Description
ETCHERS ASHERS ASYNTIS Silicon Star 8
Manufacturer: ASYNTIS
Model: Silicon Star 8
Category: Etchers / Ashers
Vintage: 2005
Wafer Size: 8 Inch
Equipment Details: stress relief or ashing system for plasma etching, 8 inch wafers
System specifications:
Process data:
Etch rate: up to 3 µm/min at process temperatures less than 70°C
Throughput: 40 wafers/hour at 3 µm removal
Technical data:
Process chamber:
Inner diameter: 400 mm
Chamber volume: 40 L
Radial source on chamber top (remote plasma)
Vacuum outlet with solenoid valve DN 63 ISO-K on bottom
Automatic drawer door
Viewing window
Chamber leak rate: less than 5 Pa L/sec
Radical generator:
Water-cooled microwave radical generator
Maximum power consumption: 2 kW
Frequency: 2.45 GHz
Water-cooled magnetron
Gas supply:
(3) Gas channels with solenoid valves and MFC’s
Stainless steel piping with 6 mm SWAGELOK fittings
Down stream controller: butterfly valve DN 63 ISO-K
Chuck system:
Top plate for 8″ wafers
Water-cooled base
Chamber controller:
PLC controller and LCD display
Multiple process programs
Online viewing of process parameters
Status and error messages
Vacuum measurements:
Capacitive vacuum gauge: gas type independent
Measuring range: 1 to 1,000 Pa
Main control unit:
SIEMENS Simatic S7
Graphical user interface
Online control of all parameters
Robot system: 3-axis robot with servo drives
Safety precautions:
Emergency stop switch
HF and UV absorbing view port
Safety interlock system
CE assembly and wiring regulations compliant
(2) Cassette loaders
(6) THERMO ELECTRON / HAAKE chillers: TC100 / TC300
(2) BUSCH Cobra DS 80 hivac pumps
Facilities requirements:
Cooling water for plasma source: 1/4″ brass, 3L/min, 26°C, 0.5 to 1 bar
Cooling water for chuck system: 1/4″ brass, 5 L/min, 5 to 40°C, power: 2kW
Process gas: 6 mm SWAGELOK, stainless steel, input: 2 bar
Compressed air: 12 mm SWAGELOK, stainless steel, input: 4 to 6 bar
Nitrogen purge: 12 mm SWAGELOK, input: 2 bar
Power: 230/400 VAC, 50/60Hz, 3-phase, 63A, Includes step down transformer 480-400 VAC
Dimensions (W x D x H): 2200 x 1950 x 2050 mm
Weight: 1,600 kg
2005 vintage.
SS201411478524
