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MA8 Gen4 Pro SUSS Semi-Auto Mask Aligner

Equipment Inventory (Updated)

Category: Resell Products Tags: Karl Suss, Suss

Description

Description

SUSS Micro Tee Lithography GmbH MA8 Gen4 Pro SUSS Semi-Auto Mask Aligner

Location: China

Quantity: 1 sets

Condition: It was purchased from Suss directly in 2017, After installation, the owner did trial run and then packed. So basically it is a unused tool.

Vintage: 2017

Valid Time: Subject to prior sale. First come, first service.

ID:OEM-Module-1

Basic system prepared for motorized alignment stage with:

automatic wedge compensation system in contact or without contact between mask and wafer ( with reference balls), alignment gap programmable froml to 1000 micron, resolution 1 micron
movement range mask aligner mode: X +/-5.0mm, Y +/-5.0mm, Theta +/-5°
reset movement to ZERO position after each exposure

Configuration:

machine base frame with mechanical-, pneumatic- and electrical equipment 230V-50/60Hz
one joystick X/Y- and THETA for alignment stage control. Protection of mask and wafer when in contact by locking the motors to prevent stage movement
TSA microscope stage with manual or motorized X-Y-manipulator and manual or motorized rotation for microscope
with integrated microscope tilt for exposure and to create access for mask loading
manual loading and unloading of wafer
PLC control with LCD display, WINDOWS GUI
for wafer l” up to 200 mm diameter lithography application
machine base frame made of aluminum profile with pneumatical dampers
motorized alignment stage system
TSA microscope systems
exposure unit, -lamp, and – optics

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