SVG THERMCO 5200 FURNACE

Description

Please contact us for the availability of the SVG THERMCO 5200 FURNACE used semiconductor equipment. 2 stacks, 4 tubes, wet oxidation. Very clean, complete set, de-installed from a running fab by a qualified OEM field service engineer, minimal activity requires to make it back online. Currently, it’s stored in an env. controlled warehouse.

The items are subject to prior sale without notice. These items are only for end users.

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.

Location: Silicon Valley, CA USA.

Info on the SVG THERMCO 5200 FURNACE from the owner for your reference. We sell it at AS IS WHERE IS condition. Please contact us if you need photos.

System Info: General
Item	Description	Comment
Manufacturer	THERMCO
Model	5200 Diffusion Furnace
System Voltage	480 VAC, 3PH, 60Hz, 200A, 166KW	460 VAC available
Version	150 mm
Controller	10K
Color	Midnight Blue
No. of tubes / Stack	4 Tubes
Condition	Good
Vintage	1996
Sale condition	As is where is
Current location	California, Milpitas
Applies for both stack “C” and “H”
System Info: Dimension
Item	Description	Comment
Furnace	95” (L) x 31” (W) x 95” (H)	• 97” (L) included 13” scavenger box • Not included water-cooled heat exchanger
Load station	140” (L) x 37” (W) x 95” (H)	• 140”(L) included 48” removable material staging station
Source (Gas) cabinet	56” (L) x 36” (W) x 95” (H)	• 95” height not included gas manifold box • Gas manifold height: 10”
Computer cabinet	26” (L) x 28” (W) x 90” (H)
Applies for both stack “C” and “H”
System Info: Individual Tube Info – Stack “C”
Load Station
Item	Description	Comment
Configuration	Left hand
Boat Loader	Tube 1: D-2 (Cantilever) Tube 2: D-2 (Cantilever) Tube 3: D-2 (Cantilever) Tube 4: D-2 (Cantilever)	Able to use 2” sq. SiC Paddle
Single steps	Exist
Furnace
Item	Description	Comment
Heating Element	MRL AZTEC Herix chambers	Longer lifetime compare with STD HC-58
Furnace Doors	3 Door sliding
Thermocouples	Type “B”
Profile T/Cs	Not included
Vestibule Blocks	Exist
Dustop Collars	Exist
Heatblock Disk	Exist
Vestibule Plugs	Exist
System Info: Individual Tube Info – Stack “H”
Load Station
Item	Description	Comment
Configuration	Right hand
Boat Loader	Tube 1: D-2 (Cantilever) Tube 2: D-2 (Cantilever) Tube 3: D-2 (Cantilever) Tube 4: Atmoscan (AMTECH)	Able to use 2” sq. SiC Paddle for D-2 Boat loaders
Single steps	Exist
Furnace
Item	Description	Comment
Heating Element	MRL AZTEC Herix chambers	Longer lifetime compare with STD HC-58
Water-Cooled Heat Exchanger	Yes
Furnace Doors	3 Door sliding
Thermocouples	Type “B”
Profile T/Cs	Not included
Vestibule Blocks	Exist
Dustop Collars	Exist
Heatblock Disk	Exist
Vestibule Plugs	Exist

Source (Gas) Cabinet. ATCS are not available.
Stack #:C
Type:Wet oxidation/Pyro
	Tube#1		Tube #2		Tube #3		Tube #4
	Size	MFC Model	Size	MFC Model	Size	MFC Model	Size
H2	20 SLM	UFC-2020	20 SLM	UFC-1661	20 SLM	UFC-2020	20 SLM
O2-High	20 SLM	UFC-2020	20 SLM	UFC-2020	20 SLM	UFC-2020	20 SLM
O2-Low	500 SCCM	UFC-1100	500 SCCM	UFC-1661	500 SCCM	UFC-1100	500 SCCM
N2-High	20 SLM	UFC-1661	20 SLM	UFC-2020	20 SLM	UFC-2020	20 SLM
N2-Low	500 sccm	UFC-1661	500 SCCM	UFC-1661	500 SCCM	UFC-1661	500 SCCM
Ar	20 SLM	UFC-2020
Stack #: H
Type:Wet oxidation/Pyro
	Size	MFC Model	Size	MFC Model	Size	MFC Model	Size
H2-High	20 SLM	UFC-2020	20 SLM	UFC-2020	20 SLM	UFC-2020	20 SLM
H2-Low							500 SCCM
O2-High	20 SLM	UFC-2020	20 SLM	UFC-2000	20 SLM	UFC-300M	20 SLM
O2-Low	500 SCCM	UFC-1100	500 SCCM	UFC-1651	500 SCCM	UFC-1100	500 SCCM
N2-High	20 SLM	UFC-2000	20 SLM	UFC-2000	20 SLM	UFC-2020	30 SLM
N2-Low	500 sccm	UFC-1661	500 SCCM	UFC-1651	500 SCCM	UFC-1661	500 SCCM