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SUSS MicroTec MJB4 Mask Aligner

Description

SUSS MicroTec MJB4 Mask Aligner

Info from the owner:

  1. From an R&D facility in the USA
  2. Was complete and working Suss MicroTec MJB4 aligner.
  3. The unit has had light use in the R&D lab and never entered production.
  4. SUSS MicroTec MJB4
  5. Wafer size: 4” / 100mm
  6. Topside Alignment
  7. Exposure Modes: Vacuum, Low Vacuum, Hard, Soft, Flood exposure
  8. Objectives: 5x, 10x
  9. Lamphouse Wattage: 350 Watt
  10. Wavelength: 365nm
  11. Vacuum Chuck
  12. Mask holder
  13. Vibration Isolation Table
  14. Power: 230AC – 50/60Hz
  15. Vintage 2015
  16. Condition: Complete / working
  17. Status: De-installed in cleanroom

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