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Lam Research Spare Parts

Please contact us for the Lam Research  Spare Parts availability of the following parts. Please include the P/N, Description, Quantity and photos if possible.

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Description

Please contact us for the Lam Research Spare Parts availability of the following parts. Please include the P/N, Description, Quantity and photos if possible.

OEM PART #: Material System DESCRIPTION:
715-3300394-002 9400 Frog Leg
715-3300394-002 9400 Frog Leg Rework
715-330825-006 9400 Chamber Liner
715-330825-006 9400 Chamber Liner Rework
715-330928-002 9600 Chamber Liner
715-330981-001 9600 Chamber Liner
715-330982-001 9600 Chamber Liner
715-495014-001 9400 Slit Door Liner Reanodise only
715-495014-001 9400 Slit Door Liner Rework
715-015808-001 OZ 4000 Shower Head
716-008608-002 Sapphire Window With Step
716-011009-001 Sapphire Window Sapphire
716-013423-001 Sapphire
716-331088-001 Quartz Ring ESC 8″Top Quartz Poly
795-020446-005 Sapphire
839-012255-001 Inner Gate Bellows
839-09866-040 Bellows
715-011640-006 4420 Fing, Focus Anodized (Semi 6″)
715-018991-206 4400 Upper Electrode 6″
715-330825-007 Refurbished Only
718-094523-261 ESC Chuck 6″
716-011533-001 NSG OZ NSG-OZ Quartz Window
716-008645-001 Quartz Cover Ring Quartz HP
715-011531-008 Aluminum 4400 Electrode Aluminum Anodized 6″
715-011531-009 Aluminum 4400 Electrode Aluminum Anodized 8″
715-009657-001 Ring Outer Anodized
716-160255-002 Quartz Bell Jar Sleeve Quartz ISO CH 4500
716-011009-001 Quartz Window Quartz
716-011427-001 Quartz DSQ Quartz Window
716-011493-001 Quartz DSQ Quartz Spacer
716-021323-001 Quartz Funnel Quartz Power Supply Moduel
716-028454-012 Quartz Disk Quartz
716-028454-012 Quartz Disk Quartz
716-031052-001 Quartz Window Quartz HDT Endpoint
716-140236-003 Quartz Confinment Ring
716-330504-065 Ceramic Focus Ring Ceramic
716-051609-003 Quartz Spacer Heater (4Pin Arry)
716-021717-001 Quartz Bell Jar Sleeve Quartz
716-021717-002 Quartz Bell Jar Sleeve Quartz
713-028487-001 Vespel Vespel Confinement Ring
716-012639-024 Quartz Noz, Inj, 8X.055-45 Deg RD
716-012640-011 Quartz Window Gas Inj, Face Seal, Qtz, NSG
716-012640-012 Quartz Window Gas Inj, Face Seal, QR
716-013344-001 Quartz Ring Cover Outer GND
716-013402-003 Quartz Cover H/E Ring Quartz
716-014843-001 Quartz 6 Ring WAP Qtz Generic 17″ DFC 300mm
716-023013-004 Silicon? Ring Hot Edge Si DFC 300mm Flex
716-331142-305 Top Edge Ring
716-801306-009 Quartz Quartz Disk
716-801451-019 Quartz Baffle Chamber 2300 MW Stripper U
716-802779-009 Quartz Gas Injector
716-140236-062 Quartz Confinement Ring Quartz
716-330891-002 Window TCP Quartz 9600
716-000941-001 Quartz Plasma Disk Baffle
716-347266-002 Quartz Opaque Baffle Liner Chamber Opaque (9600)
716-330355-001 Window Quartz Heated Endpoint
716-443179-102 Quartz 9400 System R Edge Base Quartz
839-012255-001 Bellows Inner Gate Bellows
716-008718-001 Quartz Quartz Gas Injector
716-801667-005 Quartz Quartz Viewport Window
716-801306-004 Quartz Window Quartz Gas Inject Fire Polish
716-016763-001 Quartz Ring Filler Inv Step 200mm
716-016830-003
716-016831-007 Ring WAP Qtz Geniric 200mm
716-027740-001 Window Quartz
716-031257-209 Ring Edge Top 2300
716-443090-002 Quartz Ring Quartz Upper
716-005205-003 Pl CVR Step Qtz 200mm 2300 Exelan
716-016763-001 Ring Filler Inv Step 200mm
716-016830-003 Ring Filler Inv Step 200mm
716-016831-007 Ring WAP Qtz Geniric 200mm
716-027740-001 Window Quartz
716-031257-209 Ring Edge Top 2300
716-140236-001 Quartz Confinement Ring Quartz (002, 003)
716-003543-006 LAM 2300 Ring, Hot Edge, Si, 300mm
716-003543-001 LAM 2300 Ring, Hot Edge, Si DFC, 300mm
716-044863-001 LAM 2300 Ring, He, A/FL, Si, SGL XTAL, 1.51D, 300mm
716-023013-020 LAM 2300 Ring, Hot Edge, 195 HGT, Si, 300mm, SP
716-003543-016 LAM 2300 Ring, Hot Edge, Si, 300mm
716-023013-007 LAM 2300 Ring, Hot Edge, 195 HGT, Si, 300mm
716-040738-402 LAM 2300 R, HE, 4XX ESC, W/Flat, SGL XTL, 300mm
716-040738-412 SCCM R, HE, 4XX /FLAT, SGL  XTL, 300mm
715-030860-001 LAM 2300 Chamber Liner
715-801021-012 LAM 2300 Chamber Liner (2300Metal_AL)
715-443178-300 LAM 2300 Al, Hot Edge Ring
715-009779-002 Cap Electrode
715-007025-001 Aluminum Auto Etch Electrode Aluminum Anodized
715-008721-001 Aluminum Electrode Aluminum Anodized
715-007469-002 Auto Etch Electrode Lower 8″ 4-Pin
602006 Pin, Lift Lower Electrode (Drytek)
2301721 Rev 3 Liner Ceramic, 100-150mm, CHMBR 2, 4, Upper Electrode(Drytek)
716-006721-001 3-Hole Ring
716-006753-001 Insulator Ring
716-011036-001 Orifice Ring
716-011510-001 3-Hole Ring
716-011536-001 Ring Upper Electrode Insulator Ceramic
716-011563-001 Clamp Ring 6″
716-011758-016 Lower Combo Ring, 6″
716-011922-001 Upper Electrode CeramicNg, 6″
716-011923-001 Clamp Attachment Ring 6″
716-020904-016 Lower Focus Ring, BAC, 6″
716-020905-001 Lower Filler Ring, BAC, 6″
716-028028-004 Upper Electrode Clamp Ring, 6″
716-028123-002 Ceramic Filler Ring, 6″
716-028678-261 Ceramic Clamp Ring, 6″
716-028688-01 Clamp Lower Plate, 8″
716-028688-261 Plate, Bottom, Wafer Clamp, 6″
716-028725-161 Clamp Ring
716-030136-001 Ceramic Focus Ring, 6″
716-140068-001 ESC Ceramic Focus Ring, 6″
716-140069-002 Ring, Upper Insulator
716-140139-001 Hot Edge Ring or Focus Ring Insert, 8″
716-140163-001 Hot Edge Ring or Focus Ring Insert, 8″
716-230121-001 RF Shaped Window (6″ or 8″)
716-330045-001 Edge Ring 8″
716-330121-001 Ceramic RF Shaped Window (6″ or 8″)
716-330167-281 Bottom Actuated Clamp Ring, 8″
716-330504-064 ESC Focus Ring (Modified–Regrind), 6″
716-330504-064 ESC Focus Ring, 6″
716-330504-081 Ceramic ESC Focus Ring  8″
716-330504-081 Ceramic ESC Focus Ring, 8″
716-026652-002 Ring Edge BOT 200-300mm
716-031257-309 Ring Edge Top 2300
716-017112-330 Ring WAP 17.07 x 1.10 Thk AN SLT
720-009531-010 Screw FLTHD 6-32 KEL-F
715-011565-002 Bolt Clamp Rtng
713-011585-004 Cover Clamp Bolt “A”
713-011926-001 Cap Bolt Clamp Retain
796-002673-001 Stem 1/4″ KEL-F
720-093815-006 Screw Gas Dir Disk
716-011969-100 RING,QTZ,COUPLING,HI EDGE,300MM
716-014843-300 RING,WAP,QTZ,GENERIC,17IN,DFC
720-090943-010 10-32 X 5/8 KEL-F SCREW
716-031052-002 Quartz  Window Quartz HTD Endpoint
715-011563-161 CLAMP, WAFER, DOMED, CERAMIC, 6″, 1-FLAT, 4500
715-140153-001 Coupling Ring, Ceramic.  Ref. 715-140153-001.
