Main Maker

SPTS / STS Versalis FxP

Category: Tags: ,

Description

SPTS / STS Versalis FxP :

  • Wafer Size: 8″
  •  3 Chambers: PECVD, ICP etch, Rapier DSE
  • Delta PECVD deposition chamber: Currently used for a-Si and Oxide deposition
  • ICP etch chamber with interferometric and end point system
  • Rapier deep silicon chamber

Condition: Used. We sell it at AS IS .

Valid : It is only for end users and is subject to prior sale without notice. Appreciate your time!

Info on the system from the owner for your reference.

Please contact us for more information on the product:

Your Name*:

Your Email:

Your Message:

Captchac Codecaptcha

Submit:

OEM-Cluster-2

You may also like…

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers