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OEMs: AG Associates
Branson/IPC
Brooks Equipe PRI
CHA
Ekrubnano
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Matrix
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NanoMaster
Oxford
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PlasmaTherm
Premtek
STS SPTS
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SemiStar Corp. Semiconductor Equipment Parts Service

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7310-2904-03 or 7310-2904-06

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Electroglas wafer prober support

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AST/Steag/ Mattson Parts Service

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Diffusion heater elements

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Carriers, Boxes, and Handles

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Super K-SiC RTP Susceptor

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Robot Controller Pre-Aligner

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Quartz for Furnace LPCVD

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Chiller Heat Exchangers

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LAMP PWR CNTL

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Tegal RF Matching

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Tel Chamber Parts

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Navigation

7310-2904-03 or 7310-2904-06

Electroglas wafer prober support

AST/Steag/ Mattson Parts Service

Diffusion heater elements

Carriers, Boxes, and Handles

Super K-SiC RTP Susceptor

Robot Controller Pre-Aligner

Quartz for Furnace LPCVD

Chiller Heat Exchangers

LAMP PWR CNTL

Tegal RF Matching

Tel Chamber Parts