716-001427-003 CERAMIC DISK
716-006721-001 Insulator Ring
716-006753-001 Ceramic Insulator Ring.  Reference 716-006753-001
716-011570-001 ORIFICE FILLER W/C CERAMIC
716-011571-001 CERAMIC WASHER
716-011572-001 CERAMIC RETAINER CLAMP, 1/4 TURN
716-011573-001 CERAMIC PLUNGER, SHORT
716-011573-001 Ceramic Plunger, 1/4 Turn

OEM# 716-011573-001

CPN: ML-43224
716-011573-004 CERAMIC PLUNGER LONG
716-011759-016 RING, MOUNTING, CERAMIC
716-020905-001 Lower Filler Ring, BAC, 6″
716-028414-015 RING, FOCUS, CERAMIC
716-028447-002 CERAMIC DISK
716-029435-006 RING, ELECTRODE, CERAMIC
716-030135-001 CERAMIC RING
716-140139-001 Hot Edge Ring, 200mm
716-140427-001 SAME AS 716-140427-001 IN CERAMIC
716-230121-001 RF Shaped Window (6″ or 8″)
716-230121-211 RF SHAPED WINDOW
716-250514-001 INSULATOR RING CLAMP CERAMIC
716-250515-002 INSULATOR RING LOWER CERAMIC
716-330045-002 EDGE RING 8″ – ALLIANCE 9600 PTX
716-330121-211 RF Shaped Window (6″ or 8″)
716-330122-002 Plate, Top, Ceramic
716-330167-161 CLAMP RING
716-330167-261 Ceramic Bottom Actuated Clamp (BAC) Ring.  99.8% High Purity Alumina.  Ref. P/N 716-330167-261.
716-330504-061 RING FOCUS 6″ GDRING JEIDA ESC
716-330890-001 CONTAINMENT RING BASR
716-330892-001 CERAMIC SHOWER HEAD
716-330892-007 GDP – ALLIANCE 9600 PTX
716-460417-001 INNER CERAMIC LINER
716-331157-022 Quartz 　 Disk Interferometer Top Gas
839-017612-009 Quartz Assy, Window Quartz Tube
716-331142-001 Quartz Ring Edge Top Wide
716-039961-001 Quartz Ring Focus Steped Filter 200mm
716-011969-100 RING,QTZ,COUPLING,HI EDGE,300MM
716-013344-001 RING,COVER,OUTER,GND
716-012640-012 WINDOW,GAS INJ,FACE SEAL,QRTZ,NSG
716-012639-024 NOZZLE, INJ. 8x, .055-45DEG RDL-1CTR
716-014843-300 RING,WAP,QTZ,GENERIC,17IN,DFC
716-023013-004 RING,HOT EDGE,.195 HGT,SI,DUAL
716-013402-003 Cover H/E Ring Quartz 300mm
716-017112-330 RING,WAP,17.07X1.10THK,AN SLT
716-012639-024 NOZZLE, INJ. 8x, .055-45DEG RDL-1CTR
716-014843-300 RING,WAP,QTZ,GENERIC,17IN,DFC
716-039962-001 Quartz Edge Ring
716-014843-303 Quartz Ring WAP Thk
716-021323-002 Quartz Quartz Funnel DSQ Chamber
716-331089-001 Quartz
716-026652-902 Quartz Ring Edge BOT 200-300mm
716-031257-531 Quartz Ring Edge Top Quartz EBP 300mm
716-140139-211 Silicon Hot Edge Ring Silicon
716-008608-001 Sapphire IEP Window Sapphire Gas Innjector
716-441044-005 Quartz Shower Head Sapphire Coated Strip Chamber
716-021323-002 Quartz Quartz Funnel DSQ Chamber
790-098558-002 Kit Quartz Extention Liner Kit
15367-01 Quartz Gasonic L3510 Pin Lift Quartz
16532-01 Quartz Gasonic L3510 Plate Quartz Lamp
16784-01 Quartz Gasonic L3510 Spool Quartz
17621-01 Quartz Gasonic L3510 Plate Gas Dist 6”
17622-01 Quartz Gasonic L3510 Plate Diffuser Quartz
71805-01 Quartz Gasonic L3510 Window Quartz 1.25 DIA
17688-01 Quartz Gasonic L3510 Gas Distribution Plate 200mm
