Description
Please contact us for the availability of the used APPLIED MATERIALS CENTURA AP ENABLER E5 OXIDE ETCH FEOL-E5 AMAT semiconductor process Equipment.
APPLIED MATERIALS 300MM CENTURA AP ENABLER E5 OXIDE ETCH (FEOL-E5) AMAT
Unit’s Specifics
Make: Applied Materials (AMAT)
Model: Centura AP Enabler FEOL-E5
Factory Interface (FI):
– Gas Box (DeviceNet MFCs, Top Exhaust)
– ATM Robot
– Status Lamp
– Load Ports: 3
– Side Storage Buffer (SSB) Ports: 1
Centura AP Mainframe (M/F):
– Transfer Module: VTM Robot & SWLL
Load Locks:
– LLA: AP SWLL
– LLB: AP SWLL
Dielectric E5 Etching Chamber – Etching Chambers with E-cart (Ch-A/Ch-B/Ch-C/Ch-D)
– RF Match Type: Daihen
– RF Power Supply: Advanced Energy Ovation
– Gate Valve: Nor-Cal
– Turbo Pump: Shimadzu TMP
– RF and Power Cables
Heat Exchangers/ Chillers (6 units)
– Make: Advanced Thermal Sciences (ATS/ ATSC)
– Part No.: 4084670-001
– Model: NX-20A-GL
– Chiller Hoses
AC Power Controller Rack
– MFG Date: Dec 2009
– 208VAC
AC Dual Bias Generator Rack
– ENI Spectrum 11002 (0190-29586): 4 units
– ENI GHW-50A/ GHW50A-13DF3H0-005 (0190-15319): 4 units
Pump
– SWLL/Txfr: Adixen/ Alcatel A100L Applied Materials iPUP
User Interface(s) (UI):
– Flat Panel Monitor with keyboard on stand
The items are subject to prior sale without notice. These items are only for end users.
SS5684
