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EDWARDS E306A VACUUM COATING SPUTTER BELL JAR COATER

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EDWARDS E306A VACUUM COATING SPUTTER BELL JAR COATER w/ CRYO-TORR 100 CRYOPUMP—-SOLD

Manufacturers Specification:

Edwards E306A Vacuum Coater evaporation bell jar.

The Edwards E306A Thermal Evaporator will evaporate a metal film over a
semiconductor or metal substrate. The metal source to be evaporated is placed in a
filament or crucible, in which a large current is passed. The metal melts, and evaporates
on the target substrate above the source, producing a film.

 CTI-Cryogenics 8200 Compressor:
The 8200 compressor is designed to provide optimum performance with On-Board
Cryopumps, On-Board Water pumps and Cryo-Torr Cryopumps.
The 8200 compressor supports all pumps up to eight inches in size and is designed for
flexibility, allowing you to locate the compressor wherever it’s most convenient for your
system operation.

Cryo-Torr 100 Cryopump

Parameter Specifications
Rough Pump Connection NW 25 ISO KF
Integrated Hardware Second Stage Diode
Pumping Speeds
Water 1100 liters/sec
Air 350 liters/sec
Hydrogen 480 liters/sec
Argon 285 liters/sec
Argon Throughput 75 scc/min. (1 torr liter/second)
Capacity:
Argon 90 std. liters
Hydrogen 2 STD. LITERS @5 x 10-6 torr
Crossover 40 torr-liters
Cooldown Time 75 minutes nominal
Dimensions Length – 12.9 inches (328 mm)

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This Item is subject to prior sale without notice.

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