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SemiStar Corp. Semiconductor Equipment Parts Service

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Lam Rainbow 4400B SN2357

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Lam Rainbow 4400B SN2333

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Pump and Frame for Lam Rainbow 4XXX Series

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Parts for Lam Rainbow 4XXX Series

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RF Generators with Cart for Lam Rainbow 4XXX Series

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Chillers for Lam Rainbow 4XXX Series

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RF Generator Carts for Lam Rainbow 4XXX Series

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Service Monitor for Lam Rainbow 4XXX Series

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Matrix105 -ID 4

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Matrix 105 -ID 6

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Matrix 105 -ID 7

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Lam Rainbow 4400B SN2357

Lam Rainbow 4400B SN2333

Pump and Frame for Lam Rainbow 4XXX Series

Parts for Lam Rainbow 4XXX Series

RF Generators with Cart for Lam Rainbow 4XXX Series

Chillers for Lam Rainbow 4XXX Series

RF Generator Carts for Lam Rainbow 4XXX Series

Service Monitor for Lam Rainbow 4XXX Series

Matrix105 -ID 4

Matrix 105 -ID 6

Matrix 105 -ID 7