Description
Semiconductor Equipment Spare Parts Repair
Valid: Subject to change without notice. This is only for end users. Appreciate your time!
| Maker | Equipment name | Model NO. |
| MKS | RPS | ASTRON 2L |
| MKS | RPS | ASTRONi |
| MKS | RPS | ASTRON 2L |
| MKS | RPS | ASTRON 3L |
| MKS | RPS | ASTRON 3L |
| MKS | RPS | ASTRON |
| MKS | RPS | ASTRONi |
| MKS | RPS | ASTRON 2L |
| ASTEX | RPS | ASTRON-TM2L |
| ASTEX | RPS | |
| ASTEX | Magnetron head | |
| ASTEX | Power Supply | AX-2115 |
| ASTEX | Magnetron head | FI20163-1 |
| ASTEX | Smart Match | FI20045 |
| ASTEX | Magnetron head | |
| AE | RPS | 3151801-004A |
| AE | Remote plasma source | |
| AE | Remote plasma source | X-STREAM |
| MKS | Astex Microwave 3.5Magnetron Head ETO Ultim | D13449 |
| DAIHEN | RF Generator | SGP-10B |
| DAIHEN | RF Generator | ATP-30B |
| DAIHEN | MW Magnetron Head | ATM-10A/B |
| DAIHEN | MW Magnetron Head | ATM-15C |
| MKS | Astex ECOPS OZONEPower Supply(6KW) | |
| CAE | Blackstone UltrasonicGenerator | N1001-XHSB1-120-600/14 |
| CAE | Blackstone Ultrasonic Transducer | |
| TRAZER | Match-Fixed match | SRN-Type |
| AE | Generator | RFG3000 |
| AE | Generator | RFG-3001 |
| AE | Generator | RFG-2K2V |
| AE | Match – Fixed Match | 3155094 |
| ADTEC | RF Match | AM-1000S-ASM |
| ADTEC | Generator | AX-1000II/III |
| ADTEC | Generator | AX-1000LFII |
| AMAT | Match – P4 Match (Phase4) | |
| AMAT | RF Match – HE Match | |
| COMDEL | Generator | CPS-1001S |
| ENI | Generator | OEM-28B |
| ENI | Generator | OEM-2000 |
| ENI | Generator | OEM-25B |
| ENI | Generator | OEM-6 |
| ENI | Generator | OEM-12A |
| ENI | Generator | OEM-12B |
| ENI | Generator | GMW-25 |
| AE | Generator | RF-10S |
| TRAZER | Match-Auto MatchBox | AMU-10D-1/2 -Type |
| TRAZER | Match-Auto MatchBox | AMU-10E -Type |
| AE | Generator | RF3000 |
| AE | Generator | RF3001 |
| ENI | Generator | ACG-10-04 |
| ENI | Generator | ACG-10-11051-51 |
| ENI | Generator | ACG-10B-01 |
| ENI | Generator | ACG-10B-01M6 |
| ENI | Generator | ACG-3B-01M5 |
| ENI | Generator | ACG-3B-06 |
| ENI | Generator | ACG-5-01M14 |
| ENI | Generator | ACG-6B-02 |
| MKS | Generator | B-5002-02 |
| ENI | Generator | DC22D-A001100011L |
| ENI | Generator | DC22M-A041300111AL |
| ENI | Generator | DC22M-Z041300111A |
| ENI | Generator | DC22S-A0220000101AL |
| ENI | Generator | DC22S-Z022000011A |
| ENI | Generator | DC24M-A041300110AL |
| ENI | Generator | DC24M-Z041300111A |
| ENI | Generator | DCG1M-A00100021L |
| ENI | Generator | DCG1M-A001100021L |
| ENI | Generator | DCG1R-A021200021I |
| ENI | Generator | DCG-200E-00 |
| ENI | Generator | DCG2D-A031100021I |
| ENI | Generator | DCG2M-A001200020C |
| ENI | Generator | DCG-200 |
| ENI | Generator | DCG-400Z-00 |
| ENI | Generator | DCG-400ZH-0J |
| ENI | Generator | DCG-600E-00 |
| ENI | Generator | DCG-600Z-00 |
| ENI | Generator | DCG6M-A112000010P |
| MKS | Generator | DOFB2C-075 Dual Match |
| MKS | Generator | SPECTRUM 11002-00 (TOP/SIDE) |
| MKS | Generator | SPECTRUM 10513-00 (BIAS) |
| ENI | Generator | DPGD-10-CE |
| MKS | Generator | Dual Match 27 MHZ |
| ENI | Generator | GEW3040MA-F2H0-001 |
| ENI | Generator | GHW12Z-13DF2N0-001 |
| ENI | Generator | GHW12Z-13DF2NH-002 |
| ENI | Generator | GHW25A-13DF3N0-001 |
| ENI | Generator | GHW50-13DF3H0-003 |
| ENI | Generator | GHW50A-13DF3H0-000 |
| ENI | Generator | GHW50A-13DF3H0-001 |
| ENI | Generator | GHW50A-13DF3H0-003 |
| ENI | Generator | GHW50A-13DF3H0-004 |
| ENI | Generator | GHW50Z-13DF3H0-000 |
| ENI | Generator | GHW55A-13DF4L0-001 |
| ENI | Generator | GHW80A-13DF2L0-001 |
| ENI | Generator | GMW25A-2D0F2N0-001 |
| ENI | Generator | GMW25A-2D0F3N0-003 |
| ENI | Generator | GMW25A-2D0F3N0-004 |
| ENI | Generator | GMW25A-2D0F3N0-005 |
| ENI | Generator | GW2502MA-F1N000-A1 |
| ENI | Generator | GW2502MA-F1N132-A1 |
| ENI | Generator | LPG12A-21051-50 |
| ENI | Generator | LPG12A-21051-51 |
| ENI | Generator | LPG12AL |
| ENI | Generator | LPG12ALX-21051-50 |
| ENI | Generator | LPG15ALX-21051-50 |
| ENI | Generator | LPG-6A-21051 |
| ENI | Matching Box | MW-10-21191 |
| ENI | Matching Box | MW-10D |
| ENI | Matching Box | MW-10LD |
| ENI | Matching Box | MW2-30-02 |
| ENI | Matching Box | MW2-30D-01 |
| ENI | Matching Box | MW-25D |
| ENI | Matching Box | MW2-60-04 |
| ENI | Matching Box | MWD-25LD-02 |
| ENI | Matching Box | MWD-25LD-04 |
| ENI | Matching Box | MWD-25LD-06 |
| ENI | Matching Box | MWD-55LD-01 |
| ENI | Matching Box | MWH-100-01 |
| ENI | Matching Box | MWH-5-01M10 |
| ENI | Matching Box | MWH-5-01M2 |
| ENI | Matching Box | MWH-5-01M3 |
| ENI | Matching Box | MWH-5-01M9 |
| ENI | Matching Box | MWH-5-02 |
| ENI | Generator | NOVA-25A-01 |
| ENI | Generator | NOVA-50-02 |
| ENI | Generator | NOVA-50A-04 |
| ENI | Generator | OB1-02 |
| ENI | Generator | OB1-R03 |
| MKS | Generator | OB2 27MHZ (DOFBC2-083) |
| MKS | Generator | OB2 27MHZ (DOFBC2-083) |
| MKS | Generator | OB2 27MHZ (DOFBC2-083) |
| MKS | Generator | OB2 2MHZ (DOFBC2-084) |
| MKS | Generator | OB2 Dual Match |
| ENI | Generator | OEM-10B-01 |
| ENI | Generator | OEM-12 |
| ENI | Generator | OEM-12-11491 |
| ENI | Generator | OEM-12-21041-51 |
| ENI | Generator | OEM-12A-21041-51 |
| ENI | Generator | OEM12A-AM |
| ENI | Generator | OEM-12AB3-01 |
| ENI | Generator | OEM-12AB3-21041 |
| ENI | Generator | OEM-12AL-01 |
| ENI | Generator | OEM-12AL-21311 |
| ENI | Generator | OEM-12B-01 |
| ENI | Generator | OEM-12B-02 |
| ENI | Generator | OEM-12B-02M5 |
| ENI | Generator | OEM-12B-03 |
| ENI | Generator | OEM-12B-06 |
| ENI | Generator | OEM-12B-07 |
| ENI | Generator | OEM-12B-07M2 |
| ENI | Generator | OEM-12B3-02 |
| ENI | Generator | OEM-12J |
| ENI | Generator | OEM-2000-01 |
| ENI | Generator | OEM-2000-01M1 |
| ENI | Generator | OEM-25 |
| ENI | Generator | OEM-25A-21091-51 |
| ENI | Generator | OEM-25B-01 |
| ENI | Generator | OEM-28B-02 |
| ENI | Generator | OEM-28B-04 |
| ENI | Generator | OEM-50N-01 |
| ENI | Generator | OEM-50N-11601 |
| ENI | Generator | OEM-6A-02 |
| ENI | Generator | OEM-6AM-1 |
| ENI | Generator | OEM-6AM1B |
| ENI | Generator | OEM-6AM-1B-21251 |
| ENI | Generator | OEM-6L |
| ENI | Generator | OPT-100AD-05MC |
| ENI | Generator | PL2HF |
| ENI | Generator | PL-2HF-11451-53 |
| ENI | Generator | PL-2HF-11451-54 |
| ENI | Generator | PL-2HFN-01 |
| ENI | Generator | Quanta-10D-01 |
| ENI | Generator | RFC-5MW |
| ENI | Generator | RFC-6-02 |
| ENI | Generator | RPG-100 |
| ENI | Generator | RPG-100A-05 |
| AMAT | Throttle Valve | |
| MKS | Exhaust Throttle Valve | |
| AMAT | HDP Turbo Valve | |
| TYLAN | Millipore Valve | |
| AMAT | Slit Valve | |
| SMC | L-motion Valve | |
| VAT / MKS | Gate Valve | |
| Isolation Vacuum Valve | ||
| VAT / MKS | Butterfly Valve | |
| Vacuum Isolation Valve | ||
| Cylinder/Slit Valve | ||
| Vacuum Gate Valve | ||
| SMC | High Vacuum Valve | |
| AMAT | Slit Valve | |
| AMAT | Slit Valve | |
| AMAT | CTI Cryo Pump | |
| BROOKS | AcuTran7 Robot | |
| BROOKS | ATR8 Robot | 017-0483-01 |
| BROOKS | ATR8 Robot | 100260 |
| BROOKS | MTR5 Robot | 22-10215-00 |
| BROOKS | MTR5 Robot | 001-7600-07 |
| BROOKS | MTR5 Robot | 001-7600-10 |
| BROOKS | MAG7 Robot | 003-1600-25 |
| BROOKS | AQR7 Robot | |
| PRI | Equipe Robot | ATM405-1-S |
| AMAT | P5000 Robot8″ | |
| PRI | Robot | ABM405-1-S-CE-S293 |
| BROOKS | AQR7 Robot | |
| RORZE | Robot | RR701L90-Z20-616 |
| BROOKS | MAG7 Robot | |
| PRI | Robot | ABM407-1-S |
| PRI | Robot | ABM405-1-S-CE |
| PRI | Robot | ABM405-1-S-CE-S293 |
| BROOKS | Controller | |
| PRI | Controller | ESC200 OTF Rev.4 |
| BROOKS | Controller | |
| PRI | Controller | ESC-201B |
| BROOKS | Controller | |
| PRI | Controller | ESC200 |
| PRI | Controller | ESC-212B-S293 |
| AMAT | Controller | |
| BROOKS | Controller | |
| AMAT | Degas Controller | 0010-20331 |
| BROOKS | Aligner/Controller | |
| PRI | Aligner/Controller | |
| PRI | Aligner/Controller | PRE-200B-CE/PRE5648 |
| PRI | Aligner | PRE-300B-CE |
| BROOKS | Aligner | |
| BROOKS | MAG7 Robot,Arm LAM | |
| BROOKS | AcuTran7 Arm | |
| BROOKS | MAG7 Arm | |
| BROOKS | MAG7 Arm | |
| BROOKS | ATR7 Arm | |
| BROOKS | MAG7 Arm | |
| BROOKS | MAG7 Arm | |
| BROOKS | AQR7 Arm | |
| AMAT | HP Motor | |
| AMAT | HP Motor | |
| AMAT | HP Motor | |
| AMAT | HP Motor | |
| AMAT | HP Motor | |
| AMAT | Magnet Driver | |
| BROOKS | MAG7 Driver | |
| BROOKS | MAG7 Driver | |
| AMAT | Stepper Driver | |
| ASYST | HP CENTURA BOART/Driver | |
| ASYST | Indexer Board | |
| ASYST | Indexer Board | |
| ASYST | Indexer Board | |
| ASYST | Indexer Board | |
| BROOKS | Indexer Board | |
| ASYST | Indexer Board | |
| ASYST | Indexer Board | |
| ASYST | Indexer Board | |
| ASYST | Indexer Board | |
| ASYST | Indexer Board | |
| ASYST | Indexer Board | |
| ASYST | Indexer Board | |
| AMAT | AI/O Board | |
| AMAT | AI/O Board | |
| AMAT | AI/O Board | |
| AMAT | AI/O Board | |
| AMAT | AI/O Board | |
| AMAT | AI/O Board | |
| AMAT | AI/O Board | |
| AMAT | AI/O Board | |
| AMAT | DI/O Board | |
| AMAT | DI/O Board | |
| AMAT | DI/O Board | |
| AMAT | DI/O Board | |
| AMAT | DI/O Board | |
| AMAT | DI/O Board | |
| ASYST | Servo Board | |
| AMAT | Video Board | |
| AMAT | Video Board | |
| AMAT | Video Board | |
| AMAT | OMS Board | |
| AMAT | OMS Board | |
| AMAT | SEI Board | |
| AMAT | SEI Board | |
| AMAT | Orienter Board | |
| ASYST | CPU Board | |
| ASYST | CPU Board | |
| ASYST | CPU Board | |
| AMAT | Analog output Board | |
| AMAT | Analog output Board | |
| AMAT | Seriplex Sensor Bus Board | |
| AMAT | Seriplex Board | |
| AMAT | Seriplex I/O Board | |
| AMAT | VGC Board | |
| AMAT | Wafer orienter Baord | |
| AMAT | Center Finder Sensor Board | |
| AMAT | TC Gamge Pwb Board | |
| AMAT | Chamber Interconnect Board | |
| AMAT | Channel MUX Board | |
| AMAT | Isolation Amplifier Board | |
| AMAT | I/O Expansion Card | |
| ASYST | Indexer | Indexer2200 |
| ASYST | Indexer | Indexer2200 |
| ASYST | Indexer | Indexer2200 |
| ASYST | Indexer | Indexer2200 |
| ASYST | Indexer | Indexer2200 |
| ASYST | Indexer Assy | |
| SMC | Main Valve | XLA-160H3-X44 |
| AMAT | Moncromator module | |
| AMAT | Moncromator module | 0242-36054 |
| BROOKS | MTR5 teach pendant | |
| AMAT | Monochromator | |
| AMAT | Monochromator | |
| ASYST | Monochromator | |
| PANASONIC | Driver | MSD013A1XXV |
| PANASONIC | Driver | MSD023P1E |
| PANASONIC | Driver | MSD023A1XX |
| PANASONIC | Driver | MSD023A1XXV |
| PANASONIC | Driver | MSD043A2XX |
| PANASONIC | Driver | MSD043A1XXV |
| PANASONIC | Driver | MSD3A1P2EK |
| PANASONIC | Driver | MSD5A1A1XXE |
| PANASONIC | Driver | MSD011A1XXE |
| PANASONIC | Driver | MSD021A1XX04 |
| PANASONIC | Driver | MSD083A1XX |
| PANASONIC | Driver | MSD083A2XX |
| PANASONIC | Driver | MSD011A1XX |
| PANASONIC | Driver | MSDA011A1A |
| PANASONIC | Driver | MSDA021A1A |
| PANASONIC | Driver | MSDA011D1A |
| PANASONIC | Driver | MSDA5A1A1A |
| PANASONIC | Driver | MSDA043A1A |
| PANASONIC | Driver | MSDA013A1A |
| PANASONIC | Driver | MSDA043A2A26 |
| PANASONIC | Driver | MSDB083D1A |
| PANASONIC | Driver | MSM022A1A |
| PANASONIC | Driver | MSM012A1E |
| PANASONIC | Driver | MSM042A1A |
| PANASONIC | Driver | MBDFT1503 |
| PANASONIC | Driver | MBDDT2210 |
| PANASONIC | Driver | MBDHT2510E |
| PANASONIC | Driver | MCDDT3520A21 |
| PANASONIC | Driver | MCDDT3520 |
| PANASONIC | Driver | MEDDT7364 |
| PANASONIC | Driver | MDDDT353003 |
| PANASONIC | Driver | MUDS015A1A |
| PANASONIC | Driver | MUDS043A1A |
| PANASONIC | Driver | MUDB5A5A1A |
| PANASONIC | Driver | MUDS015A1A |
| PANASONIC | Driver | MSS083A2XP |
| PANASONIC | Motor | MBMK042BLE |
| PANASONIC | Motor | MDMA202P1G |
| PANASONIC | Motor | MSMA042C1A |
| PANASONIC | Motor | MSMD082S1A |
| PANASONIC | Motor | MSMA012A1E |
| PANASONIC | Motor | MSM3AZP1A |
| PANASONIC | Motor | MSMA012A1B |
| PANASONIC | Motor | MSM012A1B |
| PANASONIC | Motor | MSMA042A1F |
