Description
Instrument Model: KLA Tencor Prometrix FT-650 Film Thickness Probe System
DEMO Service Rates and terms:
(1) Setup & Training Fee for In House Service: $450.00 ($150.00X3).
(2) Use the tool time rates: $150.00/hr
(3)Lead time: After payment, we will schedule time for the service. Normally the lead time is 1 to 2 weeks. Appreciate your time.
(4) We also sell the Prometrix FT-650 Film Thickness Probe System at complete, working, tested condition.
Configuration:
- Wafer Size: 3”, 3.25”, and 100, 125, 150, 200mm Wafer Capability
- Computer/Software: The FT-650 is a PC (486)-based optical film thickness probe system. 110M Hard Disk, a cartridge drive (44MB removable cartridges, for storing test configurations and collected data) and a 3.5 Floppy Disk drive for loading software updates. The control software is StatTrax.
- Tester (Cabinet): The tester is the “focal point” of the FT system. The tester includes the measurement optics, the video camera, the precision XY stage and its associated motors and controllers, the I/O electronics, and the computer.
- FT Tester (head, optical): It contains the mechanical and optical components for sample placement, sample viewing, scanning and measurement. A 70X video camera permits viewing of the sample measurement area.
- Wafer Stage: A very high precision sample stage performs the scan and permits X-Y positioning with 360 degree theta rotation.
- Printer (optional).
- Wafer Handler C2C (optional): The C2C is an automated wafer handler that transfers wafers between the tester and one or two cassettes containing up to 25 wafers each.
- Manual Controller (Keypad): The keypad controls wafer stage movement and image focusing during patterned wafer tests. It can be also used to position a test wafer in semi-automatic and manual modes.
- Objective Lens: Automatic 5-position rotating turret: 2.5x, 5x, 10x, 20x, 50x available
- Monitors: Color Video Monitor and Computer Monitor
- Line Conditioner: AC line noise protecter
- Additional Components for Auto Run (enable the pattern recognition capability): Cognex Vision System, Vision 3100 / Video Switch
- Light Source: Plug-in lamp source (50-0069), Tungsten-halogen lamp
Typical Specifications:
· Measurement range
- Oxide 70Å -4mm
- Nitrides/Oxynitrides 100Å -4mm
- Resists 500Å -4mm
- Transparent multilayer total sum 500Å -4mm for 3 layers
- Poly on Oxide 400Å to >8000Å poly on 400Å to >1700Å oxide
- Oxide on Aluminum 2500Å -3mm
- SOG need to select feasible optic filters (optional)
- Typical Accuracy: +/-1% of NIST certified range (at 500Å, 1000Å and 2000Å nominal thickness)
- Typical Repeatability: 5% or 5Å-1σ, whichever is greater, using the 5x objective lens
- Throughput: 50 monitor wafers per hour or 30 product (patterned) wafers per hour using automate pattern recognition capability
- Auto Focus Speed: 2-5 seconds
- Measurement Speed: 1.5-5 seconds typical per site
- Stage Size: 8.5” diameter
- Data Transfer: RS232 or SECS-II
- Analysis Capabilities:
- Mapping: Contour, 3-D and Die Maps
- Scanning: Diameter Scan
- Sampling: Quick Tests; user-definable tests
- StatTrax Software: Up to 729 definable test configurations per cartridge
Average, difference and ratio maps
Process control charts
Statistical calculations
Database management
Correlation Curves
- Power Requirements: 110/220Vac, 50-60Hz, <15A
- Vacuum: 20 inHg
- Shipping Weight: Complete FT-650: 700 lbs; Tester: 165 lbs
- Dimensions: Tester: 31″W x 18″D x 23″H
Complete FT-650: 36” W x 62″D x 62″H
The FT-650 Prometrix Film Thickness (FT) Probe System provides automated measurement and mapping of your wafer. The FT tester can measure single and multiple layers of oxide, nitride, photoresist, polysilicon, SOG and other transparent films from 100Å to 4um.
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