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Lam Research Spare Parts

Please contact us for the Lam Research  Spare Parts availability of the following parts. Please include the P/N, Description, Quantity and photos if possible.

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Description

Please contact us for the Lam Research Spare Parts availability of the following parts. Please include the P/N, Description, Quantity and photos if possible.

OEM OEM# Description
LAM 026182 Electrode, Upper, AL
LAM  2101363 WAFER CLAMP
LAM 2201679 Screw, Spring,
Stainless Steel
LAM 2301700 Tube, Ceramic
LAM 2301856 Ring, Ceramic, ASIQ
LAM 2201679 SCREW, SPRING,
STAINLESS STEEL
LAM 228-022-0241 CARTRIDGE, DEIONIZER,
10″
LAM 2301700 TUBE, CERAMIC
LAM 2301856 RING, CERAMIC, ASIQ
LAM 4C447 FRAME BLOWER  MODEL: 4C447
LAM 5009100000 CLAMP, PLUNGER &
RETAINER, CERAMIC (4420)
LAM 5009101000 SCREW, VENT, AL.
LAM 5009101001 SCREW, VENT, CERAMIC
LAM 5009106020 CLAMP, RETAINER,
CERAMIC (RAINBOW 4420)
LAM 5009106034 ASSY, SPRING,
PLUNGER, LAM
LAM 5009106067 CHAMBER, PLASMA,
QUARTZ
LAM 5009106073 DISK, ALIGNMENT
LAM 5009106075 RING, COVER, QUARTZ
LAM 5009106084 SCREW, #6-32 X 5/8,
SS
LAM 5009106106 KEY, 3/32 X 8.0 LG.
LAM 5009106127 PLUG, PIN, WAFER
LAM 5009106133 RING, CLAMP, AL, ASIQ
LAM 5009106134 WASHER, SS,
1/4″, ASIQ
LAM 5009106135 SCREW, SPRING,
STAINLESS, ASIQ
LAM 5009106137 SLEEVE, TEFLON, ASIQ
LAM 5009106138 E-CLIP, SS, ASIQ
LAM 5009106139 SCREW, SHOULDER, ASIQ
LAM 5009126001 INSULATOR, RING, LAM
490
LAM 5009176016 CAP, KEL-F, O.D.
-0.370, I.D. -.280
LAM 5009176022 INSERT, PLUNGER
LAM 5009176028 DOOR, LOAD LOCK
(ORIGINAL)
LAM 5009176034 CAP, THREADED,
FEMALE, KEL-F
LAM 5009176035 PLUNGER, HOUSING,
KEL-F
LAM 5009176036 SCREW, 10-32, KEL-F
LAM 5009176043 SCREW, KEL-F, FHSL,
6-32 X 5/8
LAM 5009176048 CAP, THREADED,
FEMALE, KEL-F, #3/8-16
LAM 5009176056 GASKET, TEFLON
LAM 5009200001 COVER, SCREW,
ELECTRODE, LOWER
LAM 515-093894-001 O-RING
LAM 600-000134-001 ASSY., CLAMP,
RETAINER, &, PLUNGER
LAM 6005000003 KIT, PLUNGER
ASSEMBLY, KEL-F
LAM 6005000009 KIT, PLUNGER, CERAMIC
LAM 6005000010 PUCKS, ALIGNMENT
LAM 6005000011 ASSY, PUCK,
ALIGNMENT, 11″
LAM 6005000016 KIT, PM, PLUNGER,
9600
LAM 6005000019 KIT, CLEAN, CHAMBER,
9600
LAM 6005000031 KIT, PLUNGER, LONG,
KEL-F
LAM 6005000046 ASSY, LIFT PIN,
CARTRIDGE
LAM 6005000047 KIT, PM, RAINBOW,
MODEL 4528
LAM 602120 ASSEMBLY, PIN, LIFT,
WAFER
LAM 602258 SCREW, SHOULDER
LAM  601124 BAFFLE
LAM  601179 BAFFLE PLATE
LAM  601187 PLATE-DIFF, ANOD (100, 125, 150MM)
LAM  601224 DIFFUSER PLATE
LAM  602250 BAFFLE PLATE TOP
LAM 6150000015 KIT, SUB-ASSY., PM,
ELECTRODE & LIFTER, LOWER
LAM 6150000018 KIT, SUB-ASSY., PM,
HOUSING, CHAMBER, LOWER
LAM 6150000020 KIT, SUB-ASSY., PM,
SPINNER, LIFTER
LAM 645-000217-001 MICRO
SWITCH#311SM706-T
LAM 660-024637-026 RFDS
LAM 676-000504-003 MOTOR 12 VDC
LAM 713-000032-001 BUSHING, VESPEL,
LARGE
LAM 713-000032-002 BUSHING, VESPEL,
SMALL
LAM 713-002870-001 SLIT, WINDOW, END
POINT, TEFLON
LAM 713-004108-001 ANODE PLUG
LAM 713-008060-001 GAS FEED STANDOFF
LAM 713-011545-002 GUIDE, SPRING
LAM 713-011546-002 SLEEVE, PLUNGER GUIDE
LAM 713-011548-001 SLEEVE, PLUNGER GUIDE
LAM 713-011558-001 RING, ELECTRODE
INSULATOR
LAM 713-011560-001 RING, SHROUD
LAM 713-011574-001 PLUNGER, WAFER CLAMP
LAM 713-011575-001 NUT, RETAINER
LAM 713-011576-001 ALIGNMENT PIN, CLAMP
LAM 713-011577-001 WASHER, CLAMP
RETAINING
LAM 713-011578-001 SLEEVE, PLUNGER GUIDE
LAM 713-011578-003 SLEEVE, PLUNGER GUIDE
LAM 713-011579-001 GUIDE, PLUNGER
LAM 713-011584-001 PLUNGER, WAFER CLAMP
LAM 713-011585-001 COVER, CLAMP BOLT
LAM 713-011585-004 INSERT, TEFLON
LAM 713-011592-001 WASHER, KEL-F, O.D.,
-0.625, I.D. -0.200
LAM 713-011592-002 WASHER, KEL-F, O.D.,
-0.625, I.D. -0.240
LAM 713-011650-006 RING, FOCUS COMBO
LAM 713-011752-001 INSERT, 6-32 THREAD
LAM 713-011760-001 WASHER, EDGE, FOCUS,
RING
LAM 713-011803-002 RING, ELECTRODE CLAMP
LAM 713-011926-001 CAP, BOLT ELEC.
LAM 713-011928-001 CAP BOLT ELECTRODE
LAM 713-011980-001 HOUSING, PLUNGER
LAM 713-018426-369 INSERT, VESPEL
6″
LAM 713-020801-001 SHLD, WATER, HEADLOAD
AXIS
LAM 713-020911-102 PLUNGER, WAFER CLAMP,
UPPER
LAM 713-021267-001 CLAMP, PIN HEAD
LAM 713-021268-001 CLAMP, PIN BASE
LAM 713-021310-001 WINDOW P.S. MODULE
LAM 713-022442-001 LID, ENCLOSURE
LAM 713-022446-001 SHIELD SPLASH INNER
LAM 713-022447-001 SHIELD SPLASH OUTER
LAM 713-023568-001 LIP ENCLOSURE LID
LAM 713-023665-001 LID DRIP PAN
LAM 713-028281-001 CONFINEMENT RING
LAM 713-028485-001 BOLT, ELECTRODE RING
CLAMP, KEL-F
LAM 713-028487-001 RING, CONFINEMENT,
VESPEL
LAM 713-028553-001 CONFINEMENT RING
LAM 713-028553-002 CONFINEMENT RING
LAM 713-028553-103 RING, CONFINEMENT,
VESPEL
LAM 713-098661-001 SLOTTED PAN
LAM 713-140214-001 GUIDE PIN, REV A
LAM  713-140214-001-A GUIDE PIN, REV A
LAM 713-140397-004 PIN, LOWER ELECTRODE,
6″ 10-32 UNF
LAM 713-140397-005 PIN, LOWER ELECTRODE
LAM 713-140434-001 PIN, INDEX, RING,
QTZ.
