Description
AG Associates Heatpulse 610 Benchtop RTP Rapid Thermal Processor
Benchtop system for rapid thermal processing of semiconductor wafers up to 6 in. dia. max.
(Depends on wafer tray with system).
Programmable ramp up rates.
Peak Temp.: 1350 deg C.
Recommended Steady State Temp. Range: 400 to 1150 deg C.
208V, 1 Ph, 60 Hz, 90A.
SS262328592486
