Description
Upgrade March PX-250 March PX-500 March PX-1000:
Glow Research upgrades older plasma system like the March PX-1000, PX-250 and PX-500 by replacing the old software control system with our Genesis Software Control System which has been using on the AutoGlow 1000. This gives new life to your older system and allows us to properly support these systems well into the future. Our Customers appreciate the upgrades that we make—like adding a throttle valve that allows for independent control of the process gas flow independent from chamber pressure.
Glow Research provides an upgrade for older Nordson March systems. Glow Research has taken over the support for the March PM-600 and other plasma systems from Nordson March. We provide the software/control/touchscreen for several older March systems (PM-600 and PX-250, PX-500, PX-1000). Glow Research offers a 12 month warranty on our rebuilt PX-1000, PX-500, PX-250 and PM-600 systems with our touch screen control–this upgrade replaces all the boards and components that are no longer supported by Nordson March.
Parts and other Service
Glow Research provides the parts and equipment necessary to maintain our plasma systems, and other plasma cleaning systems that are no longer supported by their manufacturer. We have upgraded several Nordson March PX-1000, PX-500, PX-250 and PM-600 systems. We supply March Plasmod and March PM-600 quartz chambers.
March PX-250, PX-500 and PX-1000 parts. Electrode shelves are available for the PX-500 and the PX-1000 plasma systems. Also available are the perforated electrode shelves and the solid floating shelves needed for downstream plasma processing. Silicon chamber door gaskets are also available for these systems.
- PX-1000 electrode shelves
- PX-500 powered electrode shelf
- PX-1000 powered electrode shelf
- March PX-250, PX-500 and PX-1000 chamber door gaskets
Swagelok Valve for Two Gas Inputs. Connects to the back of a Glow Research Plasma System. Allows the user to run one gas, two gases or a combination of both gases. The flow is regulated into the chamber by the rotameter on the front of the Glow Research Plasma System.
Manually Adjusted Vacuum Pump Valve Use to lower the amount of vacuum pull on the plasma chamber. When properly adjusted this manual valve will lower the amount of turbulence inside the plasma chamber as the plasma system’s vacuum valve opens (at the start of the chamber pump down).
Quartz and Aluminum Wafer Boats
Quartz and aluminum wafer boats for 4″ wafers. The aluminum wafer carrier holds a quantity of 20 4″ (100 mm) wafers. We can supply smaller or larger aluminum wafer boats as well.
We supply a low profile quartz wafer boats for 4″ (100 mm) wafers. Has 25 slots.
The low profile quartz aluminum wafer boat is used in our Quartz Chamber AutoGlow plasma system. We recommend our larger chamber AutoGlow if you plan to use a quartz boat.
Note:
- We can supply larger or smaller size as requested
- Aluminum wafer boats come with a carrier handle
- Lead time is 5-6 weeks
- Please confirm the thickness of your wafers so we can make the slot size to fit your requirements
- Wafer carriers can be used in our rebuilt March PX-1000 systems
- This wafer carrier can be used in our rebuilt March PX-500 and March PX-250 systems
The trademarks of the equipment and parts contained in this page belong to the Original Equipment Manufacturers. The info on the equipment is subject to change without notice. This is not purchase specifications.
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