Description
The following NOVELLUS Gasonics parts are only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!
| 1 | 15-00699 | Clamp for Concept I/II | |
| 2 | 15-054296 | Rod Sapphire | |
| 3 | 15-110411-00 | Window Sapphire | |
| 4 | 15-154277-00 | Rod Sapphire | |
| 5 | 15-00457-00 | Screw | |
| 6 | 15-108174-00 | Cup | |
| 7 | 15-114331-00 | Screw | |
| 8 | 15-00399-00 | Screw 200 (0.5) | |
| 9 | 15-08386-00 | Washer #10 Nickel | |
| 10 | 15-00721-00 | Nickel Bolt Screw | |
| 11 | 16-033932-00 | 150mm Showerhead | |
| 12 | 02-00343-01 | Harness Assembly, Sensor, 25.5″ | |
| 13 | 02-00343-02 | Harness Assembly, Sensor, 12.0″ | |
| 14 | 02-00343-03 | Harness Assembly, Sensor, 17.5″ | |
| 15 | 02-00343-04 | Harness Assembly, Sensor, 26.5″ | |
| 16 | 02-00397-00 | Harness Assembly, Sensor 26.5″ | |
| 17 | 10-00072-00 | Insulator, Gas Distribution | |
| 18 | 15-00027-00 | Guide, Nozzle Adjuster | |
| 19 | 15-00043-02 | Adjuster, Ceramic, Gas Plate | |
| 20 | 15-00229-00 | Nut, Hex, 1/2-20, Alum | |
| 21 | 15-00309-00 | Hanger, Nozzle, 1.33″ (150mm) | |
| 22 | 15-00309-01 | Hanger, Nozzle, 1.50″ (200mm) | |
| 23 | 15-000311-00 | Nut, Cap, 1/4-20, Ni | |
| 24 | 15-00341-00 | Screw, 1/4-20 x 1/4, Ni | |
| 25 | 15-00371-00 | Nut, Hex, 1/4-20, Ni | |
| 26 | 15-00372-00 | Washer, 1/4″ Ni | |
| 27 | 15-00385-00 | Nut, 10-32 Ni | |
| 28 | 15-00386-00 | Washer, Flat, #10, Ni | |
| 29 | 15-00399-02 | Screw, Top spindle, Ni | |
| 30 | 15-00399-03 | Screw, Top spindle, Ni | |
| 31 | 15-00399-04 | Screw, 1.02LG, Top Spindle, Ni | |
| 32 | 15-00399-05 | Screw, 1.12LG Top spindle, Ni | |
| 33 | 15-00475-00 | Insulator, Gas Feedthrough Ceramic | |
| 34 | 15-00483-00 | Ring, Heater Hub, Ceramic | |
| 35 | 15-00484-00 | Ring, Heater Centering, Caramic | |
| 36 | 15-00485-00 | Bracket, Paddle, 150mm | |
| 37 | 15-00553-05 | Shim, Heater, .005″, Flat | |
| 38 | 15-00553-10 | Shim, heater, .010″, Flat | |
| 39 | 15-00553-18 | Shim, Heater, .018″, Flat | |
| 40 | 15-00553-25 | Shim, Heater, .025″, Flat | |
| 41 | 15-00553-31 | Shim, Heater, .31″, Flat | |
| 42 | 15-00544-05 | Shim, Heater, .005″, V-Type | |
| 43 | 15-00544-10 | Shim, Heater, .010″, V-Type | |
| 44 | 15-00544-18 | Shim, Heater, .018″, V-Type | |
| 45 | 15-00544-25 | Shim, Heater, .025″, V-type | |
| 46 | 15-00544-31 | Shim, Heater, .031″ V-Type | |
| 47 | 15-00558-01 | Sleeve, Heater Lead, 2.00″, Ceramic | |
| 48 | 15-00558-02 | Sleeve, Heater Lead, 2.75″, Ceramic | |
| 49 | 15-00567-00 | Tube, TC, 1/8″ ID, Ceramic | |
| 50 | 15-00680-00 | Sleeve, Flanged, AC Feedthrough, Ceramic | |
| 51 | 15-00653-00 | Clamp, spindle Hub Mount | |
| 52 | 15-00654-00 | Clamp, Rotation Adjustment | |
| 53 | 15-00680-00 | Sleeve, TC Ceramic | |
| 54 | 15-00684-00 | Cap, TC, 1/16″ ID, Ceramic | |
| 55 | 15-00685-00 | Feedthrough, 3/8: O-Seal, UltraTorr | |
| 56 | 15-00686-00 | Washer, Feedthrough, 1/2″ ID, Alum | |
| 57 | 15-00698-00 | Fork Screw, Ni | |
| 58 | 15-00699-01 | Fork, Finger, 150mm | |
| 59 | 15-00699-02 | Fork finger, 200mm | |
| 60 | 15-00700-00 | Plate, fork Retainer, Bottom, 200mm | |
| 61 | 15-00701-00 | Plate, Fork Retainer, Bottom, 150mm | |
| 62 | 15-00702-00 | Plate, Fork Retainer, Top, 200mm | |
| 63 | 15-00703-00 | Plate, Fork Retainer, Top, 150mm | |
| 64 | 15-00721-00 | Washer, #8, Ni | |
| 65 | 15-00729-00 | Clamp, Flat | |
| 66 | 15-00730-00 | Flange, Keyed (Replaced by 15-032631) | |
| 67 | 15-00731-00 | Bushing, Keyed, Ceramic | |
| 68 | 15-00742-00 | Tube, TC Ceramic | |
| 69 | 15-00951-00 | Cup, Screw Cover | |
| 70 | 15-01111-00 | Paddle, Optical 150mm | |
| 71 | 15-01122-00 | Bracket, Paddle, 200mm | |
| 72 | 15-01127-00 | Paddle, Optical, 200mm | |
| 73 | 15-01146-00 | Panel, side LL | |
| 74 | 15-032014-00 | Window, Quartz, Etch Resistant | |
| 75 | 15-032631-00 | Flange, Keyed | |
| 76 | 15-053394-01 | Min contact Area, Fork, 150mm | |
| 77 | 15-053394-02 | Min Contact Area, Fork, 200mm | |
| 78 | 16-00092-00 | wire, Insulated, Ceramic Bead, Short | |
| 79 | 16-00098-00 | Wire, Insulated, Ceramic Bead, Long | |
| 80 | 16-033931-00 | Showerhead, Pinned, 200mm | |
| 81 | 17-00094-01 | Strap, LF Bias, Laum | |
| 82 | 17-00148-00 | Spring, Fork | |
| 83 | 19-00056-00 | Feedthrough Assy, Electrical | |
| 84 | 20-00153-00 | Ball, Heater Support, 2.00″, Ceramic | |
| 85 | 20-00212-00 | Nut, 8-32 UNC-2B, Alum | |
| 86 | 22-00179-00 | Elbow, Union, 3/8″ O-Seal | |
| 87 | 27-00010-01 | Thermocouple, Type J, 1/8″ | |
| 88 | 27-00079-00 | Thermocouple, Type J, 1/16″ | |
| 89 | 27-00127-00 | Thermocouple, Type E, LG | |
| 90 | 34-000133-00 | Sealant, Teflon FT (used in 19-00056-00) | |
| 91 | 60-00033-00 | Filter, Backfill | |
| 92 | 02-00363-00 | Kit, Wafer Size With platform, Optical, 200mm | |
| 93 | 02-00364-00 | Kit, Wafer Size With Platform, Optical, 150mm | |
| 94 | 05-00221-02 | Microcontacmination Upgrad | |
| 95 | 05-00229-00 | Station, Cooling Upgrade | |
| 96 | 05-027019-00 | External Heated Gate & Throttle Valves | |
| 97 | 02-029514-01 | Indexer Assy, Left, C2 | |
| 98 | 02-029514-02 | Indexer Assy, Right C2 | |
| 99 | 15-103913-00 | Clamp Strap Feedthru | |
| 100 | 15-108307-00 | Clamp RF Strap Aluminum | |
| 101 | 15-253122-00 | Anode, Copper 8″ Round | |
| 102 | 15-00558-02 | Alumina Short Tube | |
| 103 | 06-0142 | Showerhead Disk | |
| 104 | 17303-01 | Plate Middle Showerhead | |
| 105 | 06-301-01 | Window 10″ | |
| 106 | 06-0152 | Showerhead 150mm Bottom | |
| 107 | 17302-01 | Showerhead Upper Chamber | |
| 108 | 17304-01 | ShowerHead Lower Chamber | |
| 109 | A06-010-01 | Plasma Tube Gasonic A1000 | |
| 110 | A06-300-01 | Window Vented 9.5″ | |
| 111 | 15-00027-02 | Guide Nozzle Adjuster | |
