Description
Tegal and Main Equipment Introduction in PDF
Upgrade Kits for Tegal 901e Tegal 903e Plasma Etch Plasma Etcher Dry Etch
- PC controller
- New PCBs
- Repair or replace bad parts if necessary at extra cost.
- Integrated solid robotic wafer transfer is optional at extra cost.
- Air cooling RF Generator is optional at extra cost.
- Installation is available at extra cost depending on the location of the equipment.
- Other replacement parts are available at extra costs.
- Lead time: 8-20 weeks depending on PO time. We will do our best to expedite your PO if necessary without extra charge.
- Please contact us for final purchase RFQ with an official quotation accordingly.
- Please contact us if you have any questions.
- Low cost solution of obsolete components and parts.
- New modules for obsolete modules in the original used equipment if applicable, such as RF Generator, Integrated solid robotic wafer transfer, PCBs.
- Requirement of stability of the system
- Requirement of network function (GEM/SECSII).
- Requirement of PC control for data storage.
- Requirement of GUI.
- Requirement of more precise control.
- Requirement of better repeatability, uniformity.
- Requirement of easier maintenance, calibration, and trouble shooting.
We also provide the following parts for Tegal 901e, Tegal 903e, Tegal 915, Tegal 900, Tegal 965 plasma asher, plasma etcher equipment for end users. Please contact us for the availability, price and lead time.
- 31-319-001 chuck sensor assy
- 80-080-072 Cylinder
ID-220
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