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Lam Research Spare Parts

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The following Lam Research Spare Parts are  only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!

1 715-3300394-002 Frog Leg
2 715-3300394-002 Frog Leg Rework
3 715-330825-006 Chamber Liner
4 715-330825-006 Chamber Liner Rework
5 715-330928-002 Chamber Liner
6 715-330981-001 Chamber Liner
7 715-330982-001 Chamber Liner
8 715-495014-001 Slit Door Liner Reanodise only
9 715-495014-001 Slit Door Liner Rework
10 715-015808-001 Shower Head
11 716-008608-002 Window With Step
12 716-011009-001 Window Sapphire
13 716-013423-001
14 716-331088-001 Ring ESC 8″Top Quartz Poly
15 795-020446-005
16 839-012255-001 Inner Gate Bellows
17 839-09866-040 Bellows
18 715-011640-006 Fing, Focus Anodized (Semi 6″)
19 715-018991-206 Upper Electrode 6″
20 715-330825-007
21 718-094523-261 ESC Chuck 6″
22 716-011533-001 NSG-OZ Quartz Window
23 716-008645-001 Cover Ring Quartz HP
24 715-011531-008 Electrode Aluminum Anodized 6″
25 715-011531-009 Electrode Aluminum Anodized 8″
26 715-009657-001 Ring Outer Anodized
27 716-160255-002 Bell Jar Sleeve Quartz ISO CH 4500
28 716-011009-001 Window Quartz
29 716-011427-001 DSQ Quartz Window
30 716-011493-001 DSQ Quartz Spacer
31 716-021323-001 Funnel Quartz Power Supply Moduel
32 716-028454-012 Disk Quartz
33 716-028454-012 Disk Quartz
34 716-031052-001 Window Quartz HDT Endpoint
35 716-140236-003 Confinment Ring
36 716-330504-065 Focus Ring Ceramic
37 716-051609-003 Spacer Heater (4Pin Arry)
38 716-021717-001 Bell Jar Sleeve Quartz
39 716-021717-002 Bell Jar Sleeve Quartz
40 713-028487-001 Vespel Confinement Ring
41 716-012639-024 Noz, Inj, 8X.055-45 Deg RD
42 716-012640-011 Window Gas Inj, Face Seal, Qtz, NSG
43 716-012640-012 Window Gas Inj, Face Seal, QR
44 716-013344-001 Ring Cover Outer GND
45 716-013402-003 Cover H/E Ring Quartz
46 716-014843-001 6 Ring WAP Qtz Generic 17″ DFC 300mm
47 716-023013-004 Ring Hot Edge Si DFC 300mm Flex
48 716-331142-305 Top Edge Ring
49 716-801306-009 Quartz Disk
50 716-801451-019 Baffle Chamber 2300 MW Stripper U
51 716-802779-009 Gas Injector
52 716-140236-062 Confinement Ring Quartz
53 716-330891-002 Window TCP Quartz 9600
54 716-000941-001 Quartz Plasma Disk Baffle
55 716-347266-002 Baffle Liner Chamber Opaque (9600)
56 716-330355-001 Window Quartz Heated Endpoint
57 716-443179-102 R Edge Base Quartz
58 839-012255-001 Inner Gate Bellows
59 716-008718-001 Quartz Gas Injector
60 716-801667-005 Quartz Viewport Window
61 716-801306-004 Window Quartz Gas Inject Fire Polish
62 716-016763-001 Ring Filler Inv Step 200mm
63 716-016830-003
64 716-016831-007 Ring WAP Qtz Geniric 200mm
65 716-027740-001 Window Quartz
66 716-031257-209 Ring Edge Top 2300
67 716-443090-002 Ring Quartz Upper
68 716-005205-003 Pl CVR Step Qtz 200mm 2300 Exelan
69 716-016763-001 Ring Filler Inv Step 200mm
70 716-016830-003 Ring Filler Inv Step 200mm