| 112 | 17621-01 | Quartz Plate | |
| 113 | 02-252596-00 | Pedestal Heater Referb. | |
| 114 | Plasma Tube Quartz | ||
| 115 | 02-252432-00 | 12″ Spindle Assy | |
| 116 | 02-259457-00 | 12″ Spindle Assy | |
| 117 | 16-129269-00 | 12″PreClean pedestal bellows | |
| 118 | 60-135033-00 | 12″ Welded Bellow | |
| 119 | 16-100488-00 | 300mm Shower Head | |
| 120 | 16-132590-00 | 300mm Shower Head | |
| 121 | 16-256994-00 | 300mm Shower Head | |
| 122 | 15-00311-00 | Nut Cap 1/4-20, Ni | |
| 123 | 19-00266-01 | Motor Ext-Direct Replacement | |
| 124 | 19-00267-01 | Motor Rot-Direct Replacement | |
| 125 | 19-00268-01 | Motor Lift-Direct Replacement | |
| 126 | 27-00029-00 | Quad Power Supply-Direct Replacement | |
| 127 | 27-00066-00 | 27-307499-00 | 24 V Power Supply-Direct Replacement |
| 128 | R02-00093-00 | Referbishment One-Arm Robot-Exchange | |
| 129 | R02-00093-00 | Referbishment One-Arm Robot- Purchase | |
| 130 | 02-00099-00 | Robot Rebuild Kit | |
| 131 | 02-00363-00 | Kit Wafer Size W/Platform Optical 200mm | |
| 132 | 02-00364-00 | Kit Wafer Size W/Platform Optical 150mm | |
| 133 | 05-00221-02 | Microcontacmination Upgrad | |
| 134 | 05-00229-00 | Station Cooling Upgrade | |
| 135 | 04-128956-00 | 12″ Welded Bellow | |
| 136 | 19-00155-01 | Heater Block 150mm | |
| 137 | 0067450500 | Ceramic Clamp Ring, 4″ | |
| 138 | 0067478200 | Ceramic Clamp Ring, 5″ | |
| 139 | 0068221600 | Ceramic Clamp Ring, 6″ | |
| 140 | 02-054574-00 | Assy. Holder, MOER Ring | |
| 141 | 15-00409-00 | Window, Pyrex | |
| 142 | 15-00866-00 | Ceramic Spring, 6″ | |
| 143 | 15-01025-00 | Ring, Cap , Manometer | |
| 144 | 15-028766-00 | Ring, Guard, 200mm | |
| 145 | 15-032016-00 | Pin, Vented for Htr. Block | |
| 146 | 15-032502-00 | Pin, Wafer Lift | |
| 147 | 15-032777-00 | Excl Ring, 200mm, 2.0mm, OH, Semi | |
| 148 | 15-032939-00 | Excl Ring, 200mm, 2.25mm, OH, Semi | |
| 149 | 15-033947-00 | Protective E-Chuck Cover, Ceramic (PEC) | |
| 150 | 15-034333-00 | Tube, Process Injector | |
| 151 | 15-034333-00 | Tube, Process Injector, SPEED, 4.13″ | |
| 152 | 15-050160-15 | Tube, Injector, High Purity, 1.5″ | |
| 153 | 15-052619-00 | Ceramic Tong, 8″ | |
| 154 | 15-053271-02 | Injector 8″ Long Clean, 300mm | |
| 155 | 15-053394-04 | Dimpled Fork Finger, 8″ | |
| 156 | 15-054434-01 | Excl Ring, 200mm, 3.0mm, OH, Semi | |
| 157 | 15-054583-00 | Clip Retaining, MOER Holder | |
| 158 | 15-054595-00 | Screw, Ceramic, 1/4-28, Guide | |
| 159 | 15-055546-04 | Pin, Wafer Lift | |
| 160 | 15-100263-00 | Robot Paddie, Ceramic | |
| 161 | 15-100603-00 | Insulator, Gas Dist. | |
| 162 | 15-103651-00 | Ring, Guard, Counterbore, 200mm, High Purity | |
| 163 | 15-104289-00 | Wheel Block, Ped, Ceramic | |
| 164 | 15-10715-00 | Altus Ceramic Ring (no holes) 2.0mm | |
| 165 | 15-107698-00 | Cap. Ceramic, Feedthru | |
| 166 | 15-108330-00 | Ceramic Spring, 8″ | |
| 167 | 15-112447-02 | I Pin for W-Dep Heater Pedestal | |
| 168 | 15-11263-02 | View Port Window, STI, Quartz with Sapphire Coating | |
| 169 | 15-11507-00 | Excl Ring, 200mm, 1.5mm, OH, Semi | |
| 170 | 15-11606-00 | Insulator, Gas Dist | |
| 171 | 15-120150-01 | Nanofill injector, 2.3″ | |
| 172 | 15-120150-03 | Nanofill Injector, 0.50″ | |
| 173 | 15-120150-04 | Nanofill Injector, 2.8″ | |
| 174 | 15-122086-00 | Clampable E-Chuck Cover, (C-PEC w/OD Flat) | |
| 175 | 15-122178-00 | 300mm Carrier Ring | |
| 176 | 15-123086-01 | Tube, Injector, 7.5″, Closed End Long | |
| 177 | 15-144133-00 | Excl Ring, 200mm, 2.75mm, OH, Semi | |
| 178 | 15-149982-01 | Non Copper Guard Ring, 300mm | |
| 179 | 15-151243-00 | Tube, THK, Cleaning, High Purity, 4.13″ | |
| 180 | 15-158026-00 | Injector, 1″ FSG SPEED 300mm | |
| 181 | 15-158185-00 | Nanofill II Clean Tube | |
| 182 | 15-169666-00 | Tube, Injector, Long Closed Tube STI/PSG | |
| 183 | 15-169667-00 | Injector Short Open Tube STI/PSG | |
| 184 | 15-250453-00 | Plug, Sapphire | |
| 185 | 15-250878-00 | Screw, Holder, Retaining | |
| 186 | 15-251847-00 | Injector Short Closed Tube STI/PSG | |
| 187 | 15-256742-00 | Ring, Ceramic with Arc Spray | |
| 188 | 15-278968-00 | Injector Short, Honeycomb, STI/PSG | |
| 189 | 22-100613-00 | MCA Ball, Sapphire, 3/16′ Diameter | |
| 190 | 17-103987-00 | Strap RF | |
| 191 | 15-00401-00 | Shaft Spindle | |
| 192 | 31-00114-00 | Relay, Crydom 90A | |
| 193 | 22-00288-00 | T Seal, Viton, Teflon Backing | |
| 194 | 02-045721-00 | 6″ Heater Pedestal Refurb | |
| 195 | 02-033134-00 | 8″ Heater Pedestal Refurb | |
| 196 | 15-00399-03 | HEX Head Bolt, Nickel | |
| 197 | 15-00457-00 | HEX Head Bolt, Nickel | |
| 198 | 15-00457-00 | HEX Head Bolt, Nickel | |
| 199 | 15-00341-00 | HEX Head Bolt, Nickel | |
| 200 | 15-00372-00 | Nickel 1/4″ Flat Washer | |
| 201 | 15-00385-00 | Nickel 10-32 HEX Nut | |
| 202 | 15-00401-00 | Spindle Shaft | |
| 203 | 15-00371-00 | Nikel 1/4-28 HEX Nut | |
| 204 | 15-00293-01 | Left Support Bracket | |
| 205 | 15-00293-02 | Right Support Bracket | |
| 206 | 20-00222-00 | Washer Heater Block Strap | |
| 207 | 15-00698-00 | HEX Head Bolt, Nickel | |
| 208 | 15-00699-01 | Fork Finger | |
| 209 | 15-130746-01 | Fork, Finger, Min Contact Area | |
| 210 | 15-053394-03 | Fork, Finger, Min Contact Area | |
| 211 | 02-111903-0 | Feedthru Assembly, Heater | |
| 212 | 27-10114-00 | Feedthru Assembly, Heater | |
| 213 | 19-00056-00 | Feedthru Assembly, Heater | |
| 214 | 15-108307-00 | Clamp, RF Strap | |
| 215 | 15-114331-00 | Screw Cap, 1/4-20 X .50 LG, NI | |
| 216 | 15-103913-02 | Clamp, Strap, Feedthru | |
| 217 | 15-00935-00 | Screw, 10-32 X .50 LG, VTD, NI | |
| 218 | 17-101-596-00 | Retainer, Fork, SEQ | |
