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Model STS Multiplex DRIE Tool (Bosch Process)

Category:  Etch RIE ICP

Original Equipment Manufacturer: Surface Tech Sys ( STS, SPTS )

Condition: Used, Complete, working condition. We sell it at  Complete,working , fully tested .

Valid Time: Subject to prior sale

Lead Time 10 to 24 weeks for the Complete,working and fully tested condition.

Location:  Nanjing, Jiangsu,China

Warranty: 3 months for the Complete,working and fully tested condition.

Installation and training: Available at extra charge for the complete,working and fully tested condition

Surface Tech Sys (STS)  STS Multiplex DRIE Tool (Bosch Process) Description:

Loaklock, single wafer process, manual  load/unload.

Typical Application: ICP,DRIE

Vintage: 2000

Gases: N2, CH4, H2, O2, Ar, SF6, CL2, N2, SiCl4, N2

Chuck: ESC type

Wafer Size: 4 inch . Capable upgrade for up to 6 inch or 8 inch

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