| PANASONIC | Motor | MSMA022A1F |
| PANASONIC | Motor | MSMA042A1E |
| PANASONIC | Motor | MSM042A1F |
| PANASONIC | Motor | MSM082A1F |
| PANASONIC | Motor | MSMD042P1T |
| PANASONIC | Motor | MSM021A2H |
| PANASONIC | Motor | MSM8A1A2G |
| PANASONIC | Motor | MSMA011C1F |
| PANASONIC | Motor | MSM022A9A |
| PANASONIC | Motor | MSM8A2A2G |
| PANASONIC | Motor | MSM082A1A |
| PANASONIC | Motor | MSM022A1E |
| PANASONIC | Motor | MSM5AZA1D |
| PANASONIC | Motor | MSMA082C1E |
| PANASONIC | Motor | MSM021A2NE |
| PANASONIC | Motor | MSM022A1F |
| PANASONIC | Motor | MSM5AZA1E |
| PANASONIC | Motor | MSMA5AZA1E |
| PANASONIC | Motor | MSM021A1E |
| PANASONIC | Motor | MSMD082P1U |
| PANASONIC | Motor | MSMD012P1S |
| PANASONIC | Motor | MUMS5AZA1F0S |
| PANASONIC | Motor | MUMA042P1S |
| PANASONIC | Driver | MSD021P1EA01 |
| PANASONIC | Driver | MSD011P1EA |
| PANASONIC | Driver | MSDA041A1A07 |
| PANASONIC | Driver | MSS021P1P01 |
| PANASONIC | Driver | MSD011A1XX05 |
| PANASONIC | Driver | MSDA5A3A1A |
| PANASONIC | Driver | MSS011P1P01 |
| PANASONIC | Driver | MSD023A1XX40 |
| PANASONIC | Driver | MSD5A1P1EA01 |
| PANASONIC | Driver | MSDA023A1A |
| PANASONIC | Driver | MSDA013A1A |
| PANASONIC | Driver | MSD3AZA1Y |
| PANASONIC | Driver | MSD261Y80 |
| PANASONIC | Driver | MSD3AZA1Y03 |
| PANASONIC | Driver | MSD021A1XX10 |
| PANASONIC | Driver | MSD021A1XX04 |
| PANASONIC | Driver | MSD261Y70 |
| PANASONIC | Driver | MSD261Y22 |
| PANASONIC | Driver | MSD043A1Y03 |
| PANASONIC | Driver | MSD083C1W01 |
| PANASONIC | Driver | MSD013A1XX |
| PANASONIC | Driver | MQDB012AAD |
| PANASONIC | Driver | MSDA5A1A1A07 |
| PANASONIC | Driver | MSD361Y04 |
| PANASONIC | Driver | MSD011A1XX18 |
| PANASONIC | Driver | MSD041A1XX14 |
| PANASONIC | Driver | MSD5A3P1E |
| PANASONIC | Driver | MSD011A1XX11 |
| PANASONIC | Motor | MSD5A1A1XX21 |
| PANASONIC | Motor | MSM021P1E |
| PANASONIC | Motor | MSMA041A1F |
| PANASONIC | Motor | MSM5AZP2N |
| PANASONIC | Motor | MSM011AT7 |
| PANASONIC | Motor | MSM041A1FE |
| PANASONIC | Motor | MSM3AZA1N |
| PANASONIC | Motor | MSM011P2E |
| PANASONIC | Motor | MSM021P2F |
| PANASONIC | Motor | MSM011A1A |
| PANASONIC | Motor | MSM012A1FT |
| PANASONIC | Motor | MSMA012B1FT |
| PANASONIC | Motor | MSM042A5F |
| PANASONIC | Motor | MSM5AZP1Q |
| PANASONIC | Motor | MSM042A7F |
| PANASONIC | Motor | MSMA5AZA29 |
| PANASONIC | Motor | MSMA041A1A |
| PANASONIC | Motor | MSMA022A37 |
| PANASONIC | Motor | MSM021ABF |
| MITSUBISHI | Motor | HC-KFS13 |
| MITSUBISHI | Motor | HC-KFS13B |
| MITSUBISHI | Motor | HC-KFS23 |
| MITSUBISHI | Motor | HC-KFS23B |
| MITSUBISHI | Motor | HC-KFS053 |
| MITSUBISHI | Motor | HC-KFS43B |
| MITSUBISHI | Motor | HC-KFS43K |
| MITSUBISHI | Motor | HC-KFS43BK |
| MITSUBISHI | Motor | HC-KFS73 |
| MITSUBISHI | Motor | HC-MF13B |
| MITSUBISHI | Motor | HC-MF43 |
| MITSUBISHI | Motor | HC-MF053G2K |
| MITSUBISHI | Motor | HC-MF23 |
| MITSUBISHI | Motor | HC-MF23G2 |
| MITSUBISHI | Motor | HC-MF23BG1 |
| MITSUBISHI | Motor | HC-MF053G2 |
| MITSUBISHI | Motor | HC-MF13 |
| MITSUBISHI | Motor | HC-MF13-S100 |
| MITSUBISHI | Motor | HC-MFS13D |
| MITSUBISHI | Motor | HC-MFS23G2 |
| MITSUBISHI | Motor | HC-MFS053 |
| MITSUBISHI | Motor | HC-MFS43K |
| MITSUBISHI | Motor | HC-MFS73B |
| MITSUBISHI | Motor | HC-SFS152 |
| MITSUBISHI | Motor | HC-SFS102 |
| MITSUBISHI | Motor | HC-SFS350 |
| MITSUBISHI | Motor | HC-UFS13 |
| MITSUBISHI | Motor | HC-UFS13K |
| MITSUBISHI | Motor | HC-UFS23 |
| MITSUBISHI | Motor | HC-PQ13B |
| MITSUBISHI | Motor | HC-PQ43K |
| MITSUBISHI | Motor | HG-KR73J |
| MITSUBISHI | Motor | HG-SR502B |
| MITSUBISHI | Motor | HF-SP52 |
| MITSUBISHI | Motor | HC-KP43B |
| MITSUBISHI | Driver | MR-J2S-10B |
| MITSUBISHI | Driver | MR-J2S-20B |
| MITSUBISHI | Driver | MR-J2S-40B |
| MITSUBISHI | Driver | MR-J2S-200B |
| MITSUBISHI | Driver | MR-J2S-700B |
| MITSUBISHI | Driver | MR-J2S-10A |
| MITSUBISHI | Driver | MR-J2S-10A-S075 |
| MITSUBISHI | Driver | MR-J2S-10A-S011 |
| MITSUBISHI | Driver | MR-J2S-20A |
| MITSUBISHI | Driver | MR-J2S-20A1 |
| MITSUBISHI | Driver | MR-J2S-40A |
| MITSUBISHI | Driver | MR-J2S-40A-S011 |
| MITSUBISHI | Driver | MR-J2S-60A-S055 |
| MITSUBISHI | Driver | MR-J2S-70A |
| MITSUBISHI | Driver | MR-J2S-100A |
| MITSUBISHI | Driver | MR-J2S-100A-S055 |
| MITSUBISHI | Driver | MR-J2S-200A |
| MITSUBISHI | Driver | MR-J2S-200A-S011 |
| MITSUBISHI | Driver | MR-J2S-350A |
| MITSUBISHI | Driver | MR-J2S-350A-S011 |
| MITSUBISHI | Driver | MR-J2M-P8A |
| MITSUBISHI | Driver | MR-J2M-P8B |
| MITSUBISHI | Driver | MR-J2M-BU8 |
| MITSUBISHI | Driver | MR-J2M-10DU |
| MITSUBISHI | Driver | MR-J2M-20DU |
| MITSUBISHI | Driver | MR-J2M-40DU |
| MITSUBISHI | Driver | MR-H100B-S114-P53 |
| MITSUBISHI | Driver | MR-H200B-S114-P53 |
| MITSUBISHI | Driver | MR-H350B-S114-P53 |
| YASKAWA | Motor | SGMAS-01ACAB1 |
| YASKAWA | Motor | SGMPH-01BBAB1 |
| YASKAWA | Motor | SGMAS-A5ACAB1 |
| YASKAWA | Motor | SGMAH-A5BBABC |
| YASKAWA | Motor | SGMAS-01ACAJ161 |
| YASKAWA | Motor | SGMAS-01ACA2C |
| YASKAWA | Motor | UGQMEM-02MNQ23 |
| YASKAWA | Motor | UGRMEM-01SAKOE |
| YASKAWA | Motor | USADED-22E22K |
| YASKAWA | Motor | SGMAS-01ACABC |
| YASKAWA | Motor | SGMAV-04ADA6S |
| YASKAWA | Motor | SGMAS-04ACAB1 |
| YASKAWA | Motor | SGME-01AF14B |
| YASKAWA | Motor | SGMP-A8A3TA11 |
| YASKAWA | Motor | SGMAH-01AAA41 |
| YASKAWA | Motor | SGMJV-04A3A6C |
| YASKAWA | Motor | SGM-08A3J26 |
| YASKAWA | Motor | SGMDH-12A2A-YR1 |
| YASKAWA | Motor | SGMPH-02A1A-YR32 |
| YASKAWA | Motor | SGMPH-02A1A-YR31 |
| YASKAWA | Motor | SGMPH-01A1A-YR22 |
| YASKAWA | Motor | SGMAS-04ACAH12C |
| YASKAWA | Motor | USADEM-45-TW11 |
| YASKAWA | Motor | SGMG-44A2A-TW11 |
| YASKAWA | Motor | SGMG-20A2A-TW11 |
| YASKAWA | Motor | SGMPH-04A1A-YR12 |
| YASKAWA | Motor | R01SAKOE |
| YASKAWA | Motor | SGMAH-08AAF41 |
| YASKAWA | Motor | SGM-02B314 |
| YASKAWA | Motor | SGM-08V3B4 |
| YASKAWA | Motor | SGMAS-C2ACA61 |
| YASKAWA | Motor | SGM-A8A3TA11 |
| YASKAWA | Motor | SGMAH-A5BBAB1 |
| YASKAWA | Motor | SGM-02A3G46 |
| YASKAWA | Motor | SGM-08A314C |
| YASKAWA | Motor | SGMPS-15ACA2C |
| YASKAWA | Motor | SGM-01A314B |
| YASKAWA | Motor | SGDV-5R5A01A |
| YASKAWA | Motor | SGMGH-30ACA6C |
| YASKAWA | Motor | SGM-02A3SU21 |
| YASKAWA | Motor | UGQMEM-06-SW41 (MD16) |
| YASKAWA | Motor | UGQMEM-06-SW51 (MD18) |
| YASKAWA | Motor | UGQMEM-06-SW12 (MD11) |
| YASKAWA | Driver | SGDF-A3CS |
| YASKAWA | Driver | SGDS-30A05A |
| YASKAWA | Driver | SGDV-2R9E11A |
| YASKAWA | Driver | SGDA-01AS |
| YASKAWA | Driver | SGDS-01A01A |
| YASKAWA | Driver | SGDB-30ADG |
| YASKAWA | Driver | SGDV-330AE1AY579AA |
| YASKAWA | Driver | SGDV-330AE1AY00029 |
| YASKAWA | Driver | SGDV-OCA01A |
| YASKAWA | Driver | SGDH-10AE |
| YASKAWA | Driver | SGDH-20AE |
| YASKAWA | Driver | SGDB-15VD |
| YASKAWA | Motor | SGMAS-A5ACA21 |
| YASKAWA | Driver | SGD-02ANY6 |
| YASKAWA | Motor | SGM-08AW14D |
| YASKAWA | Motor | SGM-08A3TE11 |
| YASKAWA | Motor | SGM-08A3G14B |
| IAI | Driver | RCA-SA5D-I-20-3-350-A1-X07-SP |
| IAI | Driver | DS-SA6-1-30-6-350-C1-M-BL |
| IAI | Driver | SEL-G-3-DC-60.60B.100L |
| IAI | Driver | XSEL-P-6-30DIL-30DIL-200IL-30DIL-200IL-N1-EEE-2-3 |
| IAI | Driver | XSEL-J-4-100IL-30DIL-100IL-30DIL-N1-EEE-2-1 |
| IAI | Driver | SEL-G-2-AC-200.200 |
| IAI | Driver | XSEL-P-3-60IL-60IL-100IL-N1-EEE-2-3 |
| IAI | Driver | XSEL-P-6-30DIL-30DIL-200IL-N1-EEE-2-3 |
| PROFACE & OTHER | Touch Panel | AST3501-C1-AF 3580208-01 |
| PROFACE & OTHER | Touch Panel | PL6921-T41 2780054-03 |
| PROFACE & OTHER | Touch Panel | PL-5701S1 |
| PROFACE & OTHER | Touch Panel | PL5900-T12 |
| PROFACE & OTHER | Touch Panel | GP477R-EG11 |
| PROFACE & OTHER | Touch Panel | GP270-LG11-24V |
| PROFACE & OTHER | Touch Panel | GP577R-TC11 |
| PROFACE & OTHER | Touch Panel | GP570-SC11 |
| PROFACE & OTHER | Touch Panel | GP2501-TC11 |
| PROFACE & OTHER | Touch Panel | GP2501-LG41-24V 3180045-01 |