14738-01 Quartz Gasonic L3510 Bubbler Quartz
734-007524-294 O-Ring O-Ring Chemraz, SSE38 21.17 ID x .142C/S
734-007524-284 O-Ring O-Ring Chemraz, SSE38 17.955 ID x .139C/S
796-028633-010 Screw Screw
720-090943-010 Screw Kel-F 10-32 Screw
715-011746-161 Aluminum Plate Wafer Clamp 6″
716-443086-301 Silicon Silicon Hot Edge Ring
716-801306-008
716-800951-201
716-331142-201 Ring Edge Top Wide NSG
716-331099-001 Quartz Quartz Edge Ring
716-007136-002 Quartz Ring Quartz Upper HPT
718-094523-281 Assy Electd ESC 8″ Notched Lt Focus
716-331030-001 Ceramic WDO RF SHP CER F/G 37 Holes 3xC
716-013402-008 Quartz Cover H/E Ring Quartz
716-801667-003 Quartz Window Quartz
716-011572-001 Clamp Retainer, 1/4 Turn
716-011563-161 Ceramic Plate Wafer Clamp 6″ Dome
716-011764-281 Ceramic Plate Wafer Clamp 8″ Dome No Flat
716-028668-261 Ceramic Ring Clamp
716-028721-261 Ceramic Plate Bottom Wafer Clamp 6″ Major Flat W/P
716-028721-281 Ceramic Plate Bottom Wafer Clamp 6″ Domed Shadow
716-440345-261 Ceramic Plate Bottom Wafer Clamp
716-017581-002 Ring ELCTD 2 Piece
716-011969-002 Quartz Ring Quartz Coupling 300mm
716-803156-004 B Focus Ring CVR DFC 300mm
716-017112-300 Ring WAP 17.07 x 1.10 THK AN SLT
716-460875-002 Insulator Lower Electrode Strip Chamber
716-008854-001 Disk Diffuser Duocel 6″
716-031257-534 Edge Ring
716-040737-407 Quartz Coupling Ring Quartz
716-331157-024 Quartz Quartz Disk Top Gas
715-011531-015 4400 Electrode Upper 6″
716-028454-015N Quartz TPC Quartz Window Y203 (Coated New Only)
716-140125-401, A SiC 716-140125-200 Baffle 8″ SiC-1H
716-140125-100, G SiC Baffle 8″ SiC-1H
716-330045-281 Ring Focus 8″ ESC Guard
A06-001-01 Quartz Window Vented Quartz
16532-01 Quartz Gasonic Top Plate Quartz
06-0091 Quartz Gasonic Quartz Plasma Chamber
713-018426-369 Insert, Vespel Ring
715-007469-001 AUTO ETCH Lower Electrode 6″, 4 pin
715-007469-102 AUTO ETCH Lower Electrode 6″, 4 pin
715-011531-012 Electrode
715-011531-014 4400 Electrode 8″,
715-011531-102 4400 Electrode 6″
715-011640-005 Focus Ring 4″
715-011673-105 Lower Electrode 5″,
715-011746-141 Plate Wafer Clamp 4″
715-011746-151 Plate Wafer Clamp 5″
715-018991-208 4400 Electrode Upper 8″
715-018991-006 4400 Electrode Upper 8″
715-028087-005 Shroud 6″ 2 mil hard
715-028559-001 Showerhead 6″
715-028606-161 Wafer Clamp 6″
715-030320-001 BSR Injection Ring
715-28608-161 Non-Contact Wafer Clamp
715-31752-206 Electrode Lower 6″
715-31752-208 Electrode Lower 8″
715-330000-090 9600 Gas Injection Ring
715-330135-001 9600 BSR Injection Ring
715-330984-001 9600 BSR Injection Ring
715-330987-001 9600 BSR Injection Ring
715-11986-108 Lower Elctrode
715-011531-002 Upper Electrode
715-011639-006 Upper Electrode
716-460216-002 Ring Focus 8″ STP Chamber
716-331051-006 Uniformity Ring
715-009306-006 RING FOCUS 6″