71 716-016831-007 Ring WAP Qtz Geniric 200mm
72 716-027740-001 Window Quartz
73 716-031257-209 Ring Edge Top 2300
74 716-140236-001 Confinement Ring Quartz (002, 003)
75 716-003543-006 Ring, Hot Edge, Si, 300mm
76 716-003543-001 Ring, Hot Edge, Si DFC, 300mm
77 716-044863-001 Ring, He, A/FL, Si, SGL XTAL, 1.51D, 300mm
78 716-023013-020 Ring, Hot Edge, 195 HGT, Si, 300mm, SP
79 716-003543-016 Ring, Hot Edge, Si, 300mm
80 716-023013-007 Ring, Hot Edge, 195 HGT, Si, 300mm
81 716-040738-402 R, HE, 4XX ESC, W/Flat, SGL XTL, 300mm
82 716-040738-412 R, HE, 4XX /FLAT, SGL  XTL, 300mm
83 715-030860-001 Chamber Liner
84 715-801021-012 Chamber Liner (2300Metal_AL)
85 715-443178-300 Al, Hot Edge Ring
86 715-009779-002 Cap Electrode
87 715-007025-001 Electrode Aluminum Anodized
88 715-008721-001 Electrode Aluminum Anodized
89 715-007469-002 Electrode Lower 8″ 4-Pin
90 602006 Pin, Lift Lower Electrode (Drytek)
91 2301721 Rev 3 Liner Ceramic, 100-150mm, CHMBR 2, 4, Upper Electrode(Drytek)
92 716-006721-001 3-Hole Ring
93 716-006753-001 Insulator Ring
94 716-011036-001 Orifice Ring
95 716-011510-001 3-Hole Ring
96 716-011536-001 Ring Upper Electrode Insulator Ceramic
97 716-011563-001 Clamp Ring 6″
98 716-011758-016 Lower Combo Ring, 6″
99 716-011922-001 Upper Electrode CeramicNg, 6″
100 716-011923-001 Clamp Attachment Ring 6″
101 716-020904-016 Lower Focus Ring, BAC, 6″
102 716-020905-001 Lower Filler Ring, BAC, 6″
103 716-028028-004 Upper Electrode Clamp Ring, 6″
104 716-028123-002 Ceramic Filler Ring, 6″
105 716-028678-261 Ceramic Clamp Ring, 6″
106 716-028688-01 Clamp Lower Plate, 8″
107 716-028688-261 Plate, Bottom, Wafer Clamp, 6″
108 716-028725-161 Clamp Ring
109 716-030136-001 Ceramic Focus Ring, 6″
110 716-140068-001 ESC Ceramic Focus Ring, 6″
111 716-140069-002 Ring, Upper Insulator
112 716-140139-001 Hot Edge Ring or Focus Ring Insert, 8″
113 716-140163-001 Hot Edge Ring or Focus Ring Insert, 8″
114 716-230121-001 RF Shaped Window (6″ or 8″)
115 716-330045-001 Edge Ring 8″
116 716-330121-001 RF Shaped Window (6″ or 8″)
117 716-330167-281 Bottom Actuated Clamp Ring, 8″
118 716-330504-064 ESC Focus Ring (Modified–Regrind), 6″
119 716-330504-064 ESC Focus Ring, 6″
120 716-330504-081 ESC Focus Ring  8″
121 716-330504-081 ESC Focus Ring, 8″
122 716-026652-002 Ring Edge BOT 200-300mm
123 716-031257-309 Ring Edge Top 2300
124 716-017112-330 Ring WAP 17.07 x 1.10 Thk AN SLT
125 720-009531-010 Screw FLTHD 6-32 KEL-F
126 715-011565-002 Bolt Clamp Rtng
127 713-011585-004 Cover Clamp Bolt “A”
128 713-011926-001 Cap Bolt Clamp Retain
129 796-002673-001 Stem 1/4″ KEL-F
130 720-093815-006 Screw Gas Dir Disk
131 716-011969-100 RING,QTZ,COUPLING,HI EDGE,300MM
132 716-014843-300 RING,WAP,QTZ,GENERIC,17IN,DFC
133 720-090943-010 10-32 X 5/8 KEL-F SCREW
134 716-031052-002  Window Quartz HTD Endpoint
135 715-011563-161 CLAMP, WAFER, DOMED, CERAMIC, 6″, 1-FLAT, 4500
136 715-140153-001 Coupling Ring, Ceramic.  Ref. 715-140153-001.
137 716-001427-003 CERAMIC DISK
138 716-006721-001 Insulator Ring
139 716-006753-001 Ceramic Insulator Ring.  Reference 716-006753-001
140 716-011570-001 ORIFICE FILLER W/C CERAMIC
141 716-011571-001 CERAMIC WASHER
142 716-011572-001 CERAMIC RETAINER CLAMP, 1/4 TURN
143 716-011573-001 CERAMIC PLUNGER, SHORT
144 716-011573-001 Ceramic Plunger, 1/4 Turn

OEM# 716-011573-001

CPN: ML-43224
145 716-011573-004 CERAMIC PLUNGER LONG
146 716-011759-016 RING, MOUNTING, CERAMIC
147 716-020905-001 Lower Filler Ring, BAC, 6″
148 716-028414-015 RING, FOCUS, CERAMIC
149 716-028447-002 CERAMIC DISK
150 716-029435-006 RING, ELECTRODE, CERAMIC
151 716-030135-001 CERAMIC RING
152 716-140139-001 Hot Edge Ring, 200mm
153 716-140427-001 SAME AS 716-140427-001 IN CERAMIC
154 716-230121-001 RF Shaped Window (6″ or 8″)
155 716-230121-211 RF SHAPED WINDOW
156 716-250514-001 INSULATOR RING CLAMP CERAMIC
157 716-250515-002 INSULATOR RING LOWER CERAMIC
158 716-330045-002 EDGE RING 8″ – ALLIANCE 9600 PTX
159 716-330121-211 RF Shaped Window (6″ or 8″)
160 716-330122-002 Plate, Top, Ceramic
161 716-330167-161 CLAMP RING
162 716-330167-261 Bottom Actuated Clamp (BAC) Ring.  99.8% High Purity Alumina.  Ref. P/N 716-330167-261.
163 716-330504-061 RING FOCUS 6″ GDRING JEIDA ESC
164 716-330890-001 CONTAINMENT RING BASR
165 716-330892-001 CERAMIC SHOWER HEAD
166 716-330892-007 GDP – ALLIANCE 9600 PTX
167 716-460417-001 INNER CERAMIC LINER
168 716-331157-022 Disk Interferometer Top Gas
169 839-017612-009 Assy, Window Quartz Tube
170 716-331142-001 Ring Edge Top Wide
171 716-039961-001 Ring Focus Steped Filter 200mm
172 716-011969-100 RING,QTZ,COUPLING,HI EDGE,300MM
173 716-013344-001 / 716-013344-601 RING,COVER,OUTER,GND
174 716-012640-012 WINDOW,GAS INJ,FACE SEAL,QRTZ,NSG
175 716-012639-024 NOZZLE, INJ. 8x, .055-45DEG RDL-1CTR
176 716-014843-300 RING,WAP,QTZ,GENERIC,17IN,DFC
177 716-023013-004 RING,HOT EDGE,.195 HGT,SI,DUAL
178 716-013402-003 Cover H/E Ring Quartz 300mm
179 716-017112-330 RING,WAP,17.07X1.10THK,AN SLT
180 716-012639-024 NOZZLE, INJ. 8x, .055-45DEG RDL-1CTR
181 716-014843-300 RING,WAP,QTZ,GENERIC,17IN,DFC
182 716-039962-001 Edge Ring
183 716-014843-303 Ring WAP Thk
184 716-021323-002 Quartz Funnel DSQ Chamber
185 716-331089-001
186 716-026652-902 Ring Edge BOT 200-300mm
187 716-031257-531 Ring Edge Top Quartz EBP 300mm
188 716-140139-211 Hot Edge Ring Silicon
189 716-008608-001 IEP Window Sapphire Gas Innjector
190 716-441044-005 Shower Head Sapphire Coated Strip Chamber
191 716-021323-002 Quartz Funnel DSQ Chamber
192 790-098558-002 Quartz Extention Liner Kit
193 15367-01 Pin Lift Quartz
194 16532-01 Plate Quartz Lamp