| PROFACE & OTHER | Touch Panel | GP2501-SC11 318002 |
| PROFACE & OTHER | Touch Panel | GP-4501TW PFXGP4501TADW |
| PROFACE & OTHER | Touch Panel | GT1155HS-QSBD |
| PROFACE & OTHER | Touch Panel | GP37W2-BG41-24V 2280052-01 |
| PROFACE & OTHER | Touch Panel | PL5900-T12 |
| PROFACE & OTHER | Touch Panel | JAE SC-200W-AV UT3-FIAE/DSS1-B/23961074R |
| PROFACE & OTHER | Touch Panel | HAKKO V610S10 |
| PROFACE & OTHER | Touch Panel | MITSUBISHI A970GOT-LBD |
| PROFACE & OTHER | Touch Panel | FP-VM-1-0 |
| PROFACE & OTHER | Touch Panel | NDS CM-X15/AMCP 90X0095-F |
| PROFACE & OTHER | Touch Panel | DIGITAL UFP6610TA-VMM-APX1 |
| ORIENTAL | Driver | UDX5107 |
| ORIENTAL | Driver | UDX5107N |
| ORIENTAL | Driver | UDK5128N-M |
| ORIENTAL | Driver | UDK5114N-M |
| ORIENTAL | Driver | UDK5114N |
| OMRON | Motor | R88M-H20030-BS3 |
| OMRON | Motor | R88M-H20030-B |
| NSK | Driver | 1080-00036W |
| NSK | Motor | Old- 0870-01064C, New- 0190-14344W |
| YASKAWA | Driver | JZNC-X1U01B |
| YASKAWA | Board | JARCR-XOI01 |
| VARIAN | Turbo Pump V-Type | V60,V70,V70D,V70LP,V141,V150,V250,V300HT,V301,V550/V551/V700/V701/V200A |
| ALCATEL | Turbo Pump ATP | 80/100/150/300/400/600 |
| ALCATEL | Turbo Pump ATH | 1600/1603/2300/2303M |
| SHIMADZU | Turbo Pump TMP-03 | 203/303/403/803/1003/1503/2003/2203/2403/3203/3403/3603/3413 |
| SHIMADZU | Turbo Pump TMP-04 | 2804/3304/4304 |
| SHIMADZU | Turbo Pump TMP-V | V2304/V2804/V3304 |
| SHIMADZU | Turbo Pump TMP-X | X4304/X3804 |
| SHIMADZU | Turbo Pump TMP-X05 | 3413X05 |
| MITSUBISHI | Turbo Pump PT | 150/300/1200/1500 |
| MITSUBISHI | Turbo Pump FT | 800/1400/3301/3303 |
| EDWARDS | Turbo Pump STP | 300/301/451/600/1000/2000 |
| EDWARDS | Turbo Pump STP-H | 301/600/1000/2000 |
| EDWARDS | Turbo Pump STP-A | 803/1003/1303/2203 |
| EDWARDS | Turbo Pump STP-IXA | 1805/2205/2206/3206/3306 |
| LEYBOLD | Turbo Pump TMP | 151/361/1000C |
| LEYBOLD | Turbo Pump MAG | 1300/1500/2000/2200/2800 C/CT |
| ULVAC | Rough Pump DA | 40S/60 |
| KAWAKE | Rough Pump JP | 90V/120H |
| ADIXEN | Rough Pump AMD1 | 108987 |
| ADIXEN | Rough Pump ACP | 28/40 |
| VARIAN | Rough Pump 949 | 9411/9451 |
| VARIAN | Rough Pump MD4 | |
| VACUTRONICS | Rough Pump DP | １２０V |
| PFEIFFER | Rough Pump MVP | 015/020/035/040 |
| ALCTEL | Rough Pump ADP | 122P |
| AGILENT | Rough Pump IDP | 3/15 |
| EDWARDS | Rough Pump ESD | 12/30 |
| EDWARDS | Rough Pump XDS | 5/6i/10/35i |
| VARIAN | Rough Pump SH | 100/110 |
| VARIAN | Rough Pump PTS | 300/600 |
| Brooks | PRI Robot | ATM-105 |
| Brooks | PRI Robot | ATM-107 |
| Brooks | PRI Robot | ATM-107B |
| Brooks | PRI Robot | WTM-107B |
| Brooks | PRI Robot | WTM-107EGW |
| Brooks | PRI Robot | ATM-204 |
| Brooks | PRI Robot | ATM-205 |
| Brooks | PRI Robot | ABM-205 |
| Brooks | PRI Robot | ATM-207 |
| Brooks | PRI Robot | ATM-305 |
| Brooks | PRI Robot | ATM-307 |
| Brooks | PRI Robot | ATM-405 |
| Brooks | PRI Robot | ABM-405 |
| Brooks | PRI Robot | ATM-407 |
| Brooks | PRI Robot | ABM-407 |
| Brooks | PRI Robot | ABM-407B |
| Brooks | PRI Robot | VAC-407-2A |
| Brooks | PRI Robot | DBM-2406, DBM-2407 DBM-2706 |
| Brooks | PRI Robot | WTM-511 |
| Brooks | PRI Pre- aligner |
PRE-200, 200B, 201, 201B |
| Brooks | PRI Pre- aligner |
PRE-300, 300B, 301, 301B |
| Brooks | PRI CNTL | ESC-100 系列 |
| Brooks | PRI CNTL | EDC-2400 |
| Brooks | PRI CNTL | EDC-2800 |
| Brooks | PRI CNTL | ESC-200, 201, 204, 212, 218, 222 |
| Brooks | Robot | ATR-8_NVLS |
| Brooks | Robot | ATR-8_LAM |
| Brooks | Robot | ATR-7_NVLS |
| Brooks | Robot | ATR-7_Arm set |
| Brooks | Robot | AQR-7 |
| Brooks | Robot | AQR-7 |
| Brooks | Robot | Pre-Aligner 7391 |
| Brooks | Robot | AQR-7_Arm Set |
| Brooks | Robot | Traverser 002-8761-05 |
| Brooks | Controller | |
| Brooks | Robot | Robot MTR5 |
| Brooks | Robot | Robot MTR5 |
| Brooks | Robot | Robot MTR5 Armset |
| Brooks | Robot | Robot MTR5 Armset |
| Brooks | Armset | MAG-7 Armset |
| Brooks | Armset | MAG-7 Armset |
