Description
Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR
Equipment info for your reference.
TYTAN Nano series furnaces have been developed for nano materials production and/or processing. They can be for lab-scale research, semi-production, or mass production of nano materials depending on the model and configurations.
A variety of nano materials have been produced by Tystar customers. Carbon Nano Tubes (CNTs) can be produced either in Single Walled CNT (SWCNT) or Multi Walled CNT MWCNT) form. Graphenes can be deposited on a wafer to a single layer or to a multilayer thickness. Nano wires may be grown of a variety of different materials. Tystar Nano series furnaces are useful tools for the production of:
- Vertically Aligned CNT or VACNT of up to a few mm
- Horizontally Aligned CNT (HACNT)
- Entangled (or cotton-like) CNT
- Vertically Aligned Nanowires
- Horizontally Aligned Nanowires
- Randomly Oriented Nanowires
- Graphenes
- Graphene Oxide (GO)
- Other nano materials
Main Models and info
| Furnace Model | 120 | 160 |
| Wafer Size | 2″ / 50.80 mm | 6″ / 152.4 mm |
| Tubes (Up to) | 1 Tube | 1 Tube |
| Flat Zone | 12″ / 304.8 mm | 12″ / 304.8 mm |
| Heat Zones | 3 | 3 |
| Maximum Power | 16 KVA | 18 KVA |
Tystar is a leading manufacturer of horizontal Low Pressure Chemical Vapor Deposition (LPCVD) diffusion furnaces and specialized Chemical Vapor Deposition (CVD) systems for the semiconductor industry. Our process tools have served research, engineering, and production of integrated circuits, MEMS, optoelectric devices, and other semiconductor materials for over 50 years.
The trademarks of the equipment and parts contained on this page belong to the Original Equipment Manufacturers.
Please specify your substrate material, size, processes temperatures and gases, your voltage (208,240,380,480 VAC), AC Frequency(50Hz,60Hz), with or without Laminar Flow Station (Laminar flow creates a class 10 clean room environment), with or without Plasma Cleaner, Ultra High Vacuum Tubes (Pressures lower than 10-8 Torr) in the message form below for an official quotation.