| 219 | 15-101482-00 | Fork Top PLT A Antideflect SEQ | |
| 220 | 15-101482-01 | Fork Top PLT B Antideflect SEQ | |
| 221 | 15-101482-02 | Fork Top PLT C Antedeflect SEQ | |
| 222 | 15-11188-00 | Window, Hatch, TM DLCM | |
| 223 | 15-00830-00 | Fitting, 90 DEG, 3/8″ Tube | |
| 224 | 15-032452-00 | Window, Lexan, Chamber | |
| 225 | 15-00839-00 | Screw, 1/4-20 X .90 Vented, NI | |
| 226 | 15-000948-00 | Screw, Pedestal Heater | |
| 227 | 15-01104-00 | Screw, 10-32 X .75, Nickel | |
| 228 | 00-674505-00 | Ceramic Clip Ring, 4″ | |
| 229 | 00-674782-00 | Ceramic Clip Ring, 5″ | |
| 230 | 00-682216-00 | Ceramic Clip Ring, 6″ | |
| 231 | 04-264557-00 | Ceramic Plasma Tube, Dry Etch. | |
| 232 | 05-3024 | Tube Quartz Funnel, Gasonic | |
| 233 | 06-2619 | Plate Quartz TRI Adaptor | |
| 234 | 14738-01 | Bubbler Quartz | |
| 235 | 16337-02 | Collar Quartz | |
| 236 | 06-2793. | Window Quartz | |
| 237 | A06-005-01 | Quartz Shower Head 5″ | |
| 238 | 15-032014-01 | Window Quartz Etch Resistant | |
| 239 | 472-17286-200 | Ring Retaining Carrier 200mm N/Lip PPS (Quadrant) | |
| 240 | Quartz Tube | ||
| 241 | 22-00234-00 | O-RING, 7.48″ X 0.139″, VITON, 150M | |
| 242 | 22-00235-00 | O-RING, 30.12″ X 0.275″, VITON, 150 | |
| 243 | 22-00236-00 | O-RING, 7.45″ X 0.275″, VITON, 150M | |
| 244 | 22-00053-00 | O-RING, 0.676″ X 0.070″, VITON | |
| 245 | 22-00118-00 | O-RING, 1.234″ X 0.139″, VITON | |
| 246 | 22-00134-00 | O-RING, LL WINDOW, 5.975″ X 0.210″, | |
| 247 | 22-00136-00 | O-RING, LL LEFT PLATE, 15.475″ X 0.275,B | |
| 248 | 22-00152-00 | O-RING, 4.600″ X 0.210″, BUNA | |
| 249 | 22-00176-00 | O-RING, 12.975″ X 0.139″, BUNA | |
| 250 | 22-00217-00 | O-RING, 0.484″ X 0.139″, VITON | |
| 251 | 22-00326-00 | O-RING, 27.18″ X 0.275″, BUNA | |
| 252 | 22-00657-00 | O-RING, 7.975″ X 0.210″, KALREZ | |
| 253 | 22-00239-00 | O-RING, 5.984 x 0.139, VITON | |
| 254 | 22-00345-00 | O-RING, 0.362 x 0.170, VITON | |
| 255 | 22-00725-00 | O-Ring, Cooling Station | |
| 256 | 22-00174-00 | O-Ring, 6.234″ x 0.139″, Viton | |
| 257 | 22-00256-00 | O-Ring, 3 1/2″ ID x 3 3/4″ OD x 1/8″ W | |
| 258 | 22-00021-01 | O-Ring, 1.984 x 0.139, Buna | |
| 259 | 22-00344-00 | O-Ring, 0.364 x 0.070, Viton | |
| 260 | 22-00391-00 | O-Ring, 0.864 x 0.070, Viton | |
| 261 | 06-2735. | Quartz Tube | |
| 262 | A06-012-01 | Quartz Diffusion Disc | |
| 263 | 40-055609-27 | Quartz Rod HDP | |
| 264 | Plasma Tube Strate | ||
| 265 | 04-128956-00 | 12″ Welded Bellow (Novellus) | |
| 266 | 15-151683-00 | Sapphire Window | |
| 267 | 40-055609-26 | Rod (Pin) Quartz , SPEED | |
| 268 | 15-032014-01 | Window Quartz Etch Resistant Coated | |
| 269 | 15-01050-01 | Shims Paddle .002 THK | |
| 270 | 15-01050-02 | Shims Paddle .003 THK | |
| 271 | 15-01050-03 | Shims Paddle .005 THK | |
| 272 | 17-00094-00 | Strap RF | |
| 273 | 22-00630-00 | O-Ring Kit Gate Valve | |
| 274 | 22-00744-00 | Valve Diaphragm 1/8″ VCR Liquid | |
| 275 | 22-00745-00 | Filter 1/8″ VCR 0.5 Micron | |
| 276 | 27-032653-00 | RF Match | |
| 277 | 93-2657 | Doubble Bore Lamp, Ultra Violet | |
| 278 | 02-00170-00 | Wafer on Paddel | |
| 279 | 06-2624 | Disk 4.00 x .031 W/Hole | |
| 280 | 06-2625 | Disk 4.00 x .031 W/Hole | |
| 281 | 06-2626 | Disk 4.00 x .031 W/Hole | |
| 282 | 06-2627 | Disk 1.000 x .031 | |
| 283 | 06-2628 | Tube .394 x .039 x .200 | |
| 284 | 06-2629 | Disk W/Holes 4.0 | |
| 285 | 06-2654 | Disk 1.000 x .031 W/Hole | |
| 286 | 06-2697 | Annulus 3.26 x 6.145 | |
| 287 | 06-2707 | Tube 1.168 x 0.64 x 1.250 | |
| 288 | 06-2719 | Rod 0.1181 x 2.85 | |
| 289 | 06-2725 | Plasma Tube 1.95 x .10 x 2.19 | |
| 290 | 06-2726 | Showerhead | |
| 291 | 06-2753 | Disk 1.250 x .125 | |
| 292 | 15-054277-02 | Rod 0.125 x 4.340 | |
| 293 | 15-054296-00 | Rod 0.1830 x .190 | |
| 294 | 15-00641-00 | Window 2.306 x 7.125 x .123 | |
| 295 | 15-00641-00N | Window 2.306 x 7.125 x .123 | |
| 296 | 15-104288-00 | Rod “Lift Pin” .187 x .400 | |
| 297 | 15-109369-00 | Rod Lift Pin | |
| 298 | 15-110411-00N | Window Sapphire Concept 1 10.25 x 3.0 x .250 | |
| 299 | 15-111482-00 | Window 1.17 x 10.25 | |
| 300 | 15-122274-00 | Rod 0.123 x 5.180 | |
| 301 | 15-133091-00 | Rod 0.123 x 5.180 | |
| 302 | 15-136420-00 | Rod 0.123 x 4.702 | |
| 303 | 15-136420-00N | Rod 0.123 x 4.702 | |
| 304 | 15-136420-01 | Rod 0.123 x 4.702 | |
| 305 | 15-170594-00 | Disk 1.95 x .031 | |
| 306 | 15-251538-00 | Disk 4.4 | |
| 307 | 15-257351-00 | Pin | |
| 308 | 15-288460-00 | Lift Pin 0.1875 x 1.00 | |
| 309 | 22-054580-00 | Ball. | |
| 310 | 22-100613-02 | Ball. | |
| 311 | 19-00111-00 | Lead Screw | |
| 312 | 03-00135-00 | Assy Cable 141 | |
| 313 | 15-00578-00 | Heater Feedthrough Ceramic Top Hat | |
| 314 | 22-00324-00 | Seal Lip for Robot EXT | |
| 315 | 15-01136-00 | Bracket Arm | |
| 316 | 22-00155-00 | O-Ring 2-231 LL Roughing Line to LL Floor | |
| 317 | 22-00333-00 | O-Ring 10.81 WTM to LL Floor Inner | |
| 318 | 22-00434-00 | O-Ring 010 1/4″ VCO Seal | |
| 319 | 2-343-V75 | O-Ring Centering Viton 2-343 75 Duro KF40 326 | |
| 320 | 19-00155-01 | Heater Block 150mm | |
| 321 | 16-271392-00 | Shower Head 300mm | |
| 322 | 16-277520-00 | Shower Head 13″ | |
| 323 | A06-014-01 | Quartz GDP Lower | |
| 324 | 19-00147-00 | Gear EXT. | |
| 325 | 34-00133-00 | Sealant Teflon FT | |
| 326 | 60-00091-00 | CYL, 1 1/8 Bore Bun A-N | |
| 327 | 60-00180-00 | Vacuum Transducer 25KF Flange | |
| 328 | 05-2911 R1 | Weldment plate bottom | |
| 329 | 05-3024 R5 | Tube funnel | |
| 330 | 06-0012-03 RH | H Injector | |
| 331 | 06-0032 | Baffle injector | |
| 332 | 06-0060-01 R1 Wafer cassete | Wafer Cassete | |
| 333 | 06-0091 R C | Chamber plasma | |
| 334 | 06-0111 R E | Boat 200mm VHP | |