| Brooks | Armset | MAG-7 Armset |
| Brooks | Armset | MAG-7 Armset |
| Brooks | Robot | MAG-8 |
| Brooks | Robot | MAG70 |
| Brooks | Robot | MAG74 |
| Brooks | Robot | MAG70 Arm set 4300 |
| Brooks | Robot | MAG70 Arm set 5500 |
| Brooks | Robot | MAG74 Arm set |
| Brooks | Robot | TBM |
| Brooks | Robot | Razor |
| Brooks | Robot | Robot MAG-7 |
| Brooks | Robot | Robot MAG-7 |
| Kensington | Robot | 3軸Robot |
| Kensington | Robot | 5軸Robot |
| Kensington | ALIGNER | ALIGNER |
| Kensington | Controller | 3軸Controller R1 |
| Kensington | Controller | 3軸Controller R2 |
| Kensington | Controller | 5軸Controller |
| Kawasaki | Robot | Robot 3NS410B-Axxx |
| Kawasaki | Robot | Robot 3NS410B-Bxxx |
| Kawasaki | Robot | Robot 3NS411B-Fxxx |
| Kawasaki | Robot | Robot 3NS411B-Gxxx |
| Kawasaki | Robot | Robot 3NS511C-Fxxx |
| Kawasaki | Robot | Robot 3NS511C-Gxxx |
| Kawasaki | Robot | Robot 3NS420B |
| Kawasaki | Robot | Robot 3NS510S |
| Kawasaki | Robot | Robot 3NS520S |
| Kawasaki | Robot | Robot 3NX510B |
| Kawasaki | Robot | Robot 3NX520B |
| Kawasaki | Robot | Robot 3NX540B |
| Kawasaki | Robot | Robot 3NX550B |
| Kawasaki | Robot | Robot 3NT410B |
| Kawasaki | Robot | Robot 3NT420B |
| Kawasaki | Robot | Robot 3NT510B |
| Kawasaki | Robot | Robot 3NT520B |
| Kawasaki | Robot | Robot 3NT570B |
| Kawasaki | Robot Controller | Robot Controller C61C Repair |
| Kawasaki | Robot Controller | Robot Controller C61D Repair |
| Kawasaki | Robot Controller | Robot Controller C61E Repair |
| Kawasaki | Robot Controller | Robot Controller 30C61C Repair |
| Kawasaki | Robot Controller | Robot Controller 30C61D Repair |
| Kawasaki | Robot Controller | Robot Controller 30C61E Repair |
| Kawasaki | Robot Controller | Robot Controller 30C60F Repair |
| Kawasaki | Robot Controller | Robot Controller 30C63E Repair |
| Kawasaki | Robot Controller | Robot Controller 30C65E Repair |
| Kawasaki | Robot Controller | Robot Controller 30C65F Repair |
| Kawasaki | Robot Controller | Robot Controller 30D61H Repair |
| Kawasaki | Robot Controller | Robot Controller 30D61I Repair |
| Kawasaki | Robot Controller | Robot Controller 30D60G Repair |
| Kawasaki | Robot Controller | Robot Controller 30D60E Repair |
| Kawasaki | Robot Controller | Robot Controller Repair |
| Kawasaki | Robot Controller | Robot Controller 30D60F Repair |
| Kawasaki | Robot Controller | Robot Controller 30D65F Repair |
| Kawasaki | Robot Controller | Robot Controller 30D65I Repair |
| Kawasaki | Robot Controller | Robot Controller 30C08H Repair |
| Kawasaki | Pre-Aligner | Pre-Aligner |
| Kawasaki | Robot | TS220 MHU |
| Kawasaki | Robot | TS310IHU |
| Kawasaki | Robot | TS520 BHU |
| Kawasaki | Robot | SS621/SL922 |
| Kawasaki | Robot | SS610/611/920/921 Arm |
| Kawasaki | Robot | FC-3100 Arm |
| Kawasaki | Robot | TS/520/310/220 Arm |
| Yaskawa | Robot | Robot XU-RCM6420 |
| Yaskawa | Robot | Robot XU-RCM6422 |
| Yaskawa | Robot | Robot XU-RCM6841 |
| Yaskawa | Robot | Robot XU-RCM6801 |
| Yaskawa | Robot | Robot XU-RCM6802 |
| Yaskawa | Robot | Robot XU-RCM7230 |
| Yaskawa | Robot | Robot XU-RCM7231 |
| Yaskawa | Robot | Robot XU-RCM7410 |
| Yaskawa | Robot | Robot XU-RCM8100 |
| Yaskawa | Robot | Robot XU-RC400M |
| Yaskawa | Robot | Robot XU-RC350D-J03 |
| Yaskawa | Robot | Robot XU-RC350D-C03 |
| Yaskawa | Robot | Robot XU-RC350D-K01 |
| Yaskawa | Robot | Robot XU-RC350D-B23 |
| Yaskawa | Robot | Robot XU-RC350D-I01 |
| Yaskawa | Robot | Robot XU-RC350D-IC06 |
| Yaskawa | Robot | Robot XU-RC350D-IB06 |
| Yaskawa | Robot | Robot XU-RC350S-J01 |
| Yaskawa | Robot | Robot XU-RC845M |
| Yaskawa | Robot | Robot XU-RCM4900 |
| Yaskawa | Robot | Robot XU-RCM4901 |
| Yaskawa | Robot | Robot XU-RCM4800 |
| Yaskawa | Robot | Robot XU-RCM4700 |
| Yaskawa | Controller | Controller, Yaskawa 4700 |
| Yaskawa | Robot | Robot XU-RCM53B0 |
| Yaskawa | Robot | Robot XU-RCM53E0 |
| Yaskawa | Robot | Robot XU-RCM53E0A |
| Yaskawa | Robot | Robot XU-RCM5301 |
| Yaskawa | Robot | Robot XU-RCM5300 |
| Yaskawa | Robot | Robot XU-RCM5301A |
| Yaskawa | Robot | Robot XU-RSM53D0 |
| Yaskawa | Robot | Robot XU-RSM5330 |
| Yaskawa | Robot | Robot XU-RCM9120 |
| Yaskawa | Robot | Robot XU-RCM9205 |
| Yaskawa | Robot | Robot XU-RCM9206 |
| AMAT | Robot | VHP |
| AMAT | Robot | XP |
| Yaskawa | Robot | XU-RCM8220 |
| Yaskawa | Robot | XU-RCM5020 |
| Yaskawa | Robot Controller | XU-CM5500 |
| Yaskawa | Robot Controller | XU-CM5510 |
| Yaskawa | Robot Controller | XU-CM6180 |
| Yaskawa | Robot Controller | ERCR-NS01-B004 |
| Yaskawa | Robot Controller | ERCR-NS01-B004-E1 |
| Yaskawa | Driver | Driver, BCD2081D |
| Yaskawa | Driver | Driver, BCD2011C |
| Yaskawa | Controller | Controller, CN0240A |
| Yaskawa | Controller | CN1170A |
| Yaskawa | Controller | Controller , CN1112A |
| Yaskawa | Controller | Controller , CM8310 |
| Yaskawa | Robot Pre-Aligner | XU-ACP4801 |
| Yaskawa | Robot Pre-Aligner | XU-ACP4860 |
| LAM | Robot | Indexer |
| LAM | Robot | Vortex |
| LAM | Robot | Vortex Wet |
| LAM | Robot | TEBR |
| LAM | Robot | Vortex Dual arm Robot |
| LAM | Robot | Vortex Extreme ATM |
| LAM | Controller | Vortex Robot controller |
| LAM | Robot | Vortex Traverser |
| LAM | Robot | Servo Spindle Assy |
| LAM | Robot | Lift Module |
| LAM | Robot | MACH 1 |
| LAM | Robot | MACH 4 |
| LAM | Robot | MACH 1 Controller |
| LAM | Robot | MACH 4 Controller |
| Mattson | Robot | Mattson Mapping Arm |
| Trust | Robot | Trust Controller |
| LAM | Robot | LTM Type 2 |
| Rorze | Robot | 700 |
| Rorze | Controller | Controller |
| Rorze | Robot | 701 |
| Rorze | Robot | 711 |
| Rorze | Robot | 713 |
| Rorze | Robot | 717 |
| Rorze | Robot | 721 |
| Genmark | Robot | GB4P |
| Genmark | Robot | GB4 |
| Genmark | Robot | GB4S |
| Genmark | Robot | GB7 |
| Genmark | Robot | GB7S |
| Genmark | Robot | GB8 |
| Genmark | Robot | Traversers |
| Sankyo | Robot | SR8232 |
| Sankyo | Controller | SC3150 |
| Sankyo | Robot | 7150 |
| Sankyo | Robot | SR8240 |
| ASML | Robot | MK3 DFA |
| ASML | Robot | Load port (UP Type) |
| ASML | Robot | Load port (Down Type) |
| ASML | Robot | MK3 Arm |
| ASML | Robot | TSU Motor |
| ASML | Robot | TSU Aligner |
| ASML | Robot | Balance Mass Encoder |
| ASML | Robot | CCU |
| ASML | Robot | Chuck Park Lock |
| ASML | Robot | Open X-Beam |
| ASML | Robot | Drift Motor |
| ASML | Robot | MK3 35XT Scara |
| ASML | Robot | MK3 Scara |
| SHINKO | Robot | SBX92101286-2 |
| SHINKO | Robot | |
| SHINKO | Contlr | |
| Milara | Robot | |
| Tazmo | Robot | |
| Tazmo | Aligner | |
| Tazmo | Controller | |
| Hirata | Robot | AR-WL180CL-3 |
| Hirata | Robot | AR-W180CL-3-S-300- D2 |
| Aitec | Robot | AR-WV300 |
| Aitec | Controller | AI-2500A |
| Semitool New | Robot | 610T0380 |
| Semitool Old | Robot | 610T |
| ADE | Robot | 351-0711 |
| ADE | Contlr | 351 |
| JEL | Robot | GHR/GTHR/DTVHR |
| JEL | Robot Controller | C4410 |
| MECS | Robot | APR800 |
| MECS | Robot | UTC1000 |
| MECS | Robot | UTC820Z |
| MECS | Robot | UTC800、801P |
| MECS | Robot | UTC800、801P Contlr |
| MECS | Robot | UTX1000 Series |
| MECS | Robot | UTW3400 |
| MECS | Robot | UTW3100P |
| MECS | Robot | OF250 Controller |
| MECS | Robot | Aligner OF250 |
| MECS | Robot | Aligner OFH100 |
| Dainippon | ||
| Daihen | Robot | SPR956 |
| Daihen | Robot | SPR955 |
| Daihen | Robot | SPR951 |
| Daihen | Robot | SPR907 |
| Daihen | Robot | SPR906 |
| Daihen | Robot | SPR903 |
| Daihen | Robot | SPR902 |
| Daihen | Robot | SPR8501 |
| Daihen | Robot | SPR8101 |
| Daihen | Robot | SPR811S |
| Daihen | Robot | SPR811 |
| Daihen | Robot | SPR809 |
| Daihen | Robot | SPR807 |
| Daihen | Robot | SPR806S |
| Daihen | Robot | SPR806 |
| Daihen | Robot | SPR805 |
| Daihen | Robot | SPR802 |
| MKS | Vavle | 653A-11966 |
| LAMBDA | DC Power Supply | EPD-54 |
| PANASONIC | Motor | MSMA042A1B |
| ASYST | Robot | UTX-F5500-018 |
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SS9250-3-20230819-1