LAM 713-250585-001 HSG, ISOLATOR, RF
LAM 713-330153-003 Rod, Adjustable,
Clamping, Vespel, 9600
LAM 713-330166-002 COVER, ROD, CLAMPING,
B.A.C 9600
LAM 713-330311-001 CLIP, B.A.C, 9600
LAM 713-540183-002 BUSHING, LOWER, PEEK
LAM 713-540184-002 BUSHING, UPPER, PEEK
LAM 714-330982-001 2 MIL HARD ANODIZE
WITH SEALANT
LAM 714-460562-002 COVER ELECTRODE
HOUSEING, ESC
LAM 714-704612-001 LINER, CROSSBAR
LAM 715-000743-001 MOUNT GEAR CAP
LAM 715-001147-002 KEY, 1/8″ SQ. X
0.75″ LG.
LAM 715-001147-006 KEY, 1/8″ SQ. X
3.00″ LG.
LAM 715-001408-001 ELECTRODE, UPPER
LAM 715-001408-003 ELECTRODE, UPPER
LAM 715-002007-001 REACTOR HINGE PIN
715-02007-1
LAM 715-002206-001 RING, CLAMP ELECTRODE
LAM 715-004042-001 ELECTRODE 8″
LAM 715-004042-002 ELECTRODE, LOWER
LAM 715-004042-003 ELECTRODE, LOWER
LAM 715-004042-004 ELECTRODE, LOWER
LAM 715-005153-001 SEAL PLATE, REAR
LAM 715-005213-001 FOUR PIN LIFTER
REPAIR
LAM 715-005844-001 RING, ORIFICE
LAM 715-005965-001 SEAL PLATE, FRONT
LAM 715-006213-001 FOUR PIN LIFTER
FLANGE
LAM 715-006362-006 SCREW #8 ANODIZED
LAM 715-006389-001 SPACER CHAMBER
LAM 715-006436-001 BARRIER ION ANODIZED
LAM  715-006681-001 BAFFLE, LOWER
LAM 715-006719-001 PLATE, SEAL
LAM 715-007025-001 ELECTRODE, UPPER
LAM 715-007172-001 THREADED FLANGE CLAMP
LAM 715-007172-002 FLANGE CLAMP
LAM 715-007413-001 FOUR PIN LIFTER
LAM 715-007434-001 INSERT GAP HOUSING
LAM 715-007435-001 QUAD SEAL RING
LAM 715-007469-001 ELECRODE, LOWER  (4-PIN)
LAM 715-007469-002 ANODE 3 MILS HARD
ANODIZED
LAM 715-007469-101 ELECTRODE, LOWER  (4-PIN)
LAM 715-007469-102 LOWER ELECTRODE
LAM 715-007999-002 ELECTRODE, LOWER  (4-PIN)
LAM 715-008079-001 ELECTRODE AL. 5 MIL
ANODIZE
LAM 715-008331-001 FILTER
LAM 715-008369-001 LIFTER, WAFER 4-PIN
(0.082)
LAM 715-008721-001 ELECTRODE, ALUM.
LAM 715-008721-001-R ELECTRODE, ALUM,
RADIUS EDGE
LAM 715-008763-001 BAFFLE, UPPER
LAM 715-009161-001 LIFTER, 4 PIN
LAM 715-009306-004 RING, FOCUS OUTER,
ALUM.
LAM 715-009306-005 FOCUS RING 5″
LAM 715-009306-006 RING, FOCUS ANODIZED 
LAM 715-009306-006 Ring, Focus,
Aluminum, 6″, 490
LAM 715-009306-006 Ring, Focus, Ceramic,
6″, 490
LAM 715-009345-001 LOWER SEAL PLATE
LAM 715-009360-006 FOCUS RING
715-00936-006
LAM 715-009394-001 ELECTRODE, UPPER
LAM 715-009583-001 ENTRANCE AND EXIT
LIFTER
LAM 715-009657-001 RING, EDGE, ANODIZED
LAM 715-009777-001 CAP, ELECTRODE
LAM 715-009777-002 CAP, ELECTRODE
LAM 715-009778-001 CAP, ELECTRODE
LAM 715-009778-002 CAP, ELECTRODE
LAM 715-009779-001 ELECTRODE, LOWER  (4-PIN)
LAM 715-009779-002 ELECTRODE, LOWER  (4-PIN)
LAM 715-009827-001 RING, FOCUS INNER,
ALUM.
LAM 715-009828-001 RING, EDGE 5″
LAM 715-011116-002 SLEEVE, NUT, ADJUST
LAM 715-011148-002 ASSY, ARM, TENSIONER,
CHAIN
LAM 715-011148-002 Arm, Tensioner, Chain
LAM 715-011148-002 Arm, Tensioner,
Chain, Pin
LAM 715-011148-002(A) ARM, TENSIONER, CHAIN
LAM 715-011148-002(B) ARM, TENSIONER,
CHAIN, PIN
LAM 715-011502-001 RING, UPPER COOLING
LAM 715-011531-002 ELECTRODE ALUM.
ANODIZED
LAM 715-011531-008 ELECTRODE ALUM.
ANODIZED
LAM 715-011531-009 ELECTRODE ALUM.
ANODIZED
LAM 715-011531-011 ELECTRODE, UPPER
LAM 715-011531-012 ELECTRODE, UPPER
LAM 715-011531-014 ELECTRODE ALUM.
ANODIZED
LAM 715-011531-015 ELECTRODE ALUM.
ANODIZED
LAM 715-011531-102 ELECTRODE ALUM.
ANODIZED
LAM 715-011532-001 SEAL PLATE
LAM 715-011535-001 RING ELECTRODE CLAMP
LAM 715-011559-262 CLAMP
LAM 715-011563-161 CLAMP, WAFER, DOMED,
CERAMIC, 6″, 1-FLAT, 4500
LAM 715-011565-001 BOLT, CLAMP
LAM 715-011565-002 BOLT, CLAMP RETAINING
LAM 715-011622-001 LIFTER WAFER 4 – PIN
LAM 715-011622-101 LIFTER, WAFER, 4 PIN,
FLEXIBLE
LAM 715-011629-006 CAP, ELECTRODE, FLAT
LAM 715-011629-008 ELECTRODE, LOWER
LAM 715-011640-001 RING, FOCUS, LOWER
LAM 715-011640-004 RING, FOCUS ANODIZED
4″
LAM 715-011640-005 FOCUS RING, ANODIZED
LAM 715-011640-006 RING, FOCUS
LAM 715-011640-008 FOCUS RING, ANODIZED
LAM 715-011664-006 CAP,LOWER ELECTRODE
6″
LAM 715-011665-006 LOWER, ELECTRODE, CAP
W/VENT GROOVE
LAM 715-011673-006 CAP, LOWER ELECTRODE
6″
LAM 715-011673-105 CAP, LOWER ELECTRODE
LAM 715-011673-106 CAP, LOWER ELECTRODE
6″
LAM 715-011746-141 Plate Wafer Clamp
4″
LAM 715-011746-151 PLATE 5″ .020
DOME REDUCED HEAT
LAM 715-011746-156 PLATE, WAFER CLAMP
LAM 715-011746-161 PLATE, WAFER CLAMP
LAM 715-011749-005 EDGE RING, 5″
WAFER CLAMP
LAM 715-011749-006 EDGE RING, ANODIZED
LAM 715-011753-001 PLATE, BAFFLE, UPPER
6″
LAM 715-011754-001 BAFFLE
LAM 715-011912-083 BAFFLE, UPPER
LAM 715-011913-080 BAFFLE, LOWER
LAM 715-011913-083 BAFFLE, LOWER
LAM 715-011913-501 BAFFLE, LOWER
LAM 715-011925-001 BOLT, CAPPED, CLAMPED
RETAINING
LAM 715-011927-001 BOLT CAPPED ELECTRODE
RETAINING
LAM 715-011982-001 CAP, PLUNGER, HOUSING
LOWER
LAM 715-011985-006 CAP, LOWER ELECTRODE
6″ DOMED
LAM 715-011985-106 ELECTRODE, LOWER
LAM 715-011986-108 CAP, LOWER ELECTRODE
LAM 715-012615-001 BLOCK MOUNTING
INDEXER REAR
LAM 715-018991-006 ELECTRODE,ALUM.ANOD.
LAM 715-018991-206 ELECTRODE
LAM 715-018991-208 UPPER ELECTRODE
LAM 715-021970-008 HOLDER WAFER 8″
LAM 715-025106-001 BAFFLE PLATE 8″
LAM 715-028087-005 SHROUD 6″ HARD
ANODIZE
LAM 715-028087-101 SHROUD
LAM 715-028305-001 CLAMP RETAINER, 1
TURN
LAM 715-028408-100 ELECTRODE, UPPER
METAL
LAM 715-028486-002 PLATE, UPPER SEAL
6″ ELECT
LAM 715-028559-001 SHOWER HEAD 6″
LAM 715-028606-161 Wafer Clamp 6″ 
LAM 715-028626-002 BAFFLE, UPPER
LAM 715-028627-003 BAFFLE, LOWER
LAM 715-030136-003 R, EDGE, ESC,
6″, FLAT, 4420
LAM 715-030320-001 BSR Injection Ring
LAM 715-031752-205 CAP, LWR ELECT.
5″ DOME .020
LAM 715-031752-206 ELECTRODE, LOWER CAP
LAM 715-031752-208 CAP LOWER ELECTRODE
LAM 715-033098-001 GAS RING
LAM 715-07469-002 Electrode, Al.
LAM 715-08721-001 Cathode, 6061 A1,
Black, Anod
LAM 715-09306-005 Ring, Focus, Lower,
4″, Lam 490
LAM 715-09306-006 Ring, Focus, 6″,
Ceramic, 490
LAM 715-09306-006 Ring, Focus, 6″,
Al
LAM 715-11563-161 Clamp, Wafer, Domed,
Ceramic, 6″, 1-Flat, 4500
LAM 715-11565-1 Bolt, Clamp,
Retaining
LAM 715-11565-2-C Screw, Vent, #10-32,
Pasivated, SS
LAM 715-11640-001 Ring, Focus, Lower
LAM 715-11640-X Ring, Focus, Lower,
Ceramic
LAM 715-11746-161 C Clamp, Wafer, Al,
6″ (original)
LAM 715-11746-161 C Clamp, Wafer,
Ceramic, 6″
LAM 715-11925-001 Bolt, Retaining,
Clamp
LAM 715-11927-001 Bolt, Electrode,
Clamp, Ring, 4500
LAM 715-11986-108 Lower Electrode
LAM 715-140124-001-1 BAFFLE, UPPER TPL SET
6″
LAM 715-140125-001-1 BAFFLE, LOWER TPL SET
6″
LAM 715-140126-001-1 BAFFLE, MIDDLE TPL
SET 6″
LAM 715-140286-001 RING, FOCUS, 6″,
MODEL 4420
LAM 715-2301851-001 GROUND GRID
LAM 715-250516-001 CLAMP, UPPER, ASIQ
LAM 715-250586-001 BAFFLE PLT., BOTTOM
(601179)
LAM 715-250588-001 CLAMP, LOWER, ASIQ
LAM 715-250596-001 CLAMPING RING, UPPER
LAM 715-250599-001 PLATE, DIFFUSER
LAM 715-250717-001 BAFFLE PLATE, TOP
(601224)
LAM 715-250717-002 BAFFLE, LOWER
LAM 715-250899-001 GROUND GRID
LAM 715-28608-161 Non-Contact Wafer
Clamp
LAM 715-31752-206 Electrode Lower 6″ 
LAM 715-31752-208 Electrode Lower 8″ 
LAM 715-330000-090 RING, GAS DISPERSION
LAM 715-330106-003 CHAMBER, UPPER
LAM 715-330135-001 BTM, GAS ESC RIGHT
REV B
LAM 715-330152-003 HOUSING, SPRING,
ADJUSTABLE, 9600
LAM 715-330304-002-RW FROG LEG REWORK
LAM 715-330312-001 RING, RETAINING,
CLIP, 9600
LAM 715-330394-002 FROG LEG
LAM 715-330825-006 CHAMBER LINER
LAM 715-330825-006-RW CHAMBER LINER REWORK
LAM 715-330825-007 CHAMBER LINER
LAM 715-330889-002 RING,GROUND,CHAMBER
LAM 715-330928-002 2 MIL HARD ANODIZE
WITH SEALANT
LAM 715-330981-001 2 MIL HARD ANODIZE
WITH SEALANT
LAM 715-330982-001 CHAMBER LINER
LAM 715-330984-001 BSR Injection Ring
LAM 715-330987-001 BSR Injection Ring
LAM 715-331211-001 RECOATING OF ALUMINUM
OXIDE ON CHAMBER LINER
LAM 715-495014-001-RF REFURBISH, SLIT
DOORLINER
LAM 715-704598-008 SCREW, 8-32X0.5AL
LAM 715-S015808-001 SHOWER HEAD
LAM 716-001427-003 CERAMIC DISK
LAM 716-001700-001 WINDOW, PLASMA
CHAMBER
LAM 716-005124-001 Window, Quartz, Rear
(490/590)
LAM 716-006446-001 DIFFUSER CATHODE,
5.5″ 716-06446-001
LAM 716-006446-001-S 2465150 CATHODE
DIFFUSER SUBSTITUTE
LAM 716-006711-001 CATHODE GRAPHITE
DFP-2
LAM 716-006711-002 CATHODE, GRAPHITE
SFG-2
LAM 716-006721-001 CERAMIC INSULATOR
RING
LAM 716-006721-001-D 3-HOLE RING
LAM 716-006753-001 INSULATOR RING
LAM 716-008608-002 WINDOW WITH STEP
LAM 716-008854-001 DIFFUSER DISK
LAM 716-008854-001-S 2465140 GAS DIF 2-PC
BAFFLE SUBSTITUTE
LAM 716-011009-001 QUARTZ WINDOW
LAM 716-011036-001 RING, FILLER ORIFICE
ALUMINA
LAM 716-011036-001-D ORIFICE RING
LAM 716-011036-001-E ORIFICE RING
LAM 716-011057-002 RING, UPPER FILLER
LAM 716-011427-001 DISK, QUARTZ
LAM 716-011493-001 QUARTZ SPACER
LAM 716-011505-001 DISK DIFFUSER
LAM 716-011533-001 WINDOW QUARTZ
LAM  716-011536-001 RING, UPPER INSULATOR
LAM  716-011540-001 RING FACE UPPER
ELECTRODE
LAM 716-011543-001 PLATE, WAFER CLAMP
ATTACHMENT
LAM 716-011563-152 PLATE, WAFER CLAMP
LAM 716-011563-161 CLAMP RING
LAM 716-011563-162 PLATE, WAFER CLAMP
LAM 716-011563-168 PLATE, WAFER CLAMP
6″
LAM 716-011563-261 PLATE, WAFER CLAMP
LAM 716-011563-262 PLATE, WAFER CLAMP
LAM 716-011563-264 PLATE, WAFER CLAMP
LAM 716-011563-268 PLATE, WAFER CLAMP
LAM 716-011564-001 ELECTRODE, UPPER
DFP-2
LAM 716-011564-003 ELECTRODE, UPPER
SFG-2
LAM 716-011570-001 ORIFICE FILLER W/C
CERAMIC
LAM 716-011571-001 CERAMIC WASHER
LAM 716-011572-001 CERAMIC RETAINER
CLAMP, 1/4 TURN
LAM 716-011573-001 CERAMIC PLUNGER,
SHORT
LAM 716-011573-004 CERAMIC PLUNGER LONG
LAM 716-011573-005 PLUNGER 1/4 TURN
LAM 716-011580-063 PLATE W/PINS REV 1
LAM  716-011603-001 PLATE, SEAL
LAM 716-011624-001 RING, INSULATOR
LAM 716-011638-006 RING FOCUS THIN EDGE
LAM 716-011638-008 RING, FOCUS, THIN
WASHER
LAM 716-011651-005 RING EDGE 5″
LAM 716-011651-006 EDGE RING, WAFER
CLAMP
LAM 716-011651-008 RING EDGE WAFER CLAMP
8″
LAM 716-011652-006 9.5″ CLAMP
LAM 716-011759-015 RING EDGE FOCUS
W/PINS 5″
LAM 716-011759-016 RING, MOUNTING,
CERAMIC
LAM 716-011764-181 PLATE, W/C 8″
.035 DOME
LAM 716-011764-281 WAFER CLAMP, PLATE
ATTACHMENT
LAM 716-011767-181 8″ CLAMP RING
LAM 716-011775-168 WAFER CLAMP
LAM 716-011830-005 FOCUS RING ALUMINA
5″
LAM 716-011830-006 WAFER CLAMP, FOCUS
RING 6″
LAM 716-011830-008 WAFER CLAMP, FOCUS
RING 8″
LAM 716-011922-001 WAFER CLAMP, RING
LAM 716-011923-001 PLATE, WAFER CLAMP
ATTACHMENT
LAM 716-011963-003 PLATE, WAFER CLAMP
ATTACHMENT
LAM 716-011981-001 PLUNGER, WAFER,
CLAMP, LOWER, MODEL 4528
LAM 716-013423-001 LINER SAPPHIRE
LAM 716-018527-426 PLATE, WAFER CLAMP
LAM 716-018993-001 RING EDGE
LAM 716-020904-016 RING, EDGE FOCUS
LOWER WAFER CLAMP
LAM 716-020904-018 LOWER, FOCUS RING
EDGE
LAM 716-020905-001 RING, FILLER, LOWER
WAFER CLAMP
LAM 716-020931-030 PLUNGER, 1 TURN
LAM 716-021323-001 FUNNEL QUARTZ MODULE
LAM 716-021323-002 FUNNEL QUARTZ MODULE
LAM 716-021323-003 FUNNEL QUARTZ MODULE
LAM 716-021717-002 BELL JAR SLEEVE
LAM 716-021773-002 GASKET ISO CHAMBER
LAM 716-021856-001 CHEMRAZ, GASKET
LAM 716-021857-001 O-RING
LAM 716-021867-001 O-RING
LAM 716-021886-002 O-RING, BELL JAR PFE
LAM 716-028028-004 ELECTRODE INSULATOR,
LOW PRESSURE
LAM 716-028123-002 RING, FILTER CERAMIC
LAM 716-028249-061 FOCUS RING, ESC-1
LAM 716-028249-064 FOCUS RING
LAM 716-028251-161 CLAMP, WAFER 60
DEGREE 6″
LAM 716-028251-168 CLAMP, WAFER 60
DEGREE 6″
LAM 716-028281-001 CONFINEMENT RING
LAM 716-028414-015 RING, FOCUS, CERAMIC
LAM 716-028414-016 RING, FOCUS
LAM 716-028414-018 RING FOCUS 8″
LAM 716-028447-002 CERAMIC DISK
LAM 716-028454-012 QUARTZ DISK, REV B
LAM 716-028547-001 PLATE, WAFER CLAMP
LAM 716-028668-261 LOWER WAFER CLAMP
LAM 716-028668-262 PLATE, WAFER CLAMP
DOMED SHADOW
LAM 716-028668-268 SHADOW CLAMP, JEIDA,
TOP ASSY
LAM 716-028668-281 PLATE, LOWER WAFER
CLAMP 8″ SHADOW
LAM 716-028668-288 PLATE TOP WAFER
LAM 716-028678-261 CLAMP RING
LAM 716-028678-261 Wafers, Flats (1), Clamp,
Shadow, 6″ 
LAM 716-028688-261 Ring, Equipment
LAM 716-028721-261 PLATE WAFER CLAMP
DOMED
LAM 716-028721-262 BOTTOM WAFER CLAMP
LAM 716-028721-268 SHADOW CLAMP, JEIDA,
BOTTOM ASSY
LAM 716-028721-281 BOTTOM WAFER CLAMP
LAM 716-028721-288 BOTTOM WAFER CLAMP
8″ MAJOR FLAT
LAM 716-028722-161 PLATE, BOTTOM WAFER
CLAMP
LAM 716-029435-006 RING, ELECTRODE,
CERAMIC
LAM 716-030135-001 CERAMIC RING
LAM 716-030136-001 R, EDGE 6″ ESC,
MJR FL
LAM 716-030167-281 CLAMP, RING, BOTTOM,
8″, 9600
LAM 716-030362-281 CLAMP RING
LAM 716-031052-001 QUARTZ WINDOW HEATED
LAM 716-031453-001 RING, FILLER, LOWER
CLAMP
LAM 716-031453-002 FILLER RING
LAM 716-06711-001 Cathode, Quick
Change, Graphite, 590
LAM 716-06721-001 Ring, Insulator,
Ceramic, Large (490, 590)
LAM 716-080281-001 QUARTZ RING (REV E1)
LAM 716-080297-001 RING, FOCUS, 150MM
ESC 384T
LAM 716-080399-001 SILICON PIN (REV E1)
LAM 716-11533-001 Window, Quartz
LAM 716-11563-161 Ring, Electrode,
Lower
LAM 716-11563-162 Clamp, Domed Ceramic,
6″, 2-Flat (4600)
LAM 716-11570-001 Filler, Orifice, w/c
Ceramic
LAM 716-11571-001 Washer, Special,
Ceramic
LAM 716-11624-001 Ring, Electrode,
Lower
LAM 716-11638-006 Ring, Focus, Ceramic
(4600)
LAM 716-11638-008 Ring, Focus, Thin
LAM 716-11759-016 Ring, Mounting,
Ceramic
LAM 716-11922-001 Ring, Electrode,
Ceramic
LAM 716-11923-001 Ring, Plunger,
Ceramic
LAM 716-140068-001 CERAMIC FOCUS RING
LAM 716-140118-001 RING, FOCUS, ESC
LAM 716-140139-001 FILLER RING
LAM 716-140139-008 HOT EDGE RING,
SILICON
LAM 716-140139-008(A) HOT EDGE RING,
SILICON CARBIDE
LAM 716-140139-213 RING, HOT EDGE, HI
WALL ESC 8″
LAM 716-140141-261 SILICON RING
LAM 716-140163-001 HOT EDGE RING
LAM 716-140163-261 RING, HOT EDGE, 15
DEG, ESC, STD, 6″
LAM 716-140163-261B RING, HOT EDGE 150
ESC STD 6
LAM 716-140236-001 QUARTZ CLAMP
LAM 716-140236-061 QUARTZ CLAMP
LAM 716-140236-062 QUARTZ CLAMP
LAM 716-140286-001 4420 6″
FOC  R
LAM  716-140427-001 RING, HOT EDGE 150
NCH ESC STD 6
LAM  716-140427-001 SAME AS
716-140427-001 IN CERAMIC
LAM  716-140427-001 SAME AS
716-140427-001 IN QUARTZ
LAM 716-140427-001(A) SAME AS
716-140427-001 IN CERAMIC
LAM 716-140427-001(B) SAME AS
716-140427-001 IN QUARTZ
LAM 716-140432-001 RING UPPER KEYED
LAM 716-140432-061 QUARTZ RETAINING RING
LAM 716-140432-062 QUARTZ RETAINING RING
LAM 716-160255-002 BELL JAR SLEEVE, ETCH
8.46
LAM 716-230121-001 RF SHAPED WINDOW
LAM 716-230121-211 RF SHAPED WINDOW
LAM 716-249040-001 RING, QUARTZ, LIP,
SPLIT
LAM 716-249040-002 RING, QUARTZ,
UNDERCUT, LIP, SPLIT
LAM 716-249391-001 FOCUS RING, USC 200MM
LAM 716-250080-001 INSULATOR, UPPER,
150MM
LAM 716-250404-001 FOCUS RING QUARTZ
LAM 716-250514-001 INSULATOR RING CLAMP
CERAMIC
LAM 716-250515-002 INSULATOR RING LOWER
CERAMIC
LAM 716-250972-001 SILICON PIN (REV A)
LAM 716-30167-281 Clamp, Ring, Bottom,
8″, 9600
LAM 716-330004-181 RING, FOCUS, HI,
COND. ESC 8″
LAM 716-330045-002 EDGE RING 8″ –
ALLIANCE 9600 PTX
LAM 716-330045-004 FOCUS RING 8″
LAM 716-330045-261 R, EDGE 6″,
SEMI, ESC
LAM 716-330061-006 PLATE, SHOWERHEAD
LAM 716-330061-008 8″ PL. SH HD
LAM 716-330068-001 GAS RING COVER
LAM 716-330121-001 WINDOW, RF, SHAPED
CERAMIC
LAM 716-330122-002 PLATE TOP CERAMIC
LAM 716-330135-001 GAS RING
LAM 716-330162-002 RING FILTER
LAM 716-330167-152 RING, CLAMP
LAM 716-330167-161 CLAMP RING
LAM 716-330167-168 RING, CLAMP
LAM 716-330167-261 PLATE WAFER CLAMP
LAM 716-330167-268 PLATE WAFER CLAMP
6″
LAM 716-330167-281 RING CLAMP
LAM 716-330190-081 RING, FOCUS, 8″
ESC
LAM 716-330355-001 QUARTZ WINDOW
LAM 716-330355-002 WINDOW, ENDPOINT,
DUAL, QUARTZ
LAM 716-330504-061 RING FOCUS 6″
GDRING JEIDA ESC
LAM 716-330504-064 FOCUS RING, 150MM,
REV. F
LAM 716-330504-064-B FOCUS RING
LAM 716-330504-081 FOCUS RING
LAM 716-330504-081-F FOCUS RING, FLUTED
LAM 716-330504-082 RING,FOCUS 8″,
CERAMIC
LAM 716-330564-061 FOCUS RING
LAM 716-330890-001 CONTAINMENT RING BASR
LAM 716-330892-001 CERAMIC SHOWER HEAD
LAM 716-330892-007 GDP – ALLIANCE 9600
PTX
LAM 716-331088-001 EDGE RING QUARTZ
LAM 716-443083-004 RING, CONFINEMENT,
TOP
LAM 716-443084-003 RING, CONFINEMENT,
BOTTOM
LAM 716-443086-301 RING, H-EDGE, SI SGL
X TALL, H-WALL, 8″
LAM 716-443090-002 UPPER QUARTZ RING
LAM 716-460417-001 INNER CERAMIC LINER
LAM 716-460785-002 PLATE, GAS DIST 10
HOLE
LAM 716-460875-002 INSULATOR RING
(VESPEL)
LAM 716-460916-001 RING CHAMBER
LAM 716-460916-002 RING, COMPOSITE
LAM 716-461085-001 SCRAPER, SIC
LAM 716-540198-001 WDO, SILICA, FUSED
LAM 718-443144-006 SCREW, PEEK
LAM  720-009384-003 SCREW, PAN HEAD
LAM  720-009384-004 SCREW, PAN HEAD
LAM  720-009384-006 SCREW, PAN HEAD
LAM  720-009384-008 SCREW, PAN HEAD
LAM  720-009384-010 SCREW, PAN HEAD
LAM  720-009384-012 SCREW, PAN HEAD
LAM  720-009384-014 SCREW, PAN HEAD
LAM  720-009384-016 SCREW, PAN HEAD
LAM  720-009384-020 SCREW, PAN HEAD
LAM  720-009384-022 SCREW, PAN HEAD
LAM  720-009384-024 SCREW, PAN HEAD
LAM  720-009384-026 SCREW, PAN HEAD
LAM  720-009384-028 SCREW, PAN HEAD
LAM  720-009384-030 SCREW, PAN HEAD
LAM  720-009384-032 SCREW, PAN HEAD
LAM  720-009410-004 SCREW, SOCKET HEAD
CAP
LAM  720-009410-006 SCREW, SOCKET HEAD
CAP
LAM  720-009410-008 SCREW, SOCKET HEAD
CAP
LAM  720-009410-010 SCREW, SOCKET HEAD
CAP
LAM  720-009410-012 SCREW, SOCKET HEAD
CAP
LAM  720-009410-014 SCREW, SOCKET HEAD
CAP
LAM  720-009410-016 SCREW, SOCKET HEAD
CAP
LAM  720-009410-020 SCREW, SOCKET HEAD
CAP
LAM  720-009410-022 SCREW, SOCKET HEAD
CAP
LAM  720-009410-024 SCREW, SOCKET HEAD
CAP
LAM  720-009410-026 SCREW, SOCKET HEAD
CAP
LAM  720-009410-028 SCREW, SOCKET HEAD
CAP
LAM  720-009410-030 SCREW, SOCKET HEAD
CAP
LAM  720-009410-032 SCREW, SOCKET HEAD
CAP
LAM  720-009530-004 SCREW, FLAT HEAD
LAM  720-009530-006 SCREW, FLAT HEAD
LAM 720-009530-008 SCREW, KEL-F, 1/4 –
20 X 0.5″, LG., FHSL
LAM  720-009530-010 SCREW, FLAT HEAD
LAM  720-009530-012 SCREW, FLAT HEAD
LAM  720-009530-014 SCREW, FLAT HEAD
LAM 720-009530-016 SCREW, FHSL, KEL-F,
1/4-20
LAM  720-009530-018 SCREW, FLAT HEAD
LAM  720-009530-020 SCREW, FLAT HEAD
LAM  720-009530-022 SCREW, FLAT HEAD
LAM  720-009530-024 SCREW, FLAT HEAD
LAM  720-009530-028 SCREW, FLAT HEAD
LAM 720-009531-004 SCREW, #6-32 X 1/4,
KEL-F
LAM  720-009531-006 SCREW, FLAT HEAD
LAM  720-009531-008 SCREW, FLAT HEAD
LAM 720-009531-010 FLAT, HD SCREW 6-32
KEL-F
LAM  720-009531-012 SCREW, FLAT HEAD
LAM  720-009531-014 SCREW, FLAT HEAD
LAM 720-009531-016 SCREW, KEL-F, #6-32 X
1″ LG. FHSL
LAM  720-009531-018 SCREW, FLAT HEAD
LAM  720-009531-020 SCREW, FLAT HEAD
LAM  720-009531-022 SCREW, FLAT HEAD
LAM  720-009531-024 SCREW, FLAT HEAD
LAM  720-009531-028 SCREW, FLAT HEAD
LAM  720-090943-004 SCREW, FLATHEAD
LAM  720-090943-006 SCREW, FLATHEAD
LAM  720-090943-008 SCREW, FLATHEAD
LAM 720-090943-010 SCREW, FLATHEAD 10-32
KEL-F
LAM  720-090943-012 SCREW, FLATHEAD
LAM  720-090943-014 SCREW, FLATHEAD
LAM  720-090943-016 SCREW, FLATHEAD
LAM  720-090943-018 SCREW, FLATHEAD
LAM  720-090943-020 SCREW, FLATHEAD
LAM  720-090943-022 SCREW, FLATHEAD
LAM  720-090943-024 SCREW, FLATHEAD
LAM  720-090943-028 SCREW, FLATHEAD
LAM 720-092759-016 SCREW, W/O SHOULDER,
RING, CONFINEMENT, VESPEL
LAM 720-092759-016 Screw, w/ Shoulder,
Vespel, 4528
LAM 720-092759-016(A) SCREW, W/ SHOULDER,
VESPEL, 4528
LAM 720-093867-005 SCREW, SET, 9600
LAM 720-094109-012 SCREW, KEL-F, #10-32
X 3/4″, LG., SHCS
LAM 720-09530-008 Screw, Kel-F, 1/4 –
20 x 0.5″, Lg., FHSL
LAM 720-09531-004 Screw, #6-32 x 1/4,
Kel-F
LAM 720-09531-016 Screw, Kel-F, #6-32 x
1″ Lg. FHSL
LAM 720-095483-024 SCREW, NYLON
LAM 720-096222-008 SCREW, SOCKET HEAD
6-32 X 1/2
LAM 720-096234-006 SCREW, FLAT HEAD
LAM 720-443096-014 SCREW, NYLON
LAM 720-443208-010 SCREW, BAFFLE, PEEK
LAM 722-000966-002 NUT, HEX, JAM,
1/4-20, S/S
LAM 722-009637-001 NUT, HEX, KEL-F,
#10-32 THRU
LAM 722-00966-002 Nut, Hex, Jam,
1/4-20, S/S
LAM 723-007749-001 SPACER, SHAFT,
PRECISION, 1/4″OD
LAM 724-5031727-001 WAFER CLAMP
LAM 726-001046-001 RING, RETAINING
LAM 727-007574-001 Grommet, 1/4
LAM 734-000014-001 O-RING
LAM 734-000228-001 O-RING
LAM 734-000228-003 O-RING
LAM 734-000229-001 O-RING,
11.0ID×1/8C/S, VTN
LAM 734-000229-003 O-RING
LAM 734-000230-001 8.125 ID X .125 VITON
SEAL PLATE
LAM 734-000337-001 O-RING
LAM 734-000420-001 O-RING
LAM 734-000663-001 O-RING,
1.75ID×.125C/S, VTN
LAM 734-000690-001 O-RING
LAM 734-000799-001 O-RING,
3-11/4IDW1/8C/S
LAM 734-000980-001 O-RING
LAM 734-000981-001 O-RING
LAM 734-000982-001 O-RING
LAM 734-001019-001 O-RING
LAM 734-001047-001 O-RING
LAM 734-001048-001 O-RING
LAM 734-001081-001 O-RING
LAM 734-001081-003 O-RING
LAM 734-001082-001 O-RING
LAM 734-001169-001 O-RING
LAM 734-001169-003 O-RING
LAM 734-001422-001 O-RING
LAM 734-001682-001 1.424 ID X .103
POLYURETHANE TRACK MOTOR, ENTRANCE
LAM 734-001683-001 O-RING
LAM 734-001684-001 O-RING
LAM 734-001685-001 O-RING
LAM 734-001710-001 O-RING
LAM 734-001710-003 O-RING
LAM 734-001849-001 O-RING, 8.75 ID X 1/8
C/S, VTN
LAM 734-002013-001 O-RING
LAM 734-002013-003 O-RING
LAM 734-002014-001 O-RING
LAM 734-002014-003 O-RING
LAM 734-002064-001 O-RING
LAM 734-002215-001 O-RING
LAM 734-002290-001 O-RING
LAM 734-002415-001 O-RING
LAM 734-003091-001 O-RING
LAM 734-003092-001 O-RING
LAM 734-003093-001 O-RING
LAM 734-003324-001 O-RING
LAM 734-004046-001 0.799 ID X .103
POLYURETHANE ENTRANCE TRACK IDLER
LAM 734-004049-001 O-RING
LAM 734-004051-001 O-RING
LAM 734-004077-001 O-RING
LAM 734-004078-001 O-RING
LAM 734-004132-001 O-RING
LAM 734-004194-001 O-RING, .50ID X 1/16
C/S, VTN
LAM 734-005186-001 O-RING
LAM 734-005271-001 O-RING,
7/16IDW.103C/S, VTN
LAM 734-005632-001 O-RING
LAM 734-005633-001 O-RING
LAM 734-005634-001 O-RING
LAM 734-005635-001 O-RING
LAM 734-005636-001 O-RING
LAM 734-005637-001 O-RING
LAM 734-006000-001 O-RING,
3/4ID×3/32C/S, VTN
LAM 734-006000-200 O-RING
LAM 734-006041-001 O-RING
LAM 734-006042-001 O-RING
LAM 734-006043-001 O-RING
LAM 734-006304-001 O-RING,
.25ID×.063C/S, VTN
LAM 734-006304-200 O-RING
LAM 734-006337-001 O-RING
LAM 734-006338-001 O-RING
LAM 734-006760-001 O-RING
LAM 734-006761-001 O-RING
LAM 734-006762-001 O-RING
LAM 734-006763-001 O-RING
LAM 734-006767-001 O-RING
LAM 734-006776-001 O-RING 5 3/4ID X 3/32
C/S
LAM 734-006779-001 O-RING
LAM 734-007260-001 O-RING,
.312ID×.062C/S, VTN
LAM 734-007292-001 O-RING,
9.25ID×.125C/S, VTN
LAM 734-007292-002 O-RING
LAM 734-007293-001 O-RING
LAM 734-007314-001 O-RING,
.859ID×.139C/S, VTN
LAM 734-007328-001 O-RING,
11.5IDW3/16C/S, VTN
LAM 734-007329-001 O-RING,
4.50ID×3/32C/S, VTN
LAM 734-007332-001 O-RING
LAM 734-007333-001 O-RING,
1.813ID×.103C/S, VTN
LAM 734-007334-001 O-RING,
3.00ID×3/32C/S, VTN
LAM 734-007335-001 O-RING,
11/16IDW1/16C/S, VTN
LAM 734-007355-001 O-RING
LAM 734-007356-001 O-RING,
8.50ID×.125C/S, VTN
LAM 734-007357-001 O-RING, 10.00 ID X
1/8 C/S, VTN
LAM 734-007358-001 O-RING, 13.00 ID X
1/8 C/S, VTN
LAM 734-007359-001 O-RING,
14.0ID×.125C/S, VTN
LAM 734-007369-001 QUAD RING,
5/8ID×1/16C/S, VTN
LAM 734-007412-001 O-RING  18.00 ID X 1/8 C/S (2-
LAM 734-007460-001 O-RING,
7.00ID×3/32C/S, VTN
LAM 734-007461-001 O-RING Viton
LAM 734-007524-051 O-RING
LAM 734-007524-121 O-RING
LAM 734-007524-122 O-RING
LAM 734-007524-208 O-RING
LAM 734-007524-209 O-RING
LAM 734-007524-275 O-RING
LAM 734-007524-284 O-RING
LAM 734-007524-286 O-RING
LAM 734-007524-287 O-RING
LAM 734-007524-288 O-RING
LAM 734-007524-289 O-RING
LAM 734-007524-293 O-RING
LAM 734-007524-294 O-RING
LAM 734-007524-295 O-RING
LAM 734-007524-296 O-RING
LAM 734-007524-297 O-RING
LAM 734-007742-001 O-RING, 0.426 ID X
.071 C/S, FSI
LAM 734-007743-001 O-RING,
2.25ID×.063C/S, VTN
LAM 734-007744-001 O-RING  17″ ID X 1/8 C/S
LAM 734-007762-001 O-RING,QUAD SEAL
LAM 734-007783-001 QUAD SEAL, Q4454,
12.5IDW.25
LAM 734-008123-001 O-RING,
12.0ID×.125C/S, VTN
LAM 734-008179-001 QUAD RING,
.938ID×.094C/S, VTN
LAM 734-008546-001 O-RING,
7.5IDW3/32C/S, VTN
LAM 734-008722-001 O-RING
LAM 734-008771-001 O-Ring,
.468ID×.078c/s
LAM 734-008772-001 O-RING
LAM 734-008793-001 O-RING, 2.675 ID X
3/33 C/S, VTN
LAM 734-008819-001 O-RING
LAM 734-008822-001 O-RING  3.875 ID X .125 C/S VI
LAM 734-008822-002 O-RING
LAM 734-008834-001 O-RING  13.491 ID X .139 C/S, VTN
LAM 734-008835-001 O-RING  10.171 ID X .139 C/S
LAM 734-008856-001 O-RING
LAM 734-008861-001 O-RING
LAM 734-008862-001 O-RING, 2.625 ID×.139
C/S, VTN
LAM 734-008863-001 O-RING  6.487 ID X .139 C/S VI
LAM 734-008971-001 O-RING,5.75ID?0.125C/S
LAM 734-009013-001 O-RING,
.75ID×.063C/S, VTN
LAM 734-009020-001 O-RING
LAM 734-009065-001 O-RING,
.351IDW.07C/S, VTN
LAM 734-009065-003 O-RING
LAM 734-009119-001 O-RING
LAM 734-009207-001 O-RING
LAM 734-009250-001 O-RING,
5.0ODW3/32C/S, VTN
LAM 734-009250-200 O-RING
LAM 734-009297-001 O-RING
LAM 734-009323-001 O-RING
LAM 734-009574-001 O-RING
LAM 734-009767-001 O-RING,
1/4IDW1/16C/S, VTN
LAM 734-009868-001 O-RING
LAM 734-009869-001 O-RING  1 1/2 ID X 1/8 C/S, VTN
LAM 734-009908-001 O-RING
LAM 734-009909-001 O-RING
LAM 734-009910-001 O-RING
LAM 734-009914-001 O-RING
LAM 734-009992-001 O-RING, .987 ID X
.103 C/S, VTN
LAM 734-021063-025 O-RING
LAM 734-032041-001 O-RING
LAM 734-061280-001 O-RING
LAM 734-061280-006 O-RING
LAM 734-061280-008 O-RING
LAM 734-061280-009 O-RING
LAM 734-061280-010 O-RING, .239 ID X
.070 C/S, VTN
LAM 734-061280-011 O-RING
LAM 734-061280-012 O-RING
LAM 734-061280-014 O-RING
LAM 734-061280-015 O-RING
LAM 734-061280-019 O-RING
LAM 734-061280-022 O-RING
LAM 734-061280-109 O-RING  .299 ID X .103 C/S, VTN
LAM 734-061280-119 O-RING
LAM 734-061280-130 O-RING, 1.625 ID X
3/32 C/S, VTN
LAM 734-061280-168 O-RING
LAM 734-061280-175 O-RING
LAM 734-061280-206 O-RING
LAM 734-061280-210 O-RING
LAM 734-061280-220 O-RING
LAM 734-061280-237 O-RING
LAM 734-061280-248 O-RING
LAM 734-061280-264 O-RING
LAM 734-061280-266 O-RING, VITON, 7.984
ID, .139C/S
LAM 734-061280-267 O-RING
LAM 734-061280-272 O-RING
LAM 734-061280-274 O-RING
LAM 734-061280-276 O-RING
LAM 734-061280-277 O-RING
LAM 734-061280-278 O-RING
LAM 734-061280-279 O-RING
LAM 734-061280-281 O-RING
LAM 734-061280-376 O-RING
LAM 734-061280-378 O-RING
LAM 734-061280-386 O-RING VITON,
2-386-16.955X.210
LAM 734-090037-001 O-RING
LAM 734-090045-001 O-RING
LAM 734-090048-001 O-RING
LAM 734-090049-001 O-RING
LAM 734-090478-001 O-RING
LAM 734-090516-001 O-RING
LAM 734-090633-001 O-Ring, VITON 1 5/16
ID
LAM 734-090673-001 O-RING, 2 1/8ID X 1/8
C/S, VTN
LAM 734-090690-001 O-RING, 15.955ID X
.210 C/S, VTN
LAM 734-090704-001 O-RING, 3/8ID X 1/8
C/S, VTN
LAM 734-090743-001 O-RING, 3/16 IDW1/16
C/S
LAM 734-090745-001 O-RING, 9 IDW1/8 C/S,
BLK
LAM 734-090783-001 O-RING
LAM 734-090788-001 O-RING  1 7/16 ID X 1/8 C/S, VTN
LAM 734-090977-001 O-RING
LAM 734-091193-001 O-RING  11.50 ID X 1/8 C/S, VTN
LAM 734-091228-001 O-RING
LAM 734-091429-001 O-RING
LAM 734-091944-001 O-RING
LAM 734-091952-001 O-RING
LAM 734-091993-001 O-RING, 8 1/2 ID X
1/8 C/S, SILICON
LAM 734-091994-001 O-RING, 17 ID X 1/8
C/S, FSI
LAM 734-091995-001 O-RING
LAM 734-092038-001 O-RING, 10 1/2 ID X
1/8 C/S, FSI
LAM 734-092040-001 O-RING, 8 1/2 ID X
3/32 C/S, FSILCN
LAM 734-092041-001 O-RING, 11 1/2 ID X
3/16 C/S, FSI
LAM 734-092069-001 O-RING, 7-3/4 ID X
.125 C/S, VTN
LAM 734-092107-001 O-RING
LAM 734-092325-001 O-RING, 8.50 ID X 1/8
C/S, KALRZ
LAM 734-092358-001 O-RING
LAM 734-092559-008 O-RING
LAM 734-092559-010 O-RING
LAM 734-092559-013 O-RING, 3/8 ID X 3/32
C/S, VTN
LAM 734-092560-130 O-RING
LAM 734-092560-154 O-RING
LAM 734-092560-164 O-RING
LAM 734-092561-204 O-RING
LAM 734-092561-212 O-RING
LAM 734-092561-231 O-RING
LAM 734-092561-241 O-RING, 3.859 ID×.139
C/S, FSI
LAM 734-092561-260 O-RING, 6.484 ID×.139
C/S, FSI
LAM 734-092561-267 O-RING
LAM 734-092561-270 O-RING, 8.984 ID×.139
C/S, FSI
LAM 734-092561-278 O-RING, FSI
LAM 734-092561-283 O-RING
LAM 734-092825-200 O-RING
LAM 734-093324-001 O-RING, 11/64 ID X
1/8 C/S, VTN
LAM 734-093789-001 O-Ring  FIG 8, Fluorosilicon
LAM 734-093790-001 O-RING
LAM 734-094637-001 O-RING, 5.25 IDW.103
C/S, FS
LAM 734-095085-017 O-RING
LAM 734-095085-120 O-RING
LAM 734-095085-204 O-RING
LAM 734-095085-211 O-RING
LAM 734-097554-001 O-RING
LAM 734-250647-012 O-RING
LAM 734-250647-266 O-RING
LAM 739-000983-001 SEAL, TEFLON, SMALL
LAM 739-000984-001 SEAL, TEFLON, LARGE
LAM 739-000985-001 SEAL, TEFLON, MEDIUM
LAM 739-007783-001 SEAL, QUAD GAP
LAM 739-00983-001 Seal, Teflon, Small
LAM 739-00984-001 Seal, Teflon, Large
LAM 739-00985-001 Seal, Teflon, Medium
LAM 739-07783-001 Seal, Quad, Q4454,
Viton
LAM 746-007608-001 WASHER, THRUST,
.25″ X .060″
LAM 746-007652-001 BEARING, DBL, ROW,
ANG. CONT, 15MM
LAM 746-090156-001 BEARING, FLANGED,
SHIELDED DB2
LAM 749-001623-001 FLEXIBLE COUPLER
LAM 750-001127-001 LINK, OFFSET, CHAIN,
#25
LAM 750-002176-001 LINK, MASTER, CHAIN,
#25
LAM 750-007781-001 CHAIN, ROLLER #25
LAM 750-007782-001 CHAIN, ROLLER #35,
15.75″ LG.
LAM 750-01127-001 Link, Offset, Chain,
#25
LAM 750-02176-001 Link, Master, Chain,
#25
LAM 750-07781-001 Chain, Roller #25
LAM 750-07782-001 Chain, Roller #35,
15.75″ Lg.
LAM 750-090192-001 LINK, MASTER, SST,
#35
LAM 751-009531-010 O-RING
LAM 752-000224-008 PIN, ROLL, 3/32 X 1/2
LG.
LAM 754-007751-001 SPRING, TENSIONER, SS
LAM 754-009002-015 Spring, Compression,
SST
LAM 754-07751-001 Spring, Tensioner, SS
LAM 754-09002-015 Spring, Plunger,
Assy, 30 lbs.
LAM 754-090359-015 SPRING, SST
LAM 754-090359-015 Spring, Compression,
SS
LAM 754-090457-014 SPRING, COMPRESSION
LAM 754-091624-001 SPRING, COMPRESSION
LAM 754-092082-002 BEARING, GUIDE,
W/SPRING, LEAF
LAM 754-093243-006 SPRING, CPRSV, WIRE,
9600
LAM 756-007809-010 SCR, SCHD, SHLDR,
10-32
LAM 765-000786-001 SPROCKET, DRIVEN,
1.214 PD
LAM 765-007787-001 SPROCKET, DRIVEN,
2.873 PD
LAM 766-008456-001 VALVE, AIR
LAM 766-009866-040 O-RING
LAM 775-009142-001 O-RING
LAM 790-006301-001 LIFTER, CHAMBER,
BACK-UP
LAM 790-008784-001 O-RING
LAM 790-092080-002 BEARING, LOCK, OVER
LAM 790-092081-001 BOLT, CRANK
LAM 795-020446-005 WINDOW SAPPHIRE
LAM 795-250729-001 LENS, CONVEX
LAM 796-000233-003 O-RING
LAM 796-000233-004 O-RING
LAM 796-000233-005 SEAL, CENTERING RING,
NW16
LAM 796-001233-001 O-RING
LAM 796-002232-001 O-RING
LAM 796-008976-002 O-RING
LAM 796-009021-001 O-RING
LAM 796-028633-010 SCREW, AL, PLATE,
BAFFLE, MODEL 4528
LAM 796-097155-001 O-RING
LAM 796-098648-001 O-RING, SEAL, GATE
LAM 80SQ045b (diode) 80SQ045B (DIODE)
LAM 833-011076-001 833-11076-001
LAM 839-003958-001 DIFFUSER, LL
LAM 839-006731-001 ELECTRODE BOLT
LAM 839-007158-001 GAS FEED FLEX LINE
LAM 839-007173-001 GAS LINE WELDMENT
LAM 839-007191-001 WELDMENT CONNECTOR
BULKHEAD
LAM 839-009866-040 BELLOWS
LAM 839-012255-001 BELLOWS
LAM 839-013901-001 THROTTLE VALVE ISO100
4″
LAM 839-022443-001 WINDOW ENCLOSURE
CONCENTRIC HLM
LAM 839-022475-001 EXTENSION, ENCLOSURE
CONCENTRIC HLM
LAM 839-022476-001 DRIP PAN UPPER
LAM 839-022507-001 ENCLOSURE HEADLOAD
CMP
LAM 839-031766-001C BELLOWS LIFT
LAM 839-249094-001 HOUSING, PIN, SENSE
LAM 839-249271-001 PIN, CARBIDE, 200MM
LAM 839-249332-001 PIN, CARBIDE, 200MM
LAM 839-249332-001RE2 Housing, Pin, Sense,
SS
LAM 839-250484-001 24″ GAS FEED
FLEX LINE
LAM 839-250568-001 BELLOWS,LOWER
ELECTRODE
LAM 839-330743-003 BELLOWS BOTTOM ROD,
LIFTER
LAM 839-460038-001 WELDMENT, BELLOWS
FEEDTHRU
LAM 839-460039-001 WELDMENT, BELLOWS
LIFT
LAM 839-470315-001 CAP, GAS
LAM 839-495013-001 LINER, CHAMBER
LAM 840-009865-040 KIT, HPS VALVE REPAIR
NW-40
LAM 840-009865-080 O-RING
LAM 840-090086-001 O-RING (SET)
LAM 852-011060-001 KIT, GAP
LAM 853-006710-XXX UPPER ELECTRODE ASSY
LAM  853-008389-001 ASSY, ELECTRODE LWR 4
PIN
LAM  853-008389-002 ASSY, ELECTRODE LWR 4
PIN
LAM  853-008389-003 ASSY, ELECTRODE LWR 4
PIN
LAM 853-008855-002 6″ UPPER
ELECTRODE ASSY
LAM 853-008855-004 6″ UPPER
ELECTRODE ASSY
LAM 853-008855-005 6″ UPPER
ELECTRODE ASSY
LAM 853-009154-007 WAFER ARM ASSEMBLY
LAM 853-009536-001 ASSY., SEAL PLATE,
CHAMBER, REAR
LAM 853-090133-004 ASSY, ELECTRODE LWR
FOCUS
LAM 853-090133-005 ASSY, ELECTRODE LWR
FOCUS
LAM 853-090133-006 ASSY, ELECTRODE LWR
FOCUS
LAM 853-090133-014 ASSY, ELECTRODE LWR
FOCUS
LAM 853-090133-015 ASSY, ELECTRODE LWR
FOCUS
LAM 853-090133-016 ASSY, ELECTRODE LWR
FOCUS
LAM 853-210621-306 REV AL RING
LAM 853-441511-001 PLATE, CAP, GAS
LAM 857-010229-001 PUCK, ALIGNMENT
LAM 885-425420-001 QUARTZ CLAMP
LAM ALC-1001-001 CHAMBER LINER
LAM AS568A-167#2037 O-RING, DUPONT KALREZ
LAM GI751 (diode) GI751 (DIODE)
LAM MFC:UNIT1200A-RF REFURBISHED, MFC,
UNIT 1200A  W/O CORE EXCH
LAM  PART NUMBER DESCRIPTION

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