| 335 | 06-0118 R D | Boat wafers 100mm | |
| 336 | 06-0124 R 2 | Cap ball | |
| 337 | 06-01132 R 3 | Coupling 2-Way | |
| 338 | 06-01142 Plate middle shower | Plate Middle Shower | |
| 339 | 06-0152 R B | Shower head 6″ bottom | |
| 340 | 06-2431 R B | Pin cool STA .030head | |
| 341 | 06-2456 R A | Tube plasma | |
| 342 | 06-2486 R 1 | Plate pattern | |
| 343 | 06-2510 R 3 | Plate Top upper | |
| 344 | 06-2511 R 2 | Tubing 10×12 | |
| 345 | 06-2514 R 1 | Plate bottom | |
| 346 | 06-2516 R 1 | Plate Top | |
| 347 | 06-2521 R A | Plate 4.08 OD x 1.25ID | |
| 348 | 06-2545 R A | Spool plasma | |
| 349 | 06-2561 R 4 | Isolating plate | |
| 350 | 06-2567 -0 R A | Bottom isolating ring | |
| 351 | 06-2567 R A | Isolating plate ring carrier | |
| 352 | 06-2568 R C | Centering ring | |
| 353 | 06-2570 R C | Shower head 1.580 ID | |
| 354 | 06-2571 R 1 | Paid load rock | |
| 355 | 06-2576 R A | Boat 150mm wafer 81 slots | |
| 356 | 06-2583 R 2 | Pin lift | |
| 357 | 06-2592 R A,B,C,D | Shower head 1.83 ID | |
| 358 | 06-2593 R A | Centering ring 150mm | |
| 359 | 06-2598 R A | Pin lift | |
| 360 | 06-2599 R A Plate 4.08OD x 1.75 ID | Plate 4.08 OD x 1.75 ID | |
| 361 | 06-2606 R B | Boat 81 slots | |
| 362 | 06-2612 R B | Key isolating plate | |
| 363 | 06-2619 R A | Plate tri adaptor | |
| 364 | 06-2620 R A | Pin plug | |
| 365 | 06-2632 R A | Cap isolator | |
| 366 | 06-2640 R C | Spool plasma | |
| 367 | 06-2697 R A | Quartz spool plasma | |
| 368 | 06-2694 R B | Chamber plasma plus | |
| 369 | 06-2704 R A | Plate gas dist.200mm | |
| 370 | 06-2705 R 2 | Liner quartz | |
| 371 | 06-2706 R B | Cooler PEP plus | |
| 372 | 06-2724 R A | Isolating plate | |
| 373 | 06-2736 R A | Plate gas dist. 200mm | |
| 374 | 06-2737 R A | Plate gas dist. | |
| 375 | 06-2793 R A | Window quartz tray | |
| 376 | 15-100641-00 | Window viewport inner | |
| 377 | 15-161439-00 | Plate isolation | |
| 378 | 15-164628-00 | View port | |
| 379 | 15-303151-00 | Window EBR | |
| 380 | 15-336516-00 | Orifice diffusion | |
| 381 | 15-337510-00 | Orifice diffusion | |
| 382 | 15-337511-00 | Orifice diffusion | |
| 383 | 15-345274-00 | Orifice diffusion | |
| 384 | 14738-01 R F | Bubbler | |
| 385 | 15367-01 | Lift Pin Quartz | |
| 386 | 16337-01 | Quartz coolar | |
| 387 | 16359-01 | Quartz plasma chamber | |
| 388 | 16532-01 | Plate lamp | |
| 389 | 16784-01 | Quartz spool | |
| 390 | 17289-01 | Pin lift | |
| 391 | 17291-01 | Pin cool | |
| 392 | 17302-01 | Weldment top shower head | |
| 393 | 17303-01 | Plate middle shower | |
| 394 | 17304-01 | Weldment bottom | |
| 395 | 17621-01 | Plate Gas Dist. | |
| 396 | 17622-01 | Plate diffuser lamp 4″ | |
| 397 | 17688-01 | Plate gas dist.200mm | |
| 398 | A06-001-01 | Window | |
| 399 | A06-002-01 | Window | |
| 400 | A06-010-01 | Tube plasma | |
| 401 | A06-012-01 | Diffusion disc | |
| 402 | A06-014 RE | Quartz shower head | |
| 403 | A06-300-01 | Quartz window 9.5″ | |
| 404 | A06-301-01 | Quartz window 10″ | |
| 405 | A78-097-01 | O-Ring, Viton, MV/PC Isol valve body | |
| 406 | A78-098-01 | O-Ring, Viton, SS/Equal/Man Isol valve | |
| 407 | 15-392383-00 | Nozzle Ceramic | |
| 408 | 15-302588-00 | Membrene (Cationic) Filter | |
| 409 | 15-336064-00 | Bell Jar C3 SPD | |
| 410 | 02-277948-00 | ||
| 411 | 10-363935-00 | Tub | |
| 412 | 02-136089-00 | Assy Lift Pin Acturator VCTR | |
| 413 | 02-324753-00 | 300mm Spindle (Oil Type) | |
| 414 | 02-130617-00 | 300mm Spindle (Gear Motor Type) | |
| 415 | 02-159137-00 | 300mm Spindle (Gear Motor Type) | |
| 416 | 02-259783-00 | PED Lift Assy Preheat C3VCTR 300mm | |
| 417 | 02-160858-00 | Lift Assy Cool Pedestal Loadlock 300mm | |
| 418 | 02-288189-00 | Lift Pin Actuator 300mm | |
| 419 | 02-159939-00 | ESC Bellows 4 ST PED INC625 300mm | |
| 420 | 63-136020-01 | Load Lock to DCVS Valve 300mm | |
| 421 | 16-253739-00 | Gas Ring 300mm | |
| 422 | 16-159939-00 | ESC Bellows 4.00 Stroke Pending 625 300mm | |
| 423 | 15-270165-00 | ESC Pink 300mm | |
| 424 | 60-119292-00 | Valve Gate 2.50″ Vat | |
| 425 | 60-135033-00 | RGV VAT V/V | |
| 426 | 22-123479-36 | Tubing Flex 321SS 1/4 x 36 LG FMR | |
| 427 | 22-141803-00 | DI Chiller Filter S21D0008 | |
| 428 | 02-300478-00 | Inova Heater 300mm | |
| 429 | 16-343016-00 | Inova Heater 300mm | |
| 430 | 16-118351-01 | Pedestal Bellows 300mm | |
| 431 | 16-128855-00 | Back Side AR Bump Bellows 300mm | |
| 432 | 02-109622-00 | Assy Lift Pin Actuator 300mm | |
| 433 | 16-100488-00 | Showerhead 300mm | |
| 434 | 16-150325-00 | Mixing Unit 300mm | |
| 435 | 60-052581-00 | Valve Vat Type L,50mm x 336mm | |
| 436 | 63-136020-01 | SMC TM To Chamber Valve | |
| 437 | 02-259783-00 | Pedestal Lidt Assy Preheat 300mm | |
| 438 | 02-324753-00 | 300mm Spindle (Oil Type) | |
| 439 | 02-130617-00 | 300mm Spindle (Gear Motor Type) | |
| 440 | 02-159137-00 | 300mm Spindle (Gear Motor Type) | |
| 441 | 02-134263-00 | Novellus ESC Referb | |
| 442 | 15-033946-00 | Cover Plate Quartz | |
| 443 | 15-050160-41 | Tube Injector Hi-Purity | |
| 444 | 15-118123-00 | Ceramic Ring INOVA 300mm Large | |
| 445 | 06-2794 | Quartz Plasma Tube | |
| 446 | 10-042678-00 | Tube Assy Injector | |
| 447 | 02-106507-00 | (C2) Spindle 8″ | |
| 448 | 05-113897-00 | (C1) Spindle 8″ | |
| 449 | 02-307391-00 | New Novellus Speed Dome | |
| 450 | 02-042566-00 | New Novellus Speed Dome | |
| 451 | 03-00258-00 | Shower Head | |
| 452 | 19-024227-00, 02 | Heater Block | |
| 453 | 19-00154-00, XX | Heater Block | |
| 454 | 15-046814-00 | Gas Ring | |
| 455 | 16-103973-00 | Turbo Screen | |
| 456 | 15-276648-00 | Distribution | |
| 457 | 15-169646-00 | Nozzle | |
| 458 | 15-169647-00 | Nozzle |
ID-SS5302-2ND
S
