Semiconductor Equipment Spare Parts

Description

Used Semiconductor Equipment Parts-Packaging and Miscellaneous

Valid: Subject to prior payment/sale without notice. This is only for end users. Appreciate your time!

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.

Matrix

P/N	Description	comment
1000-0003	Matrix Controller
9000-0019	Transport Interface	A5 /1010-0019
1000-0027	Process Controller	1010-0004
9000-0017	Transport Controller	1000-0003

CVD – Canon

p/n	description
5604005	CONTACTOR 50A 240VAC, 3POLE
08-(3/8″)-5M	COIL HOSE(PFA)
10MM AG	MANOMETER
307760	LIQUID LEVEL SENSOR
5454009	VALVE DIAPHRAMGM N.O 1/4 FVCR
5454010	VALVE DIAPHRAGM N.C 1/4 FVCR
PA0-2322-000	PLATE, SLIT
PD0-2072-000	SPRING COIL (E/V)
PD0-2122-000	HEATER INSULATOR RING
PD0-2250-000	SPRING COIL (A/S)
PD0-2350-000	SPRING COIL (T/A)
PD0-2428-000	PLATE SPRING (A/S)
PD0-2456-000	COVER ELEVATOR
PD0-2819-000	BRACKET CYLINDER (E/V)
PDO-2346-000	RING (T/A)
PDO-2349-000	SPRING PRATE (T/A)
PF6-2732-000	TRAP
PF6-2748-000	JACKER,WATER COOLING
PF6-2749-000	JOINT
PH2-0142-000	REVERSE HAND PULSE MOTOR
PH2-0189-000	OCILLATION AC SERVO MOTOR
PH2-0197-000	MOTOR PULSE (T/A)
PH2-2060-000	MAGNETIC SWITCH
PH5-4030-000	DISPLAY UNIT(TCU)
PH5-7035-000	INPUT PCB FOR WTC
PH5-7036-000	OUTPUT PCB FOR WTC
PH5-7057-000	PCB LED MONITOR
PH5-7081-000	PCB ANALOGUE INPUT2
PH5-7082-000	PCB ANALOGUE OUTPUT2
PS1-1071-000	HANDLE
PS2-4151-000	TIMING BELT
PS2-6123-000	SHOCK ABSORBER (A/S)
PS2-6129-000	SPRING (R/H)
PT2-4079-000	MAINFORD
PT2-4080-000	MANIFORD
PT2-4081-000	MANIFORD
PT4-1013-000	VALVE,MAGNETIC
PT4-1020-000	VALVE VACUUM PIROT
PT4-1039-000	VALVE,MAGNETIC
PT4-1041-000	VALVE,MAGNETIC
PT4-1042-000	VALVE,MAGNETIC
PT4-1043-000	VALVE,MAGNETIC
PT5-0042-000	CYLINDER(A/S)
PT5-4012-000	ROTOR HIGH (C/S)
SE-20808-A401	HANDLING ROBOT ARM
SE-20808-B903	OZONE RESTORATION CATALYST
SE-20809-A116	QUARTZ ROD
SE-30808-A507	REVERSHAND FINGER
SPN 1A2025	SSR
TX-851P/5	DAMPER
XA1-3260-602	SCREW (D/H)
XB1-3400-502	SCREW
XB7-1040-082	SCREW CAP
XB7-1050-102	SCREW CAP
XB7-1050-152	SCREW

DNS General
P/N	NAME	APPLICATION
29850	Gauge 160 Lb/S	ARO
0 873 107	Hengstler, 33280 F4 Timer, 24 Vdc
0-06-B4469	Sensor Bracket
0-07-A4680-8	Liner
0-07-A5017-3	Capillary Nozzle
0-07-A5201-4	shaft Pin SDP
0-07-A5463-8	SHC05-031-0
0-17-A4567-4	Chuck, Spin SSC-005 (OD 70 MM )
0-17-A4567-4	SPIN CHUCK, 6″ Coat
0-17-A4698-6	SPIN CHUCK
0-17-A5696-8	SPIN CHUCK
0-17-A5825-8	Conveyor Polley
