Description
Oxford instruments Ionfab 300 Plus Ion Beam etching & deposition system:
- THE TOOL HAD 4 MFCs, only used ARGON to mill metal layers on SILICON wafers
- HAS 3cm gun,we did’nt sputter
- It holds 4, 4″ targets,
- HAS 15cm Gun for etching
- 200 mm tooling
Condition: Unit pulled from a working service, however due to lack of power supply unable to fully test. Sold As-Is. Complete,working,functional test or refurbished conditions are optional at extra cost.
Valid time: Subject to prior sale without notice.
Contact us (sales@semistarcorp.com) for more info pls. Appreciate your time.
ID-SS380-e