713-011560-001 Teflon Shroud
713-011574-001 Plunger Wafer Clamp Upper
713-011575-001 Clamp Retaining Nut
713-011578-001 Plunger Guid Sleeve
713-011579-001 Plunger Guide
713-021267-001 Pin Clamp Aligment Head
715-011664-004 Cap Lower Electrode 4″
715-011925-001 Bolt Capped Clamp Retaining
715-140125-101 Baffle Lower
716-011580-246 Plate Clamp 4″
716-028414-014 Ring Focus
839-011906-001 Electrode Silicon 6″
713-011577-001 Retainer Washer
716-011624-001 Ring Filter Ceramic
716-801568-002 Window Quartz
716-022030-004 SLV Quartz Stepped Pin DC Bias
720-092759-016 Vespel 1/4-20 x 1″ Slotted FH Screw
716-031257-909 Ring Edge Top Quartz 300mm
716-443189-002 Quartz Quartz Cover Ring
716-331157-004 Quartz High Purity Quartz Disk for 9400DFM
716-140432-002 Quartz Insert Ring Upper Keyed
716-028454-512 Quartz Disk Quartz
716-331088-004 Quartz R Edge 8″ ES NCH Top Quartz EX
716-004655-001 Quartz Ring Quartz Upper
716-331157-014 Quartz Top Disk Quartz
716-028123-003 Filler Ring
716-330915-001 Insulator Ceramic Gas Ring
716-331128-001 Sapphire Window Sapphire
716-140432-004 Quartz Quartz Ring Upper, Konsi 51182
716-016831-002 Ring WAP Konsi 51182
716-011493-001 Spacer Quartz P.R. (DSQ)
716-140139-213 Ring Hot Edge HI W
716-016830-002 Ring WrapTwist Top Stepped DFC200mm
716-007136-011 Quartz Ring Quartz Upper HPT
716-008645-005 Quartz Cover Ring Quartz HP
716-026654-902 Quartz Ring Edge Bot Quartz 200-300 KONSI 51182
716-045265-123 Quartz Ring Cover Gnd EXT Quartz 300mm
716-021216-002 Quartz Top Adjust CPLG 2300 300mm
716-802034-001 Quartz Liner Chamber Lower
716-802033-001 Quartz Liner Chamber Lower
716-801627-004 Quartz R. FOC 300mm STPR 12″
716-443230-002 Quartz Confinement Ring One Piece HP
716-443090-010 Quartz R. Quartz Upper HP
716-330891-802 Quartz Window Top Quartz 9600xx
716-331157-013 CFQ Plate Shield 300mm
716-013350-010 NSG SP IEP Optics 2, 4 Long NSG
716-021209-366 Quartz BOT ADJ CPLG 2300 300mm DZ
716-027425-001 Quartz Ring Cover Outter Stepped
716-012639-023 NSG Injector 1 CTR 8 RDL Quartz NSG
716-021209-001 Quartz BOT ADJ CPLG 2300 300mm
716-331142-999 NSG R Edge Top Wide 8″ Flat Test
716-140432-802 Quartz Ring Upper Keyed
716-140236-803 Quartz Confinement Ring
716-018468-130 Quartz Ring Cover Outer Ground .130 Thk Quartz
716-022025-001 Quartz Ring Outer CPLG 2300 200mm
716-018468-090 Quartz Ring Cover Outer Ground .090 Thk Quartz
716-0036516-02 NSGN or TSC4 716-0036516-03 Quartz Face Outer Electrode
716-028454-715 NSGN or TSC3 Disk Quartz HPQ
716-017112-002 Quartz Ring WAP Twist Top 17″ 300mm EXELAN
716-021216-367 Quartz Top ADJ CPLG 2300 300mm DZ
716-016394-001 Quartz Ring Confinement One Piece HPT
716-027997-001 Quartz Electrode Outer Half Quartz Face
716-027996-001 Quartz Electrode Outer Full Quartz Face
716-021209-368 Quartz BOT ADJ CPLG 2300 300mm DZ
716-800951-311C XXX Base Focus Ring Shield 300mm FNSH PROC
716-082039-001 TCP Window Silicon
716-069688-002 Silicon
716-026653-902 Bottom Edge Ring (KIYO)
716-800952-001 Base Focus Ring Metal
716-003686-188 Edge Ring (Metal Chamber)
716-140118-001 Alumina 995,C Focus Ring ESC 8″
716-031453-002 Alumina 995,C Lam KK
716-011624-007 Ceramic Ring Ceramic
857-073299-001 Etch FLEX Talon Ect. LAM 2300 Talon Gaskets 300mm
713-072792-003 Etch FLEX Talon Ect. LAM 2300 Talon Gaskets 300mm
857-072806-005 Etch FLEX Talon Ect. LAM 2300 Talon Gaskets 300mm
857-073710-002 Etch FLEX Talon Ect. LAM 2300 Talon Gaskets 300mm
839-044157-431 (Local) Etch FLEX Talon Ect. LAM 2300 Flex 45 EX Silicon Electrode
716-069688-040 Etch FLEX Talon Ect. LAM 2300 Flex 45 EX Silicon Electrode
839-019090-324 Etch FLEX Talon Ect. LAM 2300 ESC 300mm
839-800327-315 Etch FLEX Talon Ect. LAM 2300 ESC 300mm
857-065064-004 Etch FLEX Talon Ect. LAM 2300 ABE Gaskets
714-065064-004 Etch FLEX Talon Ect. LAM 2300 ABE Gaskets
839-052157-010 Etch FLEX Talon Ect. LAM 2300 ABE Silicon Electrode Inner
839-052158-021 Etch FLEX Talon Ect. LAM 2300 ABE Silicon Electrode Outer
796-010692-002 Etch FLEX Talon Ect. LAM 2300 Bellows Rocker N/N
790-022847-003 Etch FLEX Talon Ect. LAM 2300 ACTR Bellows BSR Lam 2300 WEB
716-140432-001 Ring Upper Keyed
839-330743-002 Bellows BASR Bellows
839-011906-912 Electrode Silicon Polish
839-031766-001 Bellows Bellows Lifter
605-012620-001 PCB Index Dual SNSR (X)
716-140163-261 Ring Hot Edge 15 Deg (Y)
716-140432-804 Ring Upper Keyed
857-073299-001 Gaskets Talon LAM 12″ Flex LRC Gaskets
713-069935-003 Gaskets Talon LAM 12″ Flex LRC Gaskets
713-072792-003 Gaskets Talon LAM 12″ Flex LRC Gaskets
857-072806-005 Gaskets Talon LAM 12″ Flex LRC Gaskets
857-073710-002 Gaskets Talon LAM 12″ Flex LRC Gaskets
713-073439-010 Gaskets Talon LAM 12″ Flex LRC Gaskets
714-072727-048 Gaskets Talon LAM 12″ Flex LRC Gaskets
714-072728-003 Gaskets Talon LAM 12″ Flex LRC Gaskets
857-084241-010 Gaskets Talon LAM 12″ Flex LRC Gaskets
857-065064-004 Gaskets ABE LAM 12″ Flex LRC Gaskets
714-059445-025 Gaskets ABE LAM 12″ Flex LRC Gaskets
713-066269-002 Gaskets ABE LAM 12″ Flex LRC Gaskets
857-050466-008 Gaskets ABE LAM 12″ Flex LRC Gaskets
857-050466-001 Gaskets ABE LAM 12″ Flex LRC Gaskets
713-066825-001 Gaskets ABE LAM 12″ Flex LRC Gaskets
857-027108-001 Gaskets ABE LAM 12″ Flex LRC Gaskets
857-084241-025 Gaskets Mono T LAM 12″ Flex LRC Gaskets
713-080721-001 Gaskets Mono T LAM 12″ Flex LRC Gaskets
713-088966-001 Gaskets Mono T LAM 12″ Flex LRC Gaskets
857-073299-002 Gaskets Mono T LAM 12″ Flex LRC Gaskets
857-086768-095 Gaskets Mono T LAM 12″ Flex LRC Gaskets
713-040539-001 Gaskets Mono T LAM 12″ Flex LRC Gaskets

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