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Lam Research Pumps/Chiller/TCUs

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We are dedicated to the continuous improvement and cost-reduction efforts of our customers by providing innovative products and services. We repair and refurbishment services on Lam Research equipment/modules/components/Parts. This includes the following Pumps/Chiller/TCUs, mechanical/transport assemblies, valves, RF matches, RF generatorsPCBs/ESC & DC Power Suppliers etc.. We also provide on-site technical support services and refurbishes, installs and sells Lam Research equipment, modules/components/Parts . These are only for end user and they are subject to prior sales. Check for Exchange Availability.

  1. HX 75;
  2. LAM 2080 TCU;
  3. M&W Dual Channel Chiller
  4. Adixen ATH 2800M Turbo Pump
  5. Edwards Turbomolecular Pump STP-XA2703

All the Lam  plasma etcher equipment  trademarks belongs to Lam Research , the original equipment manufacturer. The photo at this page is only for your reference. All rights reserved. 

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The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers