Description

Model: Lam 9600 FEFG                SOLD

Category:  Plasma Etch

Original Equipment Manufacturer: Lam Research

Condition:  Bagged & Skidded in Warehouse 

Process: Metal Etcher

Wafer Size: 8-inch

Valid Time: Subject to prior sale

Vintage: 1998

Serial Number:4206

Software Version: Version E1.5-released

CIM: CIM link ok

Missing/Faulty Parts / Accesorries List: N/A

Inspection: Against appointment after PO and payment.

 Hardware Configuration (Fab):

1. Main System: TCP9608 Metal Etcher   1 Unit
2. SMIF System: Integrated SMIF  2 Units
3. Handler System: Wafer notch alignment with spatula  1 Unit
4. Process Chambers: Ecthing    1 Unit ; Stripping  1 Unit; Rinse/spin dry  1 Unit
5. Loadlock:  1 Unit
6. RF generator 1250W : 3 Units
7. Manual WVDS controller: 1 Unit

Hardware Configuration (Subfab / Auxilliary Units):

1. Remote AC box  1 Unit
2. Ebara pumps 3 Units

Equipment Configuration in detail:

Main chamber
Turbo pump 1000litre with controller 1 set
E-chuck 1 unit
TCP RF Match 1 unit
Bias RF Match 1 unit
RF generator 2 unit
180 sccm CL2 MFC 1 unit
50 sccm BCL3 MFC 1 unit
200 sccm SF6 MFC 1 unit
100 sccm N2 MFC 1 unit
250 sccm O2 MFC 1 unit
100 sccm Ar MFC 1 unit
50 sccm He UPC 1 unit

Strip chamber
DSQ RF Match 1 unit
Heater Paddle 1 unit
RF generator 1 unit
Auto WVDS controller 1 unit
2000 sccm O2 MFC 1 unit
300 sccm N2 MFC 1 unit
500 sccm H2O MFC with controller 1 unit

Rinse/Dry
Spin dryer with vacuum chuck

Transport
Integrated SMIF 2 unit
Wafer notch aligner with spatula 1 unit
Harmonic arm drive assembly 2 unit

All the Lam Plasma Etcher equipment  trademarks belongs to Lam Research , the original equipment manufacturer. All rights reserved.