0-17-A5881-1	Table Pulley
030-4E1	030-4E1	AC100V
0-39-01056	Gear Motor, 100V,0.45A,30W,2000RPM	KDM10-PFF
0-39-03220	050-4E1-01 0~7Kgf/cm2	24VDC 0~0.7 Mpa
0-39-03247	051-E1 050E1-01	24VDC 0~0.7 Mpa
0-39-04632	Magnet switch S-k50 AC 100	Mitsubishi
0-39-05927
0-39-07607	FUBV-115D	FUJIKIN
050E1-01	Air Valve, 24Vdc, 0-0.7 MP, KOGANEI	050E1-01
062-4E1	0-125 psi, 24Vdc, 6.7W	062-4E1
0GK25K	Gear Motor	0GK25K
110-4A2-F11	110-4A2-F11
17A-55860	SHU-4-002
17A-57568
18-013-???	Gauge 0.4 Mpa 4Kg/Cm2	SMC
18-013-???	Gauge 0.2 Mpa 2Kg/Cm2	SMC
18-013-???	Gauge 100KPa 1Kg/Cm2	SMC
18-013-212	Gauge 160Psi	Norgren
200-4E1	200-4E1
2-39-03244	Solenoid Valve, DC24V	050-4EI-21, DC 24V
2-39-03247	Solenoid Air Valve, DC24V	050EI
2-39-03299	QEV-8V	IWAKI CO
2-39-03480	DAN20X10
2-39-04521		MEMORY CASSETTE
2-39-05845	VPW2135SN
2-39-05906	VZ110-5G-M5
2-39-07826	Bearing
2-39-07827	LM61219	OD-12mm,ID-7mm,H-19mm
2-39-07828	LM101929	OD-19mm,ID-11mm,H-29mm
2-39-09450	Drive Belt 2MM
2-39-11740	Belt
2-39-12468	Bearing
2-39-12493	Bearing	OD-8mm, ID-3mm, H-4mm
2-39-12509	0-0.2MPA	SMC, OD-15mm,ID-6mm,H-5mm
2-39-12510	OD/F-18mm, H-5mm	OD-16mm, ID-4mm, SSRF-1640ZZ
2-39-12525	OD/F-15mm, H-5mm	OD-12mm, ID-6mm, SMF126ZZ
2-39-12558	VACUUM SEAL, FAJ2-10-22-7
2-39-20002	YDV-3-1/8-RC-1
2-39-20002	YDV-3-1/8-RC-1
2-39-20009	Nozzle, HYYP-N2	SHG01-022-0 (128)
2-39-20439	float switch
2-39-20928	AWR-1504GLW	SAGNOMIYA
2-39-22225	INA-13-815	pressure regulator
2-39-22373	synchro Belt 180XLO37U
2-39-22591	Fittings, (blank off)
2-39-22655	CERAMIC BALL, 3/32	HEATER
2-39-22657	O-ring G75EP BAND/CLP
2-39-30047	Motor, Gear Head 3GK15K	Motor
2-39-30128	DSR-3151	Floating switch
2-39-30484	Synchro Belt 118-T80-6.4
2-39-3112	F93-44570
2-39-31383	EPDM-10Kgf/cm2	ASAHI
2-39-31726	F96-443081
2-39-32712	Grease, Molibdenum	Code: 2-99-00504 93F3
2-39-33847	Synchro Belt 350-T80-6.4
2-39-35666	Pneumatic Cylinder	CAQ2B82-25DC A80=XB9
2-39-36650	Sensor, Capacity
2-39-37028	synchro Belt 420-3M-6
2-39-38907	OGK25K	Gear Head
2-39-38933	EBR, Tip 0.3 MM, SN23G
2-39-39293	Synchro Belt 312-T80-6.4
2-39-39712	Synchro Belt 340-T80-6.4
2-39-39868	Synchro Belt 295-T80-6.4
2-39-39871	Synchro Belt 97-T80-6.4
2-39-42487-1	PHOTO SENSOR
2-39-42515	Solid State Relay
2-39-43510	Synchro Belt 344-T80-6.4
2-39-44654	Fittings (Pillar) S-U-8B
2-39-44668	Fittings/Reducer 8 -> 6 MM
2-39-44723	Plugs, B03E8
2-39-44724	Plugs, B03D5
2-39-44784	Fittings
2-39-44785	Fittings
2-39-45543	AC SERVO MOTOR (80B)	80B COAT/DEV.
