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Tel Chamber Parts

Description

Pls tell us PN, Description ,Quantity, and photos if possible. We will provide quotation accordingly. Appreciate your time. These are only for end users.

Our partner in USA is a leading supplier of second source parts for Etch and CVD wafer-processing machines. The company manufactures high-tolerance parts to meet the needs of the semiconductor industry, and is a major supplier of parts to leading FABs in USA.

System-Model OEM-Part-Number Part-Description OEM
Unity 85 1D10-100854-15 DRM2 BAFFLE PLATE TEL
Unity 85 1D10-101398-11 BAFFLE PLATE TEL
Unity 85 1D10-101475-11. BAFFLE PLATE TEL
Unity 85 1D10-101551-11 BAFFLE PLATE TEL
Unity 85 1D10-102848-13 BAFFLE PLATE Y203 TEL
Unity 85 1D10-200734-14 COVER BELLOW TEL
Unity 85 1D10-202177-12 UPPER ELECTRODE, VESPEL INSERT TEL
Unity 85 1D10-201429-15 UPPER ELECTRODE TEL
Unity 85 1D10-201588-12 UPPER ELECTRODE W/MONITOR TEL
Unity 85 1D10-202204-12 UPPER ELECTRODE, VESPEL INSERT, W/MONITOR TEL
Unity 85 1D10-202988-11 DRM2 COVER BELLOW TEL
Unity 85 1D10-204418-12 BELLOW COVER Y203 TEL
Unity 85 1D10-204419-12 BELLOW COVER Y203 TEL
Unity 85 1D10-204338-13 UPPER ELECTRODE Y203 TEL
Unity 85 1D10-303124-21 DRM2 DEPO SHIELD TEL
Unity 85 1D10-309697-11 DEPO WINDOW TEL
Unity 85 1D10-315183-15 DEPO SHIELD Y203 TEL

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