ATV PEO 601 furnace, anneal

Description

Used Equipment in stock. Location: USA. Condition: Used.We sell it at AS IS,WHERE IS.

ATV PEO 601 furnace, anneal

Info on the system from OEM website for your reference only.

Multipurpose table top fast ramping furnaces PEO series with single quartz tube. It was initially developed for thick film paste firing. Since that a large variety of new and different processes and applications was and is still being added. ATV applies its PEO series successfully also in semiconductor market segment.

The PEO series is ideal tool for R&D purposes. The PEO-601 can be applied easily for new unique and sophisticated process development as well low volume production applications. This multipurpose furnace has several key aspects integrated and can handle wafers up to 100mm.

Next to floor space saving advantages the PEO also has close to Zero energy usage in ambient stand-by. Another unique aspect of the system is the multi process capability when using our easily exchangeable liners. To reach the optimal temperature uniformity ATV uses 14 Kanthal heating elements which are positioned around, at the front and on back side the process tube and are PID controlled

Technical Data PEO-601

Depending on system configuration

Footprint:

710 x 650 x 450mm (LxWxH)

Weight:

47kg (minimum configuration)

Inner Quartz tube:

112mm (4-1/2”)

Maximum Product Temperature:

1.000°C continuously

Flat Zone:

Up to 40 wafers, 100mm diameter

Power connection:

3Phases, 230/400V, 16A, max.7kW

Common Applications PEO-601

depending on system configuration

Solid Source Diffusion
Wet/Dry Oxidation
SiAl/SiAu/SiMo alloying
Annealing:

Inert/Atmosphere
Polyimide, Curing/Baking
LTCC Sintering, Thick film paste sintering

Features PEO-601

depending on system configuration/options

Floor space saving by small foot print
Energy saving by close to zero at ambient standby
Max 40 wafer/process run
Up to 100mm wafers
Easily exchangeable quartz In Liners
Low temperature processing by gas preheating
100 steps/program

These are subject to prior sale. These are only for end user. Appreciate your time.

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.

SS380EB

Other ATV products:

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SRO-i-line:HIGH VOLUME PRODUCTION
SRO-700:TABLE TOP – IR VACUUM REFLOW SYSTEM
SRO-716:IR VACUUM REFLOW SYSTEM
SRO-706 Getter:PROGRAMMABLE SOLDER REFLOW OVEN,THERMAL REACTOR, HIGH VACUUM PACKAGE LID SEALING SYSTEM,THERMAL GETTER ACTIVATION