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Denton DV-SJ/26

Category: Resell Products Tags: Denton Vacuum INC, Evaporator

Description

Description

Please contact us for the availability of the Denton DV-SJ/26 E-Beam Evaporator used Semiconductor Equipment.

Manufacturer	Denton
Model	DV-SJ/26
Description	E-Beam Evaporator, 4 Pocket
Vacuum System	Cryo Pumped
Load Lock Included	No
E Beam Power Supply
High Voltage Maximum	8 kV
Number of Guns Controlled	1
Lateral/Longitudinal Beam Sweep	Temescal XYS 8 Sweep Control
Electron Source Type	Four Pocket
Crucible Size	7.00 cc (0.43 cu in)
Vacuum System	CTI Cryogenics Cryotorr 10 CTI Cryogenics 8500 Compressor Manual Vacuum system controller
Gas Inputs	Two
Gas Input Control	Mass Flow Controllers
Substrate Heaters	Yes
Film Thickness Monitor	Yes
Other Information	Water cooled stainless steel chamber Substrate rotation(2) MKS 2259B Mass Flow Controllers – 100 sccm Inficon IC 6000 Deposition Controller High voltage glow discharge supply and controller. Glow discharge not installed in chamber.

The items are subject to prior sale without notice. These items are only for end users.

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