probes QuadPro Resistivity System

Lucas/Signatone Corp. Quad Pro Four-Point Probes QuadPro Resistivity System

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Lucas/Signatone Corp. Quad Pro Four-Point Probes QuadPro Resistivity System

Manual and more photos

Part Number: LS-048

Condition: New, never used. in original crate.We sell it at AS IS,WHERE IS condition. Complete,working demo is optional at extra cost.

Lead Time: 2 weeks after payment.

Location: C-Suite7

Valid Time: Subject to prior sale without notice

Return/Warranty: N/A

Shipping: Customer is responsible for shipping.

Sales Tax(Only for buyers from California, U.S.A.):  We will charge the sales tax separately for end users in California, USA. Please send us resale certification if you want to waive sales tax

Dimension:  51X43X64 inch

Weight:  628 LB

LucasSignatone Corp. Quad Pro Four-Point Probes QuadPro Resistivity Sy (7)

Info from OEM for your reference only.

QuadPro Resistivity System

􀀹 Reports Average Resistivity, Resistivity Standard Deviation, Average Sheet Resistance and Sheet Resistance Standard Deviation

􀀹 Temperature Coefficient of Resistance (TCR) measurements integrated with automated temperature chuck and source meter. (Optional)

􀀹 Automated 2D Color Contour mapping, 3D and Crossection mapping

􀀹 Employs the Dual Configuration Testing method for improved accuracy and repeatability

􀀹 For samples 10 to 300mm

􀀹 1 to 49 NIST traceable automated measurements per sample

QuadPro Automatic System

The QuadPro includes a computer, stepper controller, and base station with either a 200 or 300mm diameter isolated chuck. The software allows for selecting 1, 5, 9, 25 or 49 points for automated testing and mapping of the test sample. Positioning patterns may be set to either round or square configuration.

The edge exclusion may also be defined. On the first measurement, the software auto ranges the meter finding the best settings for the sample testing. Dual configuration assures that errors introduced by the probe head manufacturer are eliminated, increasing the repeatability and accuracy of measurements. The Software controller automatically steps to each position and records the X-Y position, Sheet Resistance, Resistivity and V/I measurement in a visible table.

Upon completion of the test points, a wafer contour map is displayed. The contour map may be toggled between 2D and 3D viewing. The average and standard deviation of resistivity and sheet resistance display prominently above the contour map.

QuadPro TCR Option

The Temperature Coefficient of Resistance option integrates temperature control of the test sample as well as the automated source meter control and resistance calculations. Integrated with a variety of Signatone thermal chuck systems, the test allows setting of temperature steps in degrees C, dwell time at temperature before reading, starting temperature and ending temperature. Each temperature, and resistance reading is stored in a table and plotted on a graph for analysis.

Signatone offers a variety of thermal chucks and temperature ranges. The standard, most common range is ambient to 350°C. However, different combinations of chucks and controllers could have a low of -55°C to a high of 600°C.

QuadPro Source Meter options Keithley 2400 Source Meter

The QuadPro standard configuration includes the Keithley 2400 Source Measurement Meter. This meter allows resistance measurements in the range of 1 milliohm to 2 megaohms. Some of the newer high resistance materials require a greater resistance measurement range. For those applications, Signatone implements the Agilent 4156 Parametric Analyzer along with special triaxial shielding. This configuration increases the range from 100 millohms to 10 gigaohms,

QuadPro and Manual systems (QuadPro-301-6)

Since 1968, Signatone has offered a simple manual resistivity measurement stand. This simple stand may be incorporated with QuadPro computer and source meter for easy accurate measurements. Of course, the sample is positioned by hand. A lever lowers the probe head into contact with the sample. The auto ranging, dual configuration and data collection features do the calculations accounting for edge error and probe head error assuring repeatable NIST traceable accurate results.

Four Point Probe heads

Signatone offers two probe heads to choose from; the SP4 and the HT4. The SP4 is an inline probe made of delrin and used in most applications. Several choices are available for configuration to your specific application. The three spacings are .040, .050 and .0625 inches. The three pressures available are 45, 85, and 180 grams. Tips are made of Tungsten Carbide or Osmium and a choice of .0016, .005, .010 inches radius.

The HT4 inline four point probe head is made of ceramic and designed for high temperature and high resistance measurements. The HT4 accurately collects data at temperatures up to 650°C. The coaxial high temperature wiring also allows resistance measurements up to 10 Gigohms. The HT4 features spacing of .050 and .0625 inches and pressure is fixed at 180 grams. Tips are made of Tungsten Carbide or Osmium and a choice of .0016, .005, .010 inches radius.

QuadPro Test & Calibration

The system uses the Dual Configuration test method of ASTM Standard F84-99 to compensate for errors in probe spacing and errors caused by proximity to the edge of the conducting layer. NIST traceable calibration standards are available for purchase with the system. Proper use of the standards and the calibration procedure insures the specified system accuracy of better than 1%.

QuadPro Specifications

Measurements Manual Auto High R

Range Rs (ohms) 10-3 to 106 10-3 to 106 10-1 to 1010

Accuracy <1% <1% 5X @ > 108

Test Time / Point 10 sec 2 sec Varies

Dual Configuration Method Yes Yes No

Display Resistivity or Thickness Yes Yes Yes


Sample Size 300mm 50-300 mm 50-300 mm

Shape Round or Square Yes Yes Yes

Number of Points Measured 5 – 25 5 – 49 5 – 49

Open Frame or Enclosure Open Frame Enclosure Enclosure

TCR Option 150 mm 200 mm 300 mm

Temperature Range 5oC to 500oC 400oC 200oC

Automation: Select Min Temp, Max Temp, Interval & Dwell Time Then Auto Run

Display: Temp, Rs, Resistivity or Thickness

Calculate TCR or Map Rs @ Temperature

Output: 2D and 3D Contour Maps, Save & Get Results, Print Results including contour maps, Copy to Clip Board, etc., Retest function

Probe heads

Type Material PinSpacing Spring Pressure Tip Diameter

SP4 Delrin 40, 50, or 62.5 mils 45, 85, or 180 grams, TC or OSM, 1.6, 5, or 10 mils

HT4 Ceramic 50, 62.5 180 grams Same Same

:Calibration Substrate wafers available

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