Description
AST SHS 10MA/10-MA RAPID THERMAL PROCESSOR ANNEALING RTA/ RTP/ RTO STEAG MATTSON
Make: AST/ Steag/ Mattson
Product: SHS
Model No.: 10 MA/ 10MA / AST SHS 10MA
Type: Rapid Thermal Processor/ RTP (Rapid Thermal Annealing RTA/ Rapid Thermal Oxidation RTO)
Voltage: 400V
Frequency: 50Hz
Power: 43kW 3PH/N/PE
Comes with:Machine Documentation (Hardcopy) and System Operation Manual (Hardcopy)
SS272826970594