2-39-45543	TS3510N39E10	80B COAT/DEV.
2-39-45641	LINEAR GUIDE	L-35mm, W-10mm
2-39-46288	Synchro Belt 190XLO50U
2-39-47761	Suck Back Unit	AMSZ2-X4US
2-39-48308	Pressure Swith (80B-LPH) 720 Torr	Model: RN S/N PA7041 (used, working cond.)
2-39-50512	Damper Unit
2-39-53647	SI Nozzle	17 RSPO (3.3) 5/00 PTFE
2-39-54074	LG2 Grease	Code: 2-99-00523
2-39-55386	vacuumless IH Arm, 8″	Scrubber index arm
26-8904-2501	498879-01-07, Model 261C, Range:0/2000F
2-99-00523	Grease, NSK LG2	Cleanroom
2-AB-04833	Nozzle, EBR Assy.	0.3 Orifice
2-AC-00958	Spin Chuck, 6 inch SSC4006	OD 60 MM
2-AC-00959	Spin Chuck, 6 inch SSC4007	OD 70 MM
2-AC-00980	Guide Ring SNG4040N2
2-AJ-90216	VACUUMLESS ARM (80B)	HANDLING (x) AXIS FOR 8”
2-AJ-90410	Arm, upper/lower set, 200mm (8″)	S9RA-1001
2-AR-83030	6″ slider arm
2-AR-83033	6″ slider arm
2-F2-33100	4″, UPPER ARM, 100 mm	60A
2-F2-33101	4″, LOWER ARM, 100 mm	60A
2-F2-33104	5″, UPPER ARM, 125 mm	60A
2-F2-33105	5″, LOWER ARM, 125 mm	60A
2-F2-33110	6″, UPPER ARM, 150 mm	60A
2-F2-33111	6″, LOWER ARM, 150 mm	60A
2-F2-33150	3″, UPPER ARM, 76.2 mm	60A
2-F2-33151	3″, LOWER ARM, 76.2 mm	60A
2-F2-33191	SSW/SCW 8” (OD 80MM)	PCTFE (80A, 80B)
2-F2-33332	SDWP 5” – 6”(OD 54MM)	PCTFE (80A,80B)
2-F2-33336	Arm, ower, 150mm (6″)
2-F2-33337	Arm lower 200mm (8″)
2-F2-33338	Arm Lower 200mm (8″)
2-F2-81975	SDWP 5” – 6”(OD 54MM)	PEEK (80A,80B)
2-F2-81976	SPIN CHUCK (OD 70MM)	SSW/SCW 5”- 6″, SDWP 8”, PEEK (80A)
2-F2-81977	SSW/SCW 8” (OD 80MM)	PEEK (80A)
2-F2-D0400	Spin Chuck, PEEK	OD 70 MM
2-F3-31387	Nozzle Pot, Lower
2-F3-31399	IH ARM (90)	STANDARD
2-F3-32084	Coater Spin Chuck	OD 70 MM
2-F3-32084	Spin Chuck, Coater (OD 70MM)	SSW/SCW 6”, PCTFE
2-F3-32678	SPIN CHUCK (OD 60MM)	SSW/SCW 5”, PCTFE
2-F3-33159	SPIN CHUCK (OD 70MM)	SSW/SCW 5”- 6”, SDWP 8”, (80A, 80B)
2-F3-33569	IH ARM (100)	IF-B
2-F3-38335	IH ARM (L=135)	ID-A/B (60A)
2-F3-38335A	IH ARM (L=135)	ID-A/B (60A)
2-F3-38538	IH ARM (L=160), Ceramic	ID-A/B (80A)
2-F3-38538A	IH ARM (L=160), TFE Coated	ID-A/B (80A)
2-F3-38768	IH ARM (115)	OVEN
2-F3-39031	Developer Spin Chuck	OD 50 MM
2-F3-44729	Spin Chuck
2-F3-44729?	Spin Chuck OD 90MM
2-F3-44729?	Spin Chuck OD 70MM
2-F3-44729?	Spin Chuck OD 60MM
2-F3-80766	IF-B SLIDER, CERAMIC
2-F3-81569	8″, UPPER ARM, 200 mm	80A
