Description
Refurbished Lam Research Alliance A6 9600 Plasma Etcher Semiconductor Equipment
SemiStar Corp. provides refurbished Lam Research Lam Alliance A6 9600 plasma etcher and RIE ICP semiconductor equipment for semiconductor fabs, universities, research institutes, MEMS labs, and compound semiconductor processing applications.
The Lam Research Alliance A6 9600 is a production-proven plasma etch platform used for semiconductor dry etch and related plasma process applications. SemiStar offers refurbished systems to OEM specifications, subject to configuration, availability, and final inspection.
Photo shown is for reference only. Actual configuration, options, condition, and appearance may vary depending on system availability and customer requirements.
Availability
SemiStar may have Lam Research Alliance A6 9600 series systems available from stock or incoming inventory. Please contact SemiStar for current availability, configuration, and lead time.
Supported / Available Alliance A6 9600 Models May Include:
- Lam Research Alliance A6 9600
- Lam Research Alliance A6 9600PTX
- Lam Research Alliance A6 9600 DFM
- Lam Research Alliance A6 9600PTX/DFM
System Description
The Lam Research Alliance A6 9600 plasma etcher is a semiconductor plasma processing system designed for repeatable dry etch applications. Depending on chamber configuration, the system may be used for dielectric etching, oxide etching, descum, surface treatment, and related semiconductor plasma process development.
The Alliance A6 9600 platform is commonly used in semiconductor R&D labs, university cleanrooms, MEMS development, compound semiconductor processing, and production support environments.
Typical Configuration Capability
- 150 mm or 200 mm wafer capability depending on system configuration
- PTX and/or DFM chamber configuration depending on availability
- RF generator and matching network
- Vacuum chamber and wafer handling components
- Turbo pump and backing pump configuration depending on system
- Multiple process gas lines with MFCs
- Refurbished to OEM specifications
- Installation and startup support available
- Warranty available depending on final quotation
Applications
- Semiconductor dry etching
- Dielectric etching
- Oxide etching
- Photoresist descum
- Surface treatment and plasma cleaning
- MEMS process development
- Compound semiconductor process support
- University and research institute plasma processing
Facility Requirements
Final facility requirements depend on the actual system configuration and will be confirmed during quotation.
- Facility power according to final system configuration
- Process gases and gas cabinet supplied by customer
- Exhaust connection supplied by customer
- Cooling water and CDA according to final system requirement
- Vacuum pump and support equipment depending on configuration
- Customer is responsible for facility hookup and local compliance
RFQ Information Requested
To help SemiStar confirm the correct Lam Alliance A6 9600 configuration, please provide:
- Required wafer size
- Process application
- Required model or chamber type: 9600, 9600PTX, DFM, or PTX/DFM
- Required process gases
- Current tool model, if replacing or matching an existing system
- Installation location
- Expected purchase timeline
- Any special acceptance requirements
Important Notes
- All systems are subject to prior sale.
- Availability changes frequently based on incoming inventory.
- Final configuration and specifications depend on the actual refurbished system.
- All systems are refurbished to OEM specifications unless otherwise stated in the official quotation.
- All product information on this website is for reference only and not purchase specifications. Please refer to SemiStar official quotation for final specifications and scope of supply.
- All OEM names and trademarks belong to their respective owners. SemiStar Corp. is not affiliated with Lam Research Corporation.