Tegal 901e Plasma Etcher

Tegal 901e Plasma Etcher

Tegal 901e Plasma Etcher
Was fully operational when facility closed
ENI ACG-10 RF Power Supply
Includes: ENI ACG-10T 1000w 13.56 RF Generator S/N: 390 200-240v/ 1-Ph/ 60Hz
Omega RD-46 Plotter
Digital VT 420 Monitor and Keyboard