2-F3-81570	8″, LOWER ARM, 200 mm	80A
2-F3-81571	6″, UPPER ARM, 150 mm	80A
2-F3-81572	6″, LOWER ARM, 150 mm	80A
2-F3-81573	5″, UPPER ARM, 125 mm	80A
2-F3-81574	5″, LOWER ARM, 125 mm	80A
2-F3-82177	6″, SSWR 150mm dia. Wafer (60A)
2-F3-82511	Blacket
2-F3-83170	5″, SSWR 125mm dia. Wafer (60A)
2-F3-83172	4″, SSWR 100mm dia. Wafer (60A)
2-F3-87998	SPIN CHUCK (OD 45MM)	SSW/SCW 3”-4”, SDWP 5”(PEEK)
2-F3-87999	SPIN CHUCK (OD 60MM)	SSW/SCW 5” , PEEK
2-F3-88000	SPIN CHUCK (OD 70MM)	SSW/SCW 6”, PEEK
2-F3-88167	SPIN CHUCK (OD 30MM)	SDWP 3” – 4” WAFER (PEEK)
2-F3-88168	SPIN CHUCK (OD 54MM)	SDWP 6” WAFER, PEEK
2-F3-90665	Arm, upper 200mm (8″)
2-F3-90666	Arm, lower 200mm (8″)
2-F3-90875	Lifter Pins with bellows
2-F3-D0311	TR1 Arm (H/W fingers: 5) 8 inch	SK-200W-AVPE
2-F3-D0312	TR1 Arm, 8 inch	SK-200W-AVPE
2-F3-D0659	TR2 (H/W fingers: 6, tabs: 6) 8 inch	SK-200W-AVPE
2-F4-00240	Spin Chuck
2-F4-39704	Stems
2-F4-39858
2-F4-82408	Wafer Support
2-F4-85088	WAFER GUIDE
2-F4-85088	WAFER GUIDE
2-F4-87453	Nozzle Cover
2-F4-88194	Tabs/Wafer Support, 80B, 8″	SK-200W-AVPE (for TR1 set)
2-F4-88194	WAFER SUPPORT 80B 200MM	Used
2-F4-89523	Spin Chuck
2-F4-89523	Chuck
2-F4-92876	CASSETTE BASE
2-F4-92876	CASSETTE BASE
2-F4-92876	Cassette Guide
2-F4-92877	CASSETTE BASE
2GK25K	Motor, 2GK25K	2GK25K
2GK30KA	Motor, 2GK30KA	2GK30KA
2-GY-44447	Nozzle, 3&4 MM	2-GY-44447
2-J3-30480	SPIN CHUCK (OD 45MM)	SSW/SCW 3”-4”, SDWP 5”(PCTFE)
2-J3-31887	SPIN CHUCK (OD 30MM)	SDWP 3” – 4” WAFER (PCTFE)
2-J4-33959	PR Nozzle
2-J4-34442	Nozzle Pot, Upper
2-J4-36053	Spin Chuck	used
2-JA-35016-S	Cassette Guide Inside	2-JA-35016-S
2RK15RGN-A	Motor, Speed Control	2RK15RGN-A
2RK6GK-A2	2RK6GK-A2	2RK6GK-A2
2RK6GK-A2	2RK6GK-A2
2-VC-00233	B-I/O Brd, SEIO-104B IFC/ECE Controller (S)	484200 PBC (156)
2-VC-00234	Sensor, AMP SEAP-005
2-VC-00260	B-I/O Brd, SEIO-104, Oven Controller (O)	484400 PBC (155)
2-VC-00261	B-Memory Brd, SEMR-104A1, Master Controller (S)	484500 PBC (152)
2-VC-00262	B-Serial Brd, SESI-104A Master Controller (S)	485100 PCB (153)
2-VC-04419	B-CPU Brd, SECU-106AA
3GK15	Gear Head, 2-39-30047	3GK15
3RK15RGN-A	Speed Control motor, Oriental Motor
4012429EC	4012429EC	JAPAN SERVO
44-10522	Relay ECT IDC22-50
484200 PCB (149)	B-I/O, SEIO-104B, Spin Controller (S)	484200 PCB (149)
