CHA SEC-1000-RAP Dual Gun E-Beam Evaporator

Description

CHA SEC-1000-RAP Dual Gun E-Beam Evaporator

  • Used thin film deposition system.
  • Two single pocket e-guns with individual power and sweep control.
  • Inficon IC4 Plus deposition rate monitor.
  • Temescal CV-8 E beam power supply.
  • Auto-Tech II valve controller.
  • 25.5 in. diameter water cooled stainless steel bell jar.
  • CTI cryopump with compressor and roughing pump.

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