Description
CHA SE-600-RAP Single Pocket E-Beam Evaporator
- Used thin film deposition system.
- Inficon IC6000 crystal deposition monitor
- Triple dome planetary for 3 in. wafers.
- Automatic or manual valve control.
- Diffusion pump and roughing pump.
- Motorized hoist. 19 in. dia. bell jar.
- Temescal CV-8 E-beam power supply with controls.
- Single pocket e-gun with shutter.
SS251319337465