484300 PCB (27)	BLU1 Amp Brd	484300 PCB (27)
485200 PCB (157)	B-Analog Brd, SEAD-104 Oven Controller (O)	485200 PCB (157)
485-300 PCB (158)	B-Analog Brd, SEAD-204 Oven Controller (S)	485-300 PCB (158)
485400 PCB (154)	B-I/O Brd, SEIO-104A, Master Controller (O)	485400 PCB (154)
486100 PCB (148)	A-Analog Brd, SEAD-0043, Spin Controller (O)	486100 PCB (148)
486200 PCB (147)	A-I/O, SEIO-004, Spin Controller, (O)	486200 PCB (147)
486400 PCB (151)	B-CPU Brd, SECU-104, Unit Controller 105 (S)	486400 PCB (151)
486500 PCB (150)	B-CPU Brd, SECU-104A1 Master Controller 106 (O)	486500 PCB (150)
5-39-003595	FPR-91-12-7	FUJIKIN
5-39-01751	speed controller
5-39-02194	Air Valve SV-7270-131
5-39-03299	QEV-8V, Iwaki	QEV-8V
5-39-50137	FX0-14MT-D, Nitsubish, Transister Unit
55421-1806	TR Unit Arms, ALI-gnment tool 200mm Dia
5-F3-91727
5-F3-91728
5-F4-70253	Nut
6001-22JEM	SKF Bearing
7-39-02424	Pressure Gauge, RKC
7-39-02790	Synchro Belt 110-T80-6.4
7-39-06278	VJ3133Y
7-39-22925	6010-H-ZZ-PS2S
7-39-23474	CRB1BW20-180	CRB1BW20-180
7-39-23600	4F111-06-FLS	1210034
7-39-26355	9UH-13PB	FUJIKIN
7-39-27362	FPM-M	ELSTOMER
7-39-27825	3RK15RGN-A	100V, 15W, 0.5A
7-39-27835	Motor	3RK15RGN-A
7-39-28776
7-39-30083	pcb, ISO Out
7-39-30084	pcb, ISO In 2
7-39-30085	pcb, Console I/F
7-39-30086	pcb, CPU 2
7-39-30089	pcb, Analog I/F
7-39-33167	Breaker NF30-KB	Mitsubishi
7-F3-94215	Blacket
7-F4-04826	Gear	S2-307763-02
8-20719 C 1120 0539E	Panel Meter
A040M-E2-34W	AIR VALVE A040-4E2-34W	KOGANEI
A040M-EI-34W	AIR VALVE A040-4E1-34W	KOGANEI
A-97	Round pcs (2) ~7 inch in diameter	A-97 metal A-98 plastic
AB31-01-1	AB31-01-1	CKD
AMD02-6-4	CKD Valve	AMD02-6-4
AMD11-X5-0	CKD Valve	AMD11-X5-0
AP-?????	CESB-201	S/N ID02011N,MO 09
AP-1031B		S/N 1A0883A, #5
AP-1031C		S/N 1B03005A, #3
AP-1032B	CEDB-0012	S/N 1B04012A, #1
AP-1096B	CEUB-0011	S/N:1A09001A, #1 EEW
AP-1096B	CEEB-002	S/N: 1B05011A, I/F-B
AP-447B	SECU-104
AP-464	DNS 636, Alarm push button Panel Assy
AP-491	SEIO-104
AP-560A	A-CPU Brd, SECU-004 Spin Controller (O)	486300 PCB (146)
CDA50X10-R	Cylinder, Kogenei	CDA50X10-R
CDQ1B20-01-36203RQ	Cylinder, SMC	CDQ1B20-01-36203RQ
CDQ1B20-01-36203RQ	Air Cylinder ‘SLM”	CDQ1B20-01-36203RQ
CDQ1B32-01-36204	Cylinder, SMC	CDQ1B32-01-36204
CDQ1B32-01-36204	CDQ1B32-01-36204	9.9 Kgf/Cm2
CDQ2B20-30DC	Cylinder, SMC	CDQ2B20-30DC
CDQ2B20-30DC	CDQ2B20-30DC
CDRA1BW30-90	Cylinder, SMC	CDRA1BW30-90
CH-35, 9N05	Capacitor, SH Cap M, 250 Vac 3.5 uF, 9N05	CH-35, 9N05
CM44849	CM44849	VARIABLE RESISTOR
CQ2B32-10DC	CQ2B32-10DC-X246-XB9
CQ2B32-10DC-X246-XB9	Cylinder, SMC	CQ2B32-10DC-X246-XB9
CQ2B32-30DC	Cylinder, SMC	CQ2B32-30DC
CQ2B32-30DC	CQ2B32-30DC
CQ2WB32-20	CQ2WB32-20
CRB1BW20-180S	SMC, 7-39-23474
CS3B	DC-30V sensor
CS3B	CS3B
CS5B	CS5B	MAGNETIC CAPACISTANCE SENSOR
D0688-122	Gear Head, Oriental Motor	D0688-122
D0982-122	Gear Head, Oriental Motor, 1:6	D0982-122
D2168-102	Gear Head, Oriental Motor, 2-39-38907	D2168-102
DA15-W	Air Cylinder ‘SLM” DA20X15-W
DA20X25-1-CS3B2	Air Cylinder “SLM” Chuck Position Cylinder	DA20X25-1-CS3B2
DA20X40	Air Cylinder ‘SLM” DA20X40
DA25X90-W	DA25X90-W
DAS20X15-W	Clinder, Koganei, w/ GS5B sensor	DAS20X15-W
DP-48C	RKS
EEMP-0212	Remote Control Panel (80B), S/N: IEJ1009A	EEMP-0212
EE-SM3	OMRON	EE-SM3
EE-SM3		OMRON
EE-SM3B	OMRON	EE-SM3B
EE-SM3B	EE-SM3B	OMRON
EE-SX330	OmRON, G27
EE-SX673	OMRON	EE-SX673
ELD4V-OY	ELD4V-OY	SAM
F86-44518
F95-45071	F95-45071
F96-428692
FAJ2-10-22-7	VACUUM SEAL, FAJ2-10-22-7	FAJ2-10-22-7
FM014-96
FPR-UDDF-71-6	FPR-UDDF-71-6	FUJIKIN
FSU-210	DC3-30V 0.1-80mA	LEVEL SENSOR
GL-514A	GL-514A	SHARP
H3M	OMRON Timer series B
H7C-Y4DLN	Counter 9999, 120Vac	H7C-Y4DLN
HT-DS	JAT Air Valve, 4452-PT 3/8	HT-DS
INA-13-746	INA-13-746
INA-13-757	INA-13-757	INA-13-757
INA-13-757	INA-13-757
INA-13-796	INA-13-796
INA-13-810	INA-13-810	INA-13-810
J2214	2.0STD 1/4 NPT 0130 HGX 60PSI	Marsh Instrument Company
J2214	2.0 STD 1/4 NPT 0130 “HGX 60PSI	Marsh Instrument Company
JDAS20X40-B-699W	JDAS20X40-B-699W
K-12	Gauge 160 Psi	SMC
M-150	Conduit Assy, M-150, 6 inch	M-150
MOD PDAS	MOD PDAS, 10×15 Koganei Pen Cylinder
MPGL20CB3	Millipack 200 Stacked Disc Filter 0.22um Pore Size	MPGL20CB3
NSK LG2	Grease, NSK LG2	NSK LG2
NVJ114-5G	NVJ114-5G
NVJ7140	20-100PSI	SOLENOID VALVE
NVZ110	NVZ110
NVZ110-5G-M5	Solenoid, 24 Vdc	NVZ110-5G-M5
PBDAS16/190-A	PBDAS16/190-A
PDS-1520	Iwaki Controller
PDT-5C1	Pueum Clean valve, Takasago	PDT-5C1
PDT-5C1	Pneum clean valve	Takasago Electric Used
PH266-01	PH266-01	DC6V,1.2A,1.8/STEP 2PHASE
PK243B1A-SG7.2	Vexta	PK243B1A-SG7.2
PT-1DB	Pirani Gauge Display, Diavac Ltd.
