STS Multiplex RIE PECVD ICP DRIE HRM Bosch Process equipment Spare Parts

Description

STS Multiplex RIE PECVD ICP DRIE HRM Bosch Process equipment Spare Parts in stock:

No	Description	Condition
1	TCP380 Turbo Controller	(USED)
2	Mag drive 2000 Turbo Controller	(USED)
3	Burst Fire Module BM1	(NEW)
4	Mag Phase Unit (High Frequency)	(USED)
5	Mag Phase Unit. (Low Frequency)	(USED)
6	Cal 3200 Temperature Controller	(NEW)
7	Brooks VTR5 Vacuum Robot	(USED)
8	Brooks VTR5 Vacuum Robot Handset	(USED)
9	DCD 23 DI water controllers	(NEW)
10	DCD 53 DI Water Controller	(NEW)
11	PM7 VAT Valve Controller	(USED)
12	600 Series MKS valve Controller	(USED)
13	Mag 900 Turbos	(REFURBISHED)
14	VAC1/HVC1 Control Module	(REFURBISHED)
15	VAC3/HVC1 Control Module	(REFURBISHED)
16	VAC 1 Control Module	(REFURBISHED)
17	VAC 3Y Control Module	(REFURBISHED)
18	PFC 1A Control Module	(REFURBISHED)
19	PFC 1X Control Module	(REFURBISHED)
20	PFC 1Y Control Module	(REFURBISHED)
21	AMC1 Auto Matching Modules	(REFURBISHED)
22	AMC2 Auto Matching Modules	(REFURBISHED)
23	TMC1 Temperature Control Module	(REFURBISHED)
24	HBC1 Helium Backside Module	(REFURBISHED)
25	HBC2 Helium Backside Module	(REFURBISHED)
26	EPD1 End Point Module	(REFURBISHED)
27	HCU5 Heater Module	(REFURBISHED)
28	HCU9 Heater Control Module	(REFURBISHED)
29	TZC1 Control Module Module	(REFURBISHED)
30	TLZ1 Control Module	(REFURBISHED)
31	Interlock Display Module	(NEW)
32	LLH1 Module	(REFURBISHED)
33	TPH520 Turbo Pump	(NEW)
34	TMH261P Turbo Pump	(USED)