Description
Sold.
Canon MPA 600FA – Mirror Projection Aligner
1X Mirror Projection
Auto Feeder: Single or double, cassette to cassette, backside wafer handling
Wafer Sizes: 4”, 5”, 6”
Mask Sizes: 5”, 6”, 7”
Resolution: 1.5 um (using positive resist)
Illumination: 2kw high pressure mercury lamp
Wavelengths used: 365nm(i-line) 405nm(h-line) 436nm(g-line)
Intensity: (@ 1800watts power output) 4”wafer-more than 700mw, 5”wafer-more than 650mw, 6”wafer-more than 600mw
Intensity / Exposure Uniformity: within +-3%
Constant Temperature Control – monitors and controls system temp. within +-.3 degrees C.
Automatic Alignment: HeNe (633nm) Laser Beam Scanning
Alignment Modes: Spot Beam / Sheet Beam
Accuracy: 3sigma <=.54um
MPA-600FA: 200 VAC, 3Phase, 6 kVA, 50/60Hz
Air Supply(CTC): 200 VAC, 3Phase, 8 kVA, 50/60Hz
CDA(Clean Dry Air)Pressure: minimum 6.5 kg/cm2 , flow rate 130 lit/min
Vacum: 50 cmHg or more
Valid Time: Subject to prior sale without notice.
SS112540586574
