Description
Gasonics/Brans
– Model: 9102
– Quartz Barrel: 12″ diameter x 20″ depth
– Wafer Size: 4″, 6″, 8″ capability
– Capacity: 50 8” wafers, 50-75 6” wafers, 100 4” wafers
– Display: Color 12.1″ touch screen for control & monitoring of process parameters, automatic recipes, or manual plasma treatments.
– ENI OEM-12A 1250W RF Generator (13.56 MHz)
– Soft Pumping and Purge Valving
– Low Particulate Design
– Gas Inputs
– Multi Channel / Single Board Computer Controlled
– Floppy Storage
– Temperature Controller
SS201926049103
