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SemiStar Corp. Semiconductor Equipment Parts Service

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Suss

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Suss MA100e

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SUSS MicroTec / KARL SUSS MA8/BA8

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Semiconductor Equipment Parts

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SÜSS MicroTec Gamma

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Mask Aligner and parts

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Karl Suss FC 150 Flip Chip Bonder

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Semiconductor Equipment Parts

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Karl Suss RA120M

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SUSS MA6/BA6

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KARL SUSS / MICROTEC MA 6 Mask aligner

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MA8 Gen4 Pro SUSS Semi-Auto Mask Aligner

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RCD8 SUSS Manual Coater and Developer

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Suss MA100e

SUSS MicroTec / KARL SUSS MA8/BA8

Semiconductor Equipment Parts

SÜSS MicroTec Gamma

Mask Aligner and parts

Karl Suss FC 150 Flip Chip Bonder

Semiconductor Equipment Parts

Karl Suss RA120M

SUSS MA6/BA6

KARL SUSS / MICROTEC MA 6 Mask aligner

MA8 Gen4 Pro SUSS Semi-Auto Mask Aligner

RCD8 SUSS Manual Coater and Developer