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OEMs: AG Associates
Branson/IPC
Brooks Equipe PRI
CHA
Ekrubnano
Electroglas
F.E.I.
Gasonics
Glow-Research
HP Agilent
Hitachi
KLA-Tencor
Lam Research
Matrix
MRC
NanoMaster
Oxford
Perkin-Elmer
PlasmaTherm
Premtek
STS SPTS
Tegal
Temescal
TES
Tystar
USIC -Wafers
Pumps
Chillers
Si Wafer Carriers

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SemiStar Corp. Semiconductor Equipment Parts Service

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Branson L3200 ICP Plasma Asher

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Tegal Plasmaline 411 Asher (Plasma Oven) Ar O2 Asher Etcher

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PVA TEPLA 100 Asher System Etcher Cleaner

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Tegal Plasmaline 515 Asher (Plasma Oven)

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YIELD YES-CV108 Plasma Asher

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TEGAL 211 PLASMA ASHER

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TEGAL 415 PLASMA ASHER

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TEGAL 515 PLASMA ASHER

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Nanometrics 210

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Chamber and chiller

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Lam AutoEtch 490 Parts Machine

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Branson L3200 ICP Plasma Asher

Tegal Plasmaline 411 Asher (Plasma Oven) Ar O2 Asher Etcher

PVA TEPLA 100 Asher System Etcher Cleaner

Tegal Plasmaline 515 Asher (Plasma Oven)

YIELD YES-CV108 Plasma Asher

TEGAL 211 PLASMA ASHER

TEGAL 415 PLASMA ASHER

TEGAL 515 PLASMA ASHER

Nanometrics 210

Chamber and chiller

Lam AutoEtch 490 Parts Machine