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Lam Research mechanical assemblies

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We are dedicated to the continuous improvement and cost-reduction efforts of our customers by providing innovative products and services. We repair and refurbishment services on Lam Research equipment/modules/components/Parts. This includes Pumps/Chiller/TCUs, the following mechanical/transport assemblies, valves, RF matches, RF generatorsPCBs/ESC & DC Power Suppliers etc.. We also provide on-site technical support services and refurbishes, installs and sells Lam Research equipment, modules/components/Parts . These are only for end user and they are subject to prior sales. Check for Exchange Availability.

  1. LAM Harmonic Arm Drive: 853-012123-001; 853-012123-004; 853-012175-001; 853-012175-002; 853-012175-003; 853-012175-004; 853-012200-002; 853-012200-004; 853-012261-004
  2. LAM Lifter Spinner: 853-012525-001; 853-012525-002
  3. LAM Rainbow Indexer: 853-012600-001; 853-012600-002; 853-012600-101; 853-012600-102
  4. LAM Shuttle Assembly: 853-012550-001
  5. Reduced Height & Standard Arm Housing: 853-021924-001; 853-032776-001
  6. APM Spinner: 853-013750-001
  7. Applied Susceptor / Wafer Lifter: 0010-09340; 0010-09341
  8. Auto Etch / Gasonics Indexer: A94-016-03; A94-016-04; 853-004073-001
  9. Lam Research Gap Drive
  10. LAM Edge Detector: 853-012500-001; 853-012500-002; 853-012500-003
  11. LAM Gates: LAM Inner Gates:853-012200-002; 853-012200-004; 853-012661-001; 853-012875-002; 853-012350-001. LAM Outer Gates: 853-140013-001; 853-140013-001

All the Lam  plasma etcher equipment  trademarks belongs to Lam Research , the original equipment manufacturer. The photo at this page is only for your reference. All rights reserved. 

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The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers