CPA V2000 Five Target RF and DC Magnetron In Line Sputtering System

CPA V2000 Five Target RF and DC Magnetron In Line Sputtering System

Currently configured for single sided sputtering but cathodes can be moved manually if double sided sputtering is desired.

Target Size: 3-1/2 in. x 18 in.

Easy access to cathodes via hinged doors.

Currently configured with 4 DC and 1 RF cathodes.

Multiple CTI cryopumps for high vacuum.

Load lock chambers on both ends.

Loader handles up to 28 20 in. H panels or pallets.

Variable speed pallet transport system.