Description
Please contact us for the Mattson Spare Parts availability of the following parts. Please include the P/N, Description, Quantity and photos if possible.
SS5302
| OEM PART #: | DESCRIPTION: |
| 544-00024-00 | Quartz Tube |
| 182-64000-00 | Cable Assy #301 |
| 456-09610-02 | Quartz Tube O-Ring (8/Pack) MA |
| 913-10031-00 | O-Ring 1.987 ID x .103 (OBE) |
| 913-10053-00 | Shuttle O-Ring (PKT-6) |
| 913-10031-00 | O-Ring 1.987 ID x .103 CS (PKT-8) |
| 58700001 | Quartz Process Tube |
| 57400009 | Liner Plate Bottom |
| 57600004 | GDP Rectangle |
| 57400010 | Liner Plate Bottom For Ripple |
| 58700001 | Quartz Insulating Tube |
| 58500023 | Quartz Pin |
| 58700002 | Process Chamber 8″ |
| 58900068 | Wafer Tray 6″ |
| 58700015 | Quartz Tube 8″ For Riple |
| 544-00024-00 | Quartz Plasma Tube |
| 57400002 | Liner Plate 8″ Top -124 |
| 58800003 | Tray Holder Quartz Elbow |
| 57600002 | GDP Trapezoid |
| 47800002 | Edge Gard Ring 6″ |
| 58500047 | Quartz Pin |
| 58700015 | Quartz Tube 8″ For Riple |
| 58500012 | Quartz Pins 13mm for Cooling Station |
| 58500029 | Quartz Fulcrum Top Part |
| 58600071 | Ring Basement |
| 58600007 | Quartz Fixing Part for Liner Plate |
| 57100012 | Quartz Door Apeture 6″ |
| 58500047 | Quartz Pin |
| 263-13415-00 | Showerhead CVD |
| 1001464 | Quartz Tube Mattson |
