Main Maker

PVA TEPLA ION 100

Description

The PVA TEPLA ION 100/40Q WB Plasma Barrel Asher is only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!

Location: USA

Condition: Used

Quantity: 1 set available

Condition: Used. We can sell them at : (1) AS IS condition, (2) Complete, working, functional test condition.

Info from websites on the system for your reference only.

Quartz Barrel photoresist asher and plasma surface treatment system. The Photoresist Ashing IoN 100-40Q Plasma System is a barrel plasma reactor designed for high volume production applications. Customer is responsible for facility , pump and chiller if applicable.

Key Features include:

  • Plug and play self installation
  • Industrial computer with LCD touch panel and keyboard. Windows based operating system.
  • Graphical User Interface (GUI) software complies with CFR Title 21 Part 11 and Semi E95-1101
  • Multi-level of user access

Recipe and Software

  • Recipe editor for fast and versatile step controls
  • Onboard diagnostic features and alarm logging
  • Remote process monitoring via Ethernet

Equipment specifications and Process Chamber

  • Material: Quartz chamber
  • Dimensions: about 12”X20”
  • Volume: about 37 L
  • Number of MFCs: 3
  • Process Pressure: (0.16 to 2.66) mbar (120 to 2000) mTorr
  • Base Pressure: 0.07 mbar (50 mTorr)
  • Pumping Time: 1 min (Pump dependent)
  • Wafer Sizes: Up to 200 mm (8”) Batch size (Boat)
  • Wafer Loading: Manual
  • Plasma Source Frequency/power: 13.56 MHz/600 W
  • 230V, 1Ph, 50/60Hz, 10A, CE

Please contact us for more information on the product:

Your Name*:

Your Email:

Your Message:

Captchac Codecaptcha

Submit:

ID-SS380EB-20221001

S

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers