Description
New Semitool 880 Spin Rinse Dryer (SRD) for 8″ / 200mm Wafers
The new Semitool 880 is a brand new Double Stack Spin Rinse Dryer (SRD) designed for high-throughput processing of 8″ / 200mm wafers in low-profile cassettes. With two fully independent chambers, the 880 model allows for redundant operation, enabling one chamber to remain active during maintenance on the other.
Each chamber is equipped with a new Controller, featuring:
- N2 Saver Option to reduce nitrogen consumption during idle periods
- SECS/GEM compatibility
- Recipe storage for up to 20 processes
- Spin speed and DI resistivity monitoring
- Preventative maintenance alerts
- Integrated troubleshooting support
- Fail-state monitoring for anti-static, heater, and blanket systems
Key Features:
- Brand New
- Dual-Chamber Configuration for Redundancy
- Supports 8″ / 200mm Low Profile Cassettes
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SS5882