PWB-820702-0	Extention Board
RS520L-D	RS520L-D	SUNX
SHC03-017-0	Servo Motor, Type: TS35ION10E61	Connector Included. Rated 200 W, 8000 RPMs
SR-4000	SR-4000
SV2100D-53T-FT-1/4T	SV2100D-53T-FT-1/4T	HARUNA
SV21CD-53T-FT1/4T	Haruna, 24Vdc	SV21CD-53T-FT1/4T
SXC21CD-53T-FT-1/4T	SV21CD-53T-FT-1/4T	HARUNA
TS3510N10E61	BL Servomotor	TS3510N10E61
TS678N8E63	Motor, developer, 636, 31.3V, 4000 rpm, used	TS678N8E63
VJ3343Y	VJ3343Y
VPW2145	VPW2145
VX3134-X1	VX3134-X1	VX3134-X1
VX3134-X1	VX3134-X1
VZ110-5G-M5	VZ110-5G-M5
VZ1120	VZ1120
VZ3120-5L-M5	VZ3120-5L-M5	VZ3120-5L-M5
VZ3120-5L-M5	VZ3120-5L-M5
VZ3220-5LZ-M5	VZ3220-5LZ-M5	VZ3220-5LZ-M5
VZ3220-5LZ-M5	VZ3220-5LZ-M5
VZ5140	VALVE FOR AIR (NO OIL), SMC	VZ5140
VZ5140	VZ5140
VZA2220-M5-X1	VALVE FOR AIR (NO OIL), SMC	VZA2220-M5-X1
VZA2220-M5-X2	VALVE FOR AIR (NO OIL), SMC	VZA2220-M5-X2
YDV-2-1/8-RC-1	YDV-2-1/8-RC-1
	SPIN CHUCK (OD 80MM)	SSW/SCW 8”, PEEK
	Bottom Cup Assy
	Cup Assy. (3 pcs) 2 sets 5 inch
	INA-13-757	pressure regulator
	SPIN CHUCK (OD 80MM)
	A-Analog Brd, SEAD-0043, Spin Controller (O)	4861000 PCB (148)
	A-CPU Brd. SECU-004 Spin Controller (O)	AP-560A 486300 PCB (146)
	A-I/O, SEIO-004, Spin Controller (O)	486200 PCB (147)
	B-Analog Brd, SEAD-104 Oven Controller (O)	485200 PCB (157)
	B-Analog Brd, SEAD-204 Oven Controller (S)	485300 PCB (158)
	B-CPU Brd, SECU-104, Unit Controller 105 (S)	486400 PCB (151)
	B-CPU Brd, SECU-104A, 1 Master Controller 106 (O)	486500 PCB (150)
	B-I/O Brd, SEIO-104A, Master Controller (O)	485400 PCB (154)
	B-I/O, SEIO 104B, Spin Controller (S)	484200 PCB (149)
	BLU1 Amp Brd	484300 PCB (27)
	Buffer Cassette	6 in
	Capacitor, SH Cap M	250 Vac. 3.5 uF v CH-35 9N05
	Cup Assy, Bottom
	Cup Assy, Top
	Motor, 2GK25K
	Motor, 2GK30KA
	Nozzles, three 3 MM and two 4 MM	Total (2-GY-44447)
	Remote Control Panel (80B) with R/C & AC cables	File # EEMP-0212, S/N IEJ1009A
	Round piece ~ 7 inches in diameter	A-97 metal
	Round piece ~ 7 inches in diameter	A-98 plastic
	Spin Chuck	OD 70 MM
	Spin Chuck	OD 60 MM used (very good condition)
	Spin Chuck SSC-005	OD 70 MM 0-17-A4567-4
	Spin Chuck	SSC-006