Description
Edwards/ Temescal VES-2550 E-Beam Evaporator 3-Phase 208V CV-6SLX (6024-7110-0)
Manufacturer: Edwards
Condition: Used. This setup is in nice condition with the usual marks from normal use.
Included:
- (1) E-beam Evaporator
- (2) Equipment Racks
- (1) Rough Pump
- (1) CTI 10 Cryo-Torr Cryo Pump (No Compressor)
- (1) Partial Manual
Specifications:
- Manufacturer: Edwards/Temescal
- Model: VES-2550
- Power requirement: 208V/70A three phase
- 3 station beam Temescal source: Two hearths with a single large crucible each and one hearth with a four position rotatable crucible. All hearths are Temescal.
- Temescal CV-6SLX power supply manufactured 2013 (see photos)
- Temescal FerroTec Tem E Beam controller with pendant control (see photos)
- CTI Cryo-Torr 10 vacuum pump with rebuilt Leybold D65B rough pump.
- Temescal VersaVac 5 vacuum gauge with inputs for 5 T/C gauge sensors and two ion gauges
- Temescal Auto pump control with vacuum system status display
- Shutter control
- Substrate rotator control
- Temescal MC-4C motor control
- CTI Cryogenics temperature indicator with regeneration timer
- Temescal turret source selector for the 4 position hearth
- The second rack houses the substrate heater with transformers and PID control, as well as current indicators.
SS162424504703
