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SemiStar Corp. Semiconductor Equipment Parts Service

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Plasma-Therm

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Plasma-Therm etchers

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Plasmatherm Versaline LACVD Etch System

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Plasma-Therm System VII Batchtop

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PlasmaTherm LAPECVD 1130

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8″ Plasmatherm Versaline ICP

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Plasmatherm PT530 PECVD

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Plasmatherm SL-730 PECVD

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Plasma Therm SLR 770 RIE

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Plasma Etching Equipment

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Plasma-Therm Versaline Deposition PECVD

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Plasma-Therm Versaline ICP -4 chambers

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Plasma-Therm 790 6″ RIE

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Plasma-Therm etchers

Plasmatherm Versaline LACVD Etch System

Plasma-Therm System VII Batchtop

PlasmaTherm LAPECVD 1130

8″ Plasmatherm Versaline ICP

Plasmatherm PT530 PECVD

Plasmatherm SL-730 PECVD

Plasma Therm SLR 770 RIE

Plasma Etching Equipment

Plasma-Therm Versaline Deposition PECVD

Plasma-Therm Versaline ICP -4 chambers

Plasma-Therm 790 6″ RIE