Description
CHA SEC-1000-RAP Dual Gun E-Beam Evaporator
- Used thin film deposition system.
- Two single pocket e-guns with individual power and sweep control.
- Inficon IC4 Plus deposition rate monitor.
- Temescal CV-8 E beam power supply.
- Auto-Tech II valve controller.
- 25.5 in. diameter water cooled stainless steel bell jar.
- CTI cryopump with compressor and roughing pump.
SS251319380204