Description
SUSS Micro Tee Lithography GmbH RCD8 SUSS Manual Coater and Developer
Location: China
Quantity: 1 sets
Condition: It was purchased from Suss directly in 2017, After installation, the owner did trial run and then packed. So basically it is a unused tool.
Vintage: 2017
Valid Time: Subject to prior sale. First come, first service.
ID:OEM-Module-1
Facility:
- Utilities: power 400 V±10%, 16 A, 50 Hz; Vaccum – 0.8 ~ – 0.6bar;CDA 6 ~ 8bar;N2 5-7 bar; DIW
- Room Temperature: 20 – 22 °C (68 – 72° F)
- Relative Humidity: 45 – 55 %
Configuration:
- 100007822P RCD8T 1PC
- 100008837P RCD8 COATERPACKAGE 1 PC
- 100008838P RCD8 DEVELOPER PACKAGE 1PC
- 100007823P EXTENSION MODULE FOR RCD8 T 1PC
- 100007824P RCD8TRAY 1PC
- 100007825P RCD8 STORAGE BOX 1PC
- 100018733P Hot plate, HP8TMMC 1PC
- 100018734P OPTION: HP8 PROXIMITY 1PC
- 100011719P OPTION: HP8 NITROGEN PURGE 1PC
- 100062076P RCD8 SAFETY HOOD FULLY CLOSED 2PC
- 100007828P GYRSET COVER OPTION WITH Z-MOVE 1PC
- 100007829P LIFT PIN DRIVE ASSEMBLY 2PC
- 100007830P MANUAL CENTERING DEVICE 2PC
- 100006841P FILTER UNIT FOR DEVELOPER 1PC
- 100006842P FILTER UNIT FOR DI-WATER 1 PC
- V623007P FILTER UNIT FOR SOLVENT 1PC
- 100079370 PRESSURE TANK SYSTEM 5 L PE WITH COUPLING 1PC
- 100078691 PRESSURE TANK SYSTEM 10 L SS WITH COUPLING 1PC
- V760220P WASTE CANISTER (20 L STAINLESS STEEL) 1PC