195 16784-01 Spool Quartz
196 17621-01 Plate Gas Dist 6”
197 17622-01 Plate Diffuser Quartz
198 71805-01 Window Quartz 1.25 DIA
199 17688-01 Gas Distribution Plate 200mm
200 14738-01 Bubbler Quartz
201 734-007524-294 O-Ring Chemraz, SSE38 21.17 ID x .142C/S
202 734-007524-284 O-Ring Chemraz, SSE38 17.955 ID x .139C/S
203 796-028633-010 Screw
204 720-090943-010 Kel-F 10-32 Screw
205 715-011746-161 Aluminum Plate Wafer Clamp 6″
206 716-443086-301 Silicon Hot Edge Ring
207 716-801306-008
208 716-800951-201
209 716-331142-201 Ring Edge Top Wide NSG
210 716-331099-001 Quartz Edge Ring
211 716-007136-002 Ring Quartz Upper HPT
212 718-094523-281 Assy Electd ESC 8″ Notched Lt Focus
213 716-331030-001 WDO RF SHP CER F/G 37 Holes 3xC
214 716-013402-008 Cover H/E Ring Quartz
215 716-801667-003 Window Quartz
216 716-011572-001 Clamp Retainer, 1/4 Turn
217 716-011563-161 Plate Wafer Clamp 6″ Dome
218 716-011764-281 Plate Wafer Clamp 8″ Dome No Flat
219 716-028668-261 Ring Clamp
220 716-028721-261 Plate Bottom Wafer Clamp 6″ Major Flat W/P
221 716-028721-281 Plate Bottom Wafer Clamp 6″ Domed Shadow
222 716-440345-261 Plate Bottom Wafer Clamp
223 716-017581-002 Ring ELCTD 2 Piece
224 716-011969-002 Ring Quartz Coupling 300mm
225 716-803156-004 B Focus Ring CVR DFC 300mm
226 716-017112-300 Ring WAP 17.07 x 1.10 THK AN SLT
227 716-460875-002 Insulator Lower Electrode Strip Chamber
228 716-008854-001 Disk Diffuser Duocel 6″
229 716-031257-534 Edge Ring
230 716-040737-407 Coupling Ring Quartz
231 716-331157-024 Quartz Disk Top Gas
232 715-011531-015 Electrode Upper 6″
233 716-028454-015N TPC Quartz Window Y203 (Coated New Only)
234 716-140125-401, A Baffle 8″ SiC-1H
235 716-140125-100, G Baffle 8″ SiC-1H
236 716-330045-281 Ring Focus 8″ ESC Guard
237 A06-001-01 Window Vented Quartz
238 16532-01 Top Plate Quartz
239 06-0091 Quartz Plasma Chamber
240 713-018426-369 Insert, Vespel Ring
241 715-007469-001 Lower Electrode 6″, 4 pin
242 715-007469-102 Lower Electrode 6″, 4 pin
243 715-011531-012 Electrode
244 715-011531-014 Electrode 8″,
245 715-011531-102 Electrode 6″
246 715-011640-005 Focus Ring 4″
247 715-011673-105 Lower Electrode 5″,
248 715-011746-141 Plate Wafer Clamp 4″
249 715-011746-151 Plate Wafer Clamp 5″
250 715-018991-208 Electrode Upper 8″
251 715-018991-006 Electrode Upper 8″
252 715-028087-005 Shroud 6″ 2 mil hard
253 715-028559-001 Showerhead 6″
254 715-028606-161 Wafer Clamp 6″
255 715-030320-001 BSR Injection Ring
256 715-28608-161 Non-Contact Wafer Clamp
257 715-31752-206 Electrode Lower 6″
258 715-31752-208 Electrode Lower 8″
259 715-330000-090 Gas Injection Ring
260 715-330135-001 BSR Injection Ring
261 715-330984-001 BSR Injection Ring
262 715-330987-001 BSR Injection Ring
263 715-11986-108 Lower Elctrode
264 715-011531-002 Upper Electrode
265 715-011639-006 Upper Electrode
266 716-460216-002 Ring Focus 8″ STP Chamber
267 716-331051-006 Uniformity Ring
268 715-009306-006 RING FOCUS 6″
269 713-011560-001 Teflon Shroud
270 713-011574-001 Plunger Wafer Clamp Upper
271 713-011575-001 Clamp Retaining Nut
272 713-011578-001 Plunger Guid Sleeve
273 713-011579-001 Plunger Guide
274 713-021267-001 Pin Clamp Aligment Head
275 715-011664-004 Cap Lower Electrode 4″
276 715-011925-001 Bolt Capped Clamp Retaining
277 715-140125-101 Baffle Lower
278 716-011580-246 Plate Clamp 4″
279 716-028414-014 Ring Focus
280 839-011906-001 Electrode Silicon 6″
281 713-011577-001 Retainer Washer
282 716-011624-001 Ring Filter Ceramic
283 716-801568-002 Window Quartz
284 716-022030-004 SLV Quartz Stepped Pin DC Bias
285 720-092759-016 1/4-20 x 1″ Slotted FH Screw
286 716-031257-909 Ring Edge Top Quartz 300mm
287 716-443189-002 Quartz Cover Ring
288 716-331157-004 High Purity Quartz Disk for 9400DFM
289 716-140432-002 Insert Ring Upper Keyed
290 716-028454-512 Disk Quartz
291 716-331088-004 R Edge 8″ ES NCH Top Quartz EX
292 716-004655-001 Ring Quartz Upper
293 716-331157-014 Top Disk Quartz
294 716-028123-003 Filler Ring
295 716-330915-001 Insulator Ceramic Gas Ring
296 716-331128-001 Window Sapphire
297 716-140432-004 Quartz Ring Upper, Konsi 51182
298 716-016831-002 Ring WAP Konsi 51182
299 716-011493-001 Spacer Quartz P.R. (DSQ)
300 716-140139-213 Ring Hot Edge HI W
301 716-016830-002 Ring WrapTwist Top Stepped DFC200mm
302 716-007136-011 Ring Quartz Upper HPT
303 716-008645-005 Cover Ring Quartz HP
304 716-026654-902 Ring Edge Bot Quartz 200-300 KONSI 51182
305 716-045265-123 Ring Cover Gnd EXT Quartz 300mm
306 716-021216-002 Top Adjust CPLG 2300 300mm
307 716-802034-001 Liner Chamber Lower
308 716-802033-001 Liner Chamber Lower
309 716-801627-004 R. FOC 300mm STPR 12″
310 716-443230-002 Confinement Ring One Piece HP
311 716-443090-010 R. Quartz Upper HP
312 716-330891-802 Window Top Quartz 9600xx
313 716-331157-013 Plate Shield 300mm
314 716-013350-010 SP IEP Optics 2, 4 Long NSG
315 716-021209-366 BOT ADJ CPLG 2300 300mm DZ
316 716-027425-001 Ring Cover Outter Stepped
317 716-012639-023 Injector 1 CTR 8 RDL Quartz NSG
318 716-021209-001 BOT ADJ CPLG 2300 300mm
319 716-331142-999 R Edge Top Wide 8″ Flat Test
320 716-140432-802 Ring Upper Keyed
321 716-140236-803 Confinement Ring
322 716-018468-130 Ring Cover Outer Ground .130 Thk Quartz
323 716-022025-001 Ring Outer CPLG 2300 200mm
