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OXFORD Plasmalab 800 Plus PECVD

Main Refurbished Equipment

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Description

Model OXFORD Plasmalab 800 Plus PECVD

Category:  PECVD

Original Equipment Manufacturer: Oxford

Condition:Refurbished

Price: Please contact us.

Valid Time: Subject to prior sale without notice

Lead Time: 8-12 weeks depending on PO time

Location: U.S.A.

Warranty: 7 months

  •  OXFORD Plasmalab 800 Plus PECVD
  • Set up for SiOx, SiNx, SiOxNy Deposition
  • Batch Process
  • 450mm Platen with 300°C+ heater
  • RF Power: 350W 13.56MHz and 300W 480KHz
  • Windows PC , user friendly interface
  • Gas pod with 6 lines including following MFCs:
    N2 – 1000sccm
    N2O – 100sccm
    N2O – 2000sccm
    NH3 – 100sccm
    SiH4 – 2000sccm

Please contact us for more information on the product:

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