Brooks / PRI Automation Robot & Pre-Aligner File Download Procedure
This procedure explains how to download the required configuration files into Brooks Automation, PRI Automation and Equipe robot controllers using the EQT software.
Before installing a robot or pre-aligner, download the correct parameter files into the controller. Using incorrect files may prevent the robot or pre-aligner from operating properly.
Required Download Files
| Device | Required Files |
|---|---|
| Robot | ATM-XXXX.PAR |
| Pre-Aligner | PRE-XXXX.PAR PRE-XXXX.CAL PRE-XXXX.WAF |
| Optional Controller Files | XXXXXXXX.MAC (Macro File) XXXX.COR (Coordinate / Station File) |
Preparation
- Connect the PC to the controller using the RS-232 port and a Null Modem Cable.
- Launch the EQT (Equipment Terminal) software.
- If communication fails, verify the EQT.INI configuration.
EQT.INI Configuration
For an Integrated Controller:
FF Option = 2
Controller options:
- 0 = Robot Controller
- 1 = Pre-Aligner Controller
- 2 = Integrated Robot + Pre-Aligner Controller
Step 1 – Download Robot Parameter File
Select:
File → Download → Parameter
Select:
ATM-XXXX.PAR
After downloading, execute:
RES RSRN 0
The controller should return the Robot ID matching the downloaded parameter file.
Step 2 – Download Pre-Aligner Parameter File
Select:
PRE-XXXX.PAR
Execute:
RES RSRN 1
Verify the returned Pre-Aligner ID matches the downloaded file.
Step 3 – Download Pre-Aligner Calibration File
Select:
PRE-XXXX.CAL
Do NOT execute SAV after downloading.
Simply return to the command prompt.
Step 4 – Download Wafer Parameter File
Select:
PRE-XXXX.WAF
Execute:
RSA SAV
This completes the required Pre-Aligner file download.
A complete Pre-Aligner restoration requires only the following three files:
- PRE-XXXX.PAR
- PRE-XXXX.CAL
- PRE-XXXX.WAF
Optional – Download Macro File
If a Macro File is supplied, download:
XXXXXXXX.MAC
Execute:
SMCR LMCR
Verify the macros are listed correctly.
Optional – Download Coordinate / Station File
If your system includes a Coordinate / Station file, download:
XXXX.COR
Execute:
RSA SAV
Technical Support
If you need assistance with Brooks Automation, PRI Automation or Equipe robots, robot controllers, pre-aligners, parameter files, repairs, calibration or replacement parts, please contact SemiStar Corp..