324 716-018468-090 Ring Cover Outer Ground .090 Thk Quartz
325 716-0036516-02 / 716-0036516-01 Quartz Face Outer Electrode
326 716-028454-715 Disk Quartz HPQ
327 716-017112-002 Ring WAP Twist Top 17″ 300mm EXELAN
328 716-021216-367 Top ADJ CPLG 2300 300mm DZ
329 716-016394-001 Ring Confinement One Piece HPT
330 716-027997-001 Electrode Outer Half Quartz Face
331 716-027996-001 Electrode Outer Full Quartz Face
332 716-021209-368 BOT ADJ CPLG 2300 300mm DZ
333 716-800951-311C XXX Base Focus Ring Shield 300mm FNSH PROC
334 716-082039-001 TCP Window Silicon
335 716-069688-002 Silicon
336 716-026653-902 Bottom Edge Ring (KIYO)
337 716-800952-001 Base Focus Ring Metal
338 716-003686-188 Edge Ring (Metal Chamber)
339 716-140118-001 Focus Ring ESC 8″
340 716-031453-002 Lam KK
341 716-011624-007 Ring Ceramic
342 857-073299-001 Talon Gaskets 300mm
343 713-072792-003 Talon Gaskets 300mm
344 857-072806-005 Talon Gaskets 300mm
345 857-073710-002 Talon Gaskets 300mm
346 839-044157-431 (Local) Flex 45 EX Silicon Electrode
347 716-069688-040 Flex 45 EX Silicon Electrode
348 839-019090-324 ESC 300mm
349 839-800327-315 ESC 300mm
350 857-065064-004 ABE Gaskets
351 714-065064-004 ABE Gaskets
352 839-052157-010 ABE Silicon Electrode Inner
353 839-052158-021 ABE Silicon Electrode Outer
354 796-010692-002 Bellows Rocker N/N
355 790-022847-003 ACTR Bellows BSR Lam 2300 WEB
356 716-140432-001 Ring Upper Keyed
357 839-330743-002 BASR Bellows
358 839-011906-912 Electrode Silicon Polish
359 839-031766-001 Bellows Lifter
360 605-012620-001 PCB Index Dual SNSR (X)
361 716-140163-261 Ring Hot Edge 15 Deg (Y)
362 716-140432-804 Ring Upper Keyed
363 857-073299-001 LAM 12″ Flex LRC Gaskets
364 713-069935-003 LAM 12″ Flex LRC Gaskets
365 713-072792-003 LAM 12″ Flex LRC Gaskets
366 857-072806-005 LAM 12″ Flex LRC Gaskets
367 857-073710-002 LAM 12″ Flex LRC Gaskets
368 713-073439-010 LAM 12″ Flex LRC Gaskets
369 714-072727-048 LAM 12″ Flex LRC Gaskets
370 714-072728-003 LAM 12″ Flex LRC Gaskets
371 857-084241-010 LAM 12″ Flex LRC Gaskets
372 857-065064-004 LAM 12″ Flex LRC Gaskets
373 714-059445-025 LAM 12″ Flex LRC Gaskets
374 713-066269-002 LAM 12″ Flex LRC Gaskets
375 857-050466-008 LAM 12″ Flex LRC Gaskets
376 857-050466-001 LAM 12″ Flex LRC Gaskets
377 713-066825-001 LAM 12″ Flex LRC Gaskets
378 857-027108-001 LAM 12″ Flex LRC Gaskets
379 857-084241-025 LAM 12″ Flex LRC Gaskets
380 713-080721-001 LAM 12″ Flex LRC Gaskets
381 713-088966-001 LAM 12″ Flex LRC Gaskets
382 857-073299-002 LAM 12″ Flex LRC Gaskets
383 857-086768-095 LAM 12″ Flex LRC Gaskets
384 713-040539-001 LAM 12″ Flex LRC Gaskets

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