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Tegal spare parts

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Semiconductor Tegal equipment spare parts . These are only for END USERS. Please contact us for the availability of  the following Semiconductor Tegal equipment spare parts .  Subject to prior sale. Appreciate your time! 

2 Tegal 02780-55 Bracket PIVOT SST
3 Tegal 03458 B Cover Speed control BD
4 Tegal 03458 C Cover SPEED Control BD
5 Tegal 04-709847-01
6 Tegal 11190-01 Standoff Upper 915 Chamber
7 Tegal 11191-01 Standoffer Lower 915 Chamber
8 Tegal 2050-02 Panel Remote Control, 9XX
9 Tegal 30-122-001
10 Tegal 31-236-001
11 Tegal 31-388-001
12 Tegal 33-085-002
13 Tegal 33-167-004
14 Tegal 33-350-001
15 Tegal 33-411-002
16 Tegal 37-221-001 F
17 Tegal 37-221-001 G
18 Tegal 37-221-002 A
19 Tegal 37-221-003S
20 Tegal 38-023-001
21 Tegal 39-046-002
22 Tegal 39-336-018
23 Tegal 39-341-004
24 Tegal 39-342-001
25 Tegal 39-344-010
26 Tegal 39-347-003
27 Tegal 39-350-002
28 Tegal 39-352-100
29 Tegal 39-358-001
30 Tegal 39-359-001
31 Tegal 39-361-001
32 Tegal 39-363-001
33 Tegal 39-373-002 B
34 Tegal 39-376-001
35 Tegal 39-379-001
36 Tegal 39-381-001
37 Tegal 39-382-001
38 Tegal 39-397-001
39 Tegal 39-402-001
40 Tegal 39-409-001
41 Tegal 39-420-002
42 Tegal 39-425-001
43 Tegal 39-428-001
44 Tegal 39-429-001
45 Tegal 39-431-002 A
46 Tegal 39-431-002 B
47 Tegal 39-436-001
48 Tegal 39-436-999
49 Tegal 39-443-001
50 Tegal 39-450-001
51 Tegal 39-522-001
52 Tegal 39-525-001
53 Tegal 39-531-001
54 Tegal 39-531-001 2
55 Tegal 39-531-001 3
56 Tegal 39-531-001 4
57 Tegal 39-563-001
58 Tegal 39-563-001
59 Tegal 39-626-001
60 Tegal 39-627-002
61 Tegal 39-627-004
62 Tegal 39-627-006
63 Tegal 39-627-ZB2
64 Tegal 39-633-001
65 Tegal 39-639-001
66 Tegal 39-654-001
67 Tegal 39-680-003
68 Tegal 39-680-004
69 Tegal 39-682-001
70 Tegal 39-683-001
71 Tegal 39-711-001
72 Tegal 39-717-001
73 Tegal 39-729-001
74 Tegal 39-731-001
75 Tegal 39-732-001
76 Tegal 39-735-003
77 Tegal 39-735-004
78 Tegal 39-735-XXA
79 Tegal 39-735-ZB4
80 Tegal 39-750-001
81 Tegal 39-751-001
82 Tegal 39-756-001
83 Tegal 39-761-001
84 Tegal 39-815-001M
85 Tegal 39-815-003
86 Tegal 39-815-003M
87 Tegal 39-818-001
88 Tegal 39-819-001
89 Tegal 39-846-001
90 Tegal 39-847-001
91 Tegal 39-847-002
92 Tegal 39-847-003
93 Tegal 39-847-004
94 Tegal 39-848-001
95 Tegal 39-848-001 B
96 Tegal 39-848-004
97 Tegal 39-848-005
98 Tegal 39-852-001
99 Tegal 39-852-002
100 Tegal 39-852-004
101 Tegal 39-852-005
102 Tegal 39-853-002
103 Tegal 39-853-004
104 Tegal 39-853-005
105 Tegal 39-854-001A
106 Tegal 39-854-001B
107 Tegal 39-854-001C
108 Tegal 39-855-001
109 Tegal 39-856-001
110 Tegal 39-857-001B
111 Tegal 39-858-001
112 Tegal 39-860-001B
113 Tegal 39-868-001
114 Tegal 39-869-001
115 Tegal 39-870-001
116 Tegal 39-872-001
117 Tegal 39-900-001 B
118 Tegal 39-926-001
119 Tegal 39-928-001
120 Tegal 39-929-001 Missing 2 of 2
121 Tegal 39-954-001
122 Tegal 39-954-002
123 Tegal 39-954-004
124 Tegal 40-014-001B
125 Tegal 40-017-002
126 Tegal 40-027-001
127 Tegal 40-046-001
128 Tegal 40-133-001
129 Tegal 40-141-001
130 Tegal 40-162-001
131 Tegal 40-176-001
132 Tegal 40-178-001
133 Tegal 40-227-001
134 Tegal 40-238-001
135 Tegal 40-283-004
136 Tegal 40-284-004
137 Tegal 40-287-001
138 Tegal 40-297-002C
139 Tegal 40-304-001
140 Tegal 40-309-001
141 Tegal 40-366-001
142 Tegal 40-374-001
143 Tegal 40-374-002
144 Tegal 40-374-004
145 Tegal 40-395-001
146 Tegal 40-437-001
147 Tegal 40-437-003
148 Tegal 41-040-001
149 Tegal 41-041-001
150 Tegal 41-049-001
151 Tegal 41-050-001
152 Tegal 41-051-001
153 Tegal 41-072-001
154 Tegal 41-103-001
155 Tegal 41-104-005
156 Tegal 41-112-001
157 Tegal 41-118-003
158 Tegal 41-127-001
159 Tegal 41-136-003
160 Tegal 41-136-004
161 Tegal 41-137-001
162 Tegal 41-172-001
163 Tegal 41-175-001
164 Tegal 41-176-001
165 Tegal 41-177-001
166 Tegal 41-189-001
167 Tegal 41-190-001
168 Tegal 41-193-001
169 Tegal 41-206-001 3
170 Tegal 41-207-001 4
171 Tegal 41-209-001
172 Tegal 41-214-001 TSI
173 Tegal 41-214-002 SPI
174 Tegal 41-214-002 TSI
175 Tegal 41-214-003 TSI
176 Tegal 41-214-004 TSI
177 Tegal 42-185-003
178 Tegal 42-275-005
179 Tegal 42-282-002 C
180 Tegal 42-293-001
181 Tegal 42-323-001
182 Tegal 42-324-001
183 Tegal 42-325-001
184 Tegal 42-326-001
185 Tegal 42-326-002
186 Tegal 42-328-002
187 Tegal 42-331-002
188 Tegal 42-333-001
189 Tegal 42-335-001
190 Tegal 42-335-002
191 Tegal 42-346-002
192 Tegal 42-359-001
193 Tegal 42-360-001
194 Tegal 42-362-001
195 Tegal 42-370-001
196 Tegal 42-406-001
197 Tegal 42-417-001
198 Tegal 42-431-001
199 Tegal 42-446-001
200 Tegal 42-456-002
201 Tegal 42-493-001
202 Tegal 42-501-001
203 Tegal 42-509-003
204 Tegal 42-513-002
205 Tegal 42-532-001
206 Tegal 42-535-001
207 Tegal 42-542-001
208 Tegal 42-553-001
209 Tegal 42-583-002
210 Tegal 42-603-001
211 Tegal 42-663-001
212 Tegal 42-725-001A
213 Tegal 42-725-001M
214 Tegal 42-730-001
215 Tegal 44-200-001
216 Tegal 44-202-001
217 Tegal 44-203-001
218 Tegal 44-205-001
219 Tegal 44-206-001
220 Tegal 44-207-001
221 Tegal 44-208-005 A
222 Tegal 44-234-001
223 Tegal 44-258-002
224 Tegal 44-260-002
225 Tegal 44-263-002
226 Tegal 44-339-002
227 Tegal 44-340-001
228 Tegal 44-343-001
229 Tegal 44-366-002
230 Tegal 44-375-001
231 Tegal 44-396-001
232 Tegal 44-397-001
233 Tegal 44-400-001
234 Tegal 44-432-002
235 Tegal 44-462-001
236 Tegal 44-463-002
237 Tegal 44-468-003
238 Tegal 44-475-001
239 Tegal 44-536-002
240 Tegal 44-536-003
241 Tegal 45-542-100
242 Tegal 46-239-001
243 Tegal 46-272-003
244 Tegal 46-278-002
245 Tegal 46-279-001
246 Tegal 46-281-001
247 Tegal 46-282-001
248 Tegal 46-285-001
249 Tegal 46-316-001
250 Tegal 46-323-001
251 Tegal 46-437-001
252 Tegal 46-473-001
253 Tegal 46-475-001
254 Tegal 46-511-001
255 Tegal 46-569-004
256 Tegal 46-571-001
257 Tegal 46-577-001
258 Tegal 46-578-001
259 Tegal 46-606-001
260 Tegal 47-084-003
261 Tegal 47-105-001
262 Tegal 47-114-001
263 Tegal 47-115-001
264 Tegal 47-119-003
265 Tegal 47-120-003
266 Tegal 47-121-001 A
267 Tegal 47-121-001 A
268 Tegal 47-121-001 B
269 Tegal 47-128-001
270 Tegal 47-158-001
271 Tegal 47-159-001
272 Tegal 47-160-001
273 Tegal 47-161-001
274 Tegal 47-294-001
275 Tegal 49-007-001
276 Tegal 49-024-001
277 Tegal 49-026-001
278 Tegal 49-027-001
279 Tegal 49-027-002
280 Tegal 49-028-001
281 Tegal 49-031-001
282 Tegal 49-047-001
283 Tegal 50-022-001
284 Tegal 50-032-001
285 Tegal 51-038-002
286 Tegal 51-092-001
287 Tegal 51-093-002
288 Tegal 51-093-003
289 Tegal 51-112-001B
290 Tegal 51-160-001
291 Tegal 51-167-001A
292 Tegal 51-167-001B
293 Tegal 52-041-001
294 Tegal 52-045-001
295 Tegal 52-046-001
296 Tegal 52-047-001
297 Tegal 52-047-002
298 Tegal 52-048-001
299 Tegal 52-054-001
300 Tegal 52-055-001
301 Tegal 52-057-001
302 Tegal 52-057-002
303 Tegal 52-058-002
304 Tegal 52-059-001
305 Tegal 52-060-001
306 Tegal 53-055-001
307 Tegal 5598-010 Door, Indexer Access
308 Tegal 5598-020 Block Sticker Plate
309 Tegal 5598-030-Block Magnetic Catch
310 Tegal 5598-100 5
311 Tegal 56-039-001
312 Tegal 57-026-001
313 Tegal 59-011-001
314 Tegal 674-505-Ring Ceramic 5.17 OD
315 Tegal 98-105-01A
316 Tegal A98-0100 Taps Chamber Shield
317 Tegal Bracket Cable SUpport
318 Tegal BT9XXCHK 2
319 Tegal Ceramic Ring
320 Tegal F98-0100-Aligner Tap
321 Tegal GE SK-XPT-0289 Panel FACADE WALL TTW
322 Tegal GE SK-XPT-0290 FACADE DISPLAY TTW
323 Tegal GE03098A 2 TEE FEMAL 0.25NPT Extended Trunk
324 Tegal GE03098A TEE FEMAL 0.25NPT SST
325 Tegal GE03498A Bracket CTD Flowers
326 Tegal GE04498A Bracket Flower Futurestar Pathfinder
327 Tegal GE04498B BRKT SOLENOID SUPPORT FURN DV2
328 Tegal GE05298A Top Cover, TTW
329 Tegal GE05798A BRKT SOLENOID SUPPORT FURN DV2 w FUTURESTAR
330 Tegal GE091981 PLUG TEST PORT
331 Tegal GE10703-XX SPACER SHIELD POS DEV
332 Tegal GE107704 PANEL UPPER REAR 82 INCH
333 Tegal GE120981 GAGE BLOCK PE 500 600 HPC PRIMMARY MIRROR
334 Tegal GE120982 BASE DEPTH GAGE PE 500-600 HPC PRIMARY MIRROR
335 Tegal GE211981 DRIP COVER HARD
336 Tegal GE33498-1 BRACKET SUPPORT ULTRATORR
337 Tegal PIN Platform CAT WSKR
338 Tegal Reactor RF Feedthrough
339 Tegal SVG06626
340 Tegal TGL-Cover, PWR Distribution Box
341 Tegal TSI PC Design
342 Tegal TSI-0001 MACOR RING 4 INCH 903
343 Tegal TSI-0002 AL CERAMIC RING 6 INCH 903 CASTELLATED
344 Tegal TSI-0003 RING MACOR 4 INCH 15XX
345 Tegal TSI-0004 SAPPHIRE ROD
346 Tegal TSI-0006 A MANIFOLD , CHAMBER
347 Tegal TSI-0006 C MANIFOLD , CHAMBER
348 Tegal TSI-0007 RING INSULATOR CERAMIC
349 Tegal TSI-0008 RING INSULATOR CERAMIC
350 Tegal TSI-0019 CHUCK 3 INCH 901CHUCK SURFACE AND O-RING DETAIL
351 Tegal TSI-0020 RING AL 3 INCH
352 Tegal TSI-0025 RING, CERAMIC 4 INCH
353 Tegal TSI-0026 CHUCK, 4 INCH 903
354 Tegal TSI-0026M CHUCK 4 INCH 903 WITH FLAT
355 Tegal TSI-0028 CHUCK, 5 INCH 903
356 Tegal TSI-0029 CHUCK 901 4 INCH
357 Tegal TSI-0037 A
358 Tegal TSI-0037 B
359 Tegal TSI-0037 C
360 Tegal TSI-0038
361 Tegal TSI-0039 RING CERAMIC 5 INCH CASTELLATED
362 Tegal TSI-0042 RING MACOR 5 INCH 15XX
363 Tegal TSI-0043 CERAMIC RING 5 INCH 903
364 Tegal TSI-0044 MOD FLAT 4 INCH CHUCK
365 Tegal TSI-0044 RING CERAMIC 4 INCH CASTELLATED
366 Tegal TSI-0045 BACK PLATE